@misc{indiciae7dd8a5cd9121,
  title = {Scanning electron microscopy in device diagnostics and reliability physics.},
  author = {Shaw, D. A. and Sulway, D. V. and Thornton, P. R.},
  year = {1969},
  url = {https://ntrs.nasa.gov/citations/19690054901},
  note = {Source identifier: 19690054901}
}