NASA NTRS · 19750000304
Microcircuit testing and fabrication, using scanning electron microscopes
Abstract
Scanning electron microscopes are used to determine both user-induced damages and manufacturing defects subtle enough to be missed by conventional light microscopy. Method offers greater depth of field and increased working distances.
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Nicolas, D. P.. 1975-12-01. Microcircuit testing and fabrication, using scanning electron microscopes. https://ntrs.nasa.gov/citations/19750000304
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