Scanning electron mirror microscopy and scanning electron microscopy of integrated circuits.
Scanning electron mirror microscope advantages over electron mirror and scanning electron microscopes for examining integrated circuits
Cline, J. E.↗
SEARCH · Engineering Papers
Results for “ELECTRON SCANNING”
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Spatial Resolution in Scanning Electron Microscopy and Scanning Transmission Electron Microscopy Without a Specimen Vacuum Chamber
Abstract A long-standing goal of electron microscopy has been the high-resolution characterization of specimens in their native environment. However, electron optics require high vacuum to maintain an unscattered and focused probe, a challenge for specimens requiring atmospheric or liquid environments. Here, we use an electron-transparent window at the base of a scanning electron microscope’s objective lens to separate column vacuum from the specimen, enabling imaging under ambient conditions, without a specimen vacuum chamber. We demonstrate in-air imaging of specimens at nanoscale resolution using backscattered scanning electron microscopy (airSEM) and scanning transmission electron microscopy. We explore resolution and contrast using Monte Carlo simulations and analytical models. We find that nanometer-scale resolution can be obtained at gas path lengths up to 400 μ m, although contrast drops with increasing gas path length. As the electron-transparent window scatters considerably more than gas at our operating conditions, we observe that the densities and thicknesses of the electron-transparent window are the dominant limiting factors for image contrast at lower operating voltages. By enabling a variety of detector configurations, the airSEM is applicable to a wide range of environmental experiments including the imaging of hydrated biological specimens and in situ chemical and electrochemical processes.
Nguyen, Kayla X. (ORCID:0000000192537064)↗
The combination of scanning electron and scanning probe microscopy
We suggest the SPM module to combine SEM and SPM methods for studying surfaces. The module is based on the original mechanical moving and scanning system. The examples of studies of the steel surface microstructure in both SEM and SPM modes are presented.
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗
Thickness determination of few-layer hexagonal boron nitride films by scanning electron microscopy and Auger electron spectroscopy
We assess scanning electron microscopy (SEM) and Auger electron spectroscopy (AES) for thickness measurements on few-layer hexagonal boron nitride (h-BN), the layered dielectric of choice for integration with graphene and other two-dimensional materials. Observations on h-BN islands with large, atomically flat terraces show that the secondary electron intensity in SEM reflects monolayer height changes in films up to least 10 atomic layers thickness. From a quantitative analysis of AES data, the energy-dependent electron escape depth in h-BN films is deduced. The results show that AES is suitable for absolute thickness measurements of few-layer h-BN of 1 to 6 layers.
36 MATERIALS SCIENCE↗
Photoemission electron microscopy and scanning electron microscopy of Magnetospirillum magnetotacticum ’s magnetosome chains
Magnetotactic bacteria are of great interdisciplinary interest, since a vast field of applications from magnetic recording media to medical nanorobots is conceivable. A key feature for a further understanding is the detailed knowledge about the magnetosome chain within the bacteria. We report on two preparation procedures suitable for UHV experiments in reflective geometry. Further, we present the results of scanning electron microscopy, as well as the first photoemission electron microscopy experiments, both accessing the magnetosomes within intact magnetotactic bacteria and compare these to scanning electron microscopy data from the literature. From the images, we can clearly identify individual magnetosomes within their chains.
Keutner, Christoph↗
Electronic Scanning Strategies in Adaptive Electrical Capacitance Volume Tomography: Tradeoffs and Prospects
Electrical Capacitance Volume Tomography (ECVT) has been applied for imaging of multiphase flows found in industrial applications. The ill-posed nature of the image reconstruction problem in ECVT and the consequent low resolution can be alleviated by employing electronic scanning enabled by electrode segmentation and reconfiguration during data acquisition. Here we study electronic scanning strategies that mimic physical rotation and shifting of the sensor along its symmetry axis. First, we study the feasibility of electronic scanning by analyzing the capacitance transducer circuit in SPICE. Then, we simulate electronic scanning using the finite element method for different electrode shapes, for which we compare the image reconstruction results and acquisition time. We find a noticeable improvement in image resolution for the scanning cases over conventional ECVT. Lastly, among the scanning cases, we emphasize a particular electrode shape that provides the best image resolution along with the minimal amount of acquisition time.
47 OTHER INSTRUMENTATION↗
Resolving the Electron Plume within a Scanning Electron Microscope
Scanning electron microscopy (SEM), a century-old technique, is today a ubiquitous method of imaging the surface of nanostructures. However, most SEM detectors simply count the number of secondary electrons from a material of interest, and thereby overlook the rich material information contained within them. Here, by simple modifications to a standard SEM tool, we resolve the momentum and energy information on secondary electrons by directly imaging the electron plume generated by the electron beam of the SEM. Leveraging these spectroscopic imaging capabilities, our technique is able to image lateral electric fields across a prototypical silicon p–n junctions and to distinguish differently doped regions, even when buried beyond depths typically accessible by SEM. Intriguingly, the subsurface sensitivity of this technique reveals unexpectedly strong surface band bending within nominally passivated semiconductor structures, providing useful insights for complex layered component designs, in which interfacial dynamics dictate device operation. Further, these capabilities for noninvasive, multimodal probing of complicated electronic components are crucial in today’s electronic manufacturing but is largely inaccessible even with sophisticated techniques. These results show that seemingly simple SEM can be extended to probe complex and useful material properties.
36 MATERIALS SCIENCE↗
A new apparatus for electron tomography in the scanning electron microscope
The three-dimensional reconstruction of a microscopic specimen has been obtained by applying the tomographic algorithm to a set of images acquired in a Scanning Electron Microscope. This result was achieved starting from a series of projections obtained by stepwise rotating the sample under the beam raster. The Scanning Electron Microscope was operated in the scanning-transmission imaging mode, where the intensity of the transmitted electron beam is a monotonic function of the local mass-density and thickness of the specimen. The detection strategy has been implemented and tailored in order to maintain the projection requirement over the large tilt range, as required by the tomographic workflow. A Si-based electron detector and an eucentric-rotation specimen holder have been specifically developed for the purpose.
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗
Cryogenic Multichannel Pressure Sensor With Electronic Scanning
Array of pressure sensors operates reliably and repeatably over wide temperature range, extending from normal boiling point of water down to boiling point of nitrogen. Sensors accurate and repeat to within 0.1 percent. Operate for 12 months without need for recalibration. Array scanned electronically, sensor readings multiplexed and sent to desktop computer for processing and storage. Used to measure distributions of pressure in research on boundary layers at high Reynolds numbers, achieved by low temperatures.
Hopson, Purnell, Jr.↗
Evaluation of semiconductor devices using the scanning electron microscope
Scanning electron microscope for evaluating failure mechanisms in semiconductor devices, and for three-dimensional representation of biological specimens
FLAW DETECTION↗
Device failure analysis by scanning electron microscopy
Scanning electron microscopy for semiconductor device failure analysis
Davies, I. G.↗
Microcircuit testing and fabrication, using scanning electron microscopes
Scanning electron microscopes are used to determine both user-induced damages and manufacturing defects subtle enough to be missed by conventional light microscopy. Method offers greater depth of field and increased working distances.
Nicolas, D. P.↗
Influence of mechanical noise inside a scanning electron microscope
The scanning electron microscope is becoming a popular tool to perform tasks that require positioning, manipulation, characterization, and assembly of micro-components. However, some of these applications require a higher level of performance with respect to dynamics and precision of positioning. One limiting factor is the presence of unidentified noises and disturbances. This work aims to study the influence of mechanical disturbances generated by the environment and by the microscope, identifying how these can affect elements in the vacuum chamber. To achieve this objective, a dedicated setup, including a high-resolution vibrometer, was built inside the microscope. This work led to the identification and quantification of main disturbances and noise sources acting on a scanning electron microscope. Furthermore, the effects of external acoustic excitations were analysed. Potential applications of these results include noise compensation and real-time control for high accuracy tasks.
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗
The application of channel electron multipliers to scanning electron microscopy Progress report
Channel electron multipliers for cathode luminescent collection of topographic details
Shaw, D. A.↗
System and method for compressive scanning electron microscopy
A scanning transmission electron microscopy (STEM) system is disclosed. The system may make use of an electron beam scanning system configured to generate a plurality of electron beam scans over substantially an entire sample, with each scan varying in electron-illumination intensity over a course of the scan. A signal acquisition system may be used for obtaining at least one of an image, a diffraction pattern, or a spectrum from the scans, the image, diffraction pattern, or spectrum representing only information from at least one of a select subplurality or linear combination of all pixel locations comprising the image. A dataset may be produced from the information. A subsystem may be used for mathematically analyzing the dataset to predict actual information that would have been produced by each pixel location of the image.
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
Monte Carlo modeling of cavity imaging in pure iron using back-scatter electron scanning microscopy
Not provided.
Materials Science↗
The MOCHII ISS National Laboratory: The First Spacecraft Based Scanning Electron Microscope
Introduction: Scanning electron microscopy (SEM) in concert with element identification by energy dispersive Xray (EDX) spectroscopy has become an indispensable tool in the analyses of extraterrestrial materials. Nevertheless, to-date, SEM-EDX instrumentation has remained purely in the purview of terrestrial laboratories due to their size, complexity, and operational requirements. However, in January 2022 a miniaturized SEM-EDX called MOCHII became the first successful space-based instrument of its kind, following its deployment onboard the International Space Station (ISS). It represents the culmination of nearly 40 years of technological development. We have performed an on-orbit study with MOCHII with the goal of evaluating its potential as the progenitor of a new generation of spacecraftbased instruments for use in future manned and robotic planetary exploration missions. Out goal has been to validate the on-orbit investigation of samples relevant to astromaterials and astrobiology. We have performed in-situ analyses on standards and a freshly fractured fragment of the Martian meteorite Allan Hills 84001 which was first analyzed, prior to launch, using an engineering MOCHII ground unit located at Johnson Space Center in Houston. Results of both imaging and compositional analyses substantiates the utility of remote SEM-EDX analyses in low Earth orbit (LEO).
Miniature Scanning Electron Microscope↗