Device failure analysis by scanning electron microscopy

Davies, I. G.; Shaw, D. A.; Sulway, D. V.; Thornton, P. R.; Wayte, R. C.

NASA NTRS · 19690006630

Device failure analysis by scanning electron microscopy

Davies, I. G.·Shaw, D. A.·Sulway, D. V.·Thornton, P. R.·Wayte, R. C.

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Abstract

Scanning electron microscopy for semiconductor device failure analysis

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Davies, I. G., Shaw, D. A., Sulway, D. V., Thornton, P. R., Wayte, R. C.. 1968-01-01. Device failure analysis by scanning electron microscopy. https://ntrs.nasa.gov/citations/19690006630

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