NASA NTRS · 19690054901
Scanning electron microscopy in device diagnostics and reliability physics.
Abstract
Scanning electron microscopy to study device failure and performance, discussing limitations and progress
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Shaw, D. A., Sulway, D. V., Thornton, P. R.. 1969-04-01. Scanning electron microscopy in device diagnostics and reliability physics.. https://ntrs.nasa.gov/citations/19690054901
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