@misc{indiciae1b24fa590673,
  title = {Atomic Precision Patterning and Alignment for Dopant-based Quantum Devices.},
  author = {Owen, J. H. G and Fuchs, E and Santini, R. and Randall, J. N and Mendez Granado, Juan and Gao, Xujiao and Misra, Shashank},
  year = {2022},
  doi = {10.2172/2003173},
  url = {https://www.osti.gov/biblio/2003173},
  note = {Source identifier: 2003173}
}