NASA NTRS · 20060040282
MSTAR: a sub-micron absolute metrology system
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Lay, O., Dubovitsky, S., Peters, R., Burger, J., Ahn, S. W., Steier, W., Fetterman, H.. 2002-01-01. MSTAR: a sub-micron absolute metrology system. https://ntrs.nasa.gov/citations/20060040282
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