FAIR DEAL Grand Challenge Overview

Allemang, Christopher; Anderson, Evan; Baczewski, Andrew David; Bussmann, Ezra; Butera, Robert; Campbell, DeAnna; Campbell, Quinn; Carr, Stephen; Frederick, Esther; Gamache, Phillip; Gao, Xujiao; Grine, Albert; Gunter, Mathew; Halsey, Connor; Ivie, Jeffrey; Katzenmeyer, Aaron; Leenheer, Andrew; Lepkowski, William; Lu, Tzu-Ming; Mamaluy, Denis; Mendez Granado, Juan; Pena, Luis; Schmucker, Scott; Scrymgeour, David; Tracy, Lisa; Wang, George; Ward, Dan; Young, Steve

doi:10.2172/1854733

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DOE OSTI · 1854733

FAIR DEAL Grand Challenge Overview

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Abstract

While it is likely practically a bad idea to shrink a transistor to the size of an atom, there is no arguing that it would be fantastic to have atomic-scale control over every aspect of a transistor – a kind of crystal ball to understand and evaluate new ideas. This project showed that it was possible to take a niche technique used to place dopants in silicon with atomic precision and apply it broadly to study opportunities and limitations in microelectronics. In addition, it laid the foundation to attaining atomic-scale control in semiconductor manufacturing more broadly.

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74 ATOMIC AND MOLECULAR PHYSICS 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

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Allemang, Christopher, Anderson, Evan, Baczewski, Andrew David, Bussmann, Ezra, Butera, Robert, Campbell, DeAnna, Campbell, Quinn, Carr, Stephen, Frederick, Esther, Gamache, Phillip, Gao, Xujiao, Grine, Albert, Gunter, Mathew, Halsey, Connor, Ivie, Jeffrey, Katzenmeyer, Aaron, Leenheer, Andrew, Lepkowski, William, Lu, Tzu-Ming, Mamaluy, Denis, Mendez Granado, Juan, Pena, Luis, Schmucker, Scott, Scrymgeour, David, Tracy, Lisa, Wang, George, Ward, Dan, Young, Steve. 2021-09-01. FAIR DEAL Grand Challenge Overview. https://doi.org/10.2172/1854733

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