DOE OSTI · 2003173
Atomic Precision Patterning and Alignment for Dopant-based Quantum Devices.
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Owen, J. H. G, Fuchs, E, Santini, R., Randall, J. N, Mendez Granado, Juan, Gao, Xujiao, Misra, Shashank. 2022-05-01. Atomic Precision Patterning and Alignment for Dopant-based Quantum Devices.. https://doi.org/10.2172/2003173
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