@misc{indiciae55493d1abeb4,
  title = {MSTAR: a sub-micron absolute metrology system},
  author = {Lay, O. and Dubovitsky, S. and Peters, R. and Burger, J. and Ahn, S. W. and Steier, W. and Fetterman, H.},
  year = {2002},
  url = {https://ntrs.nasa.gov/citations/20060040282},
  note = {Source identifier: 20060040282}
}