Enhanced Robustness of Atomic Precision Devices under Accelerated Lifetime Testing
Presentation at MRS2023 Spring meeting on APAM robustness topic from FAIR DEAL GC.
Engineering topics
Publications and source records attributed to Halsey, Connor.
Presentation at MRS2023 Spring meeting on APAM robustness topic from FAIR DEAL GC.
Abstract not provided.
While it is likely practically a bad idea to shrink a transistor to the size of an atom, there is no arguing that it would be fantastic to have atomic-scale control over every aspect of a transistor – a kind of crystal ball to understand and evaluate new ideas. This project showed that it was possible to take a niche technique used to place dopants in silicon with atomic precision and apply it broadly to study opportunities and limitations in microelectronics. In addition, it laid the foundation to attaining atomic-scale control in semiconductor manufacturing more broadly.