Virtual phase imager for Galileo

Abstract

A CCD imaging array with a new virtual-phase technology that has been developed for use in a slow-scan imaging system for NASA's Galileo mission to Jupiter is described. Among its features are an absence of interlevel shorts, simplicity of fabrication, low dark current (less than 0.4 nA/sq cm), high full well, high quantum efficiency in the front side illumination mode, large dynamic range (greater than 5000), good charge transfer efficiency (0.99997), excellent linearity (0.2%), uniform pixel response (1%), and improved radiation hardness. It is noted that its operating voltages must be constrained to narrow windows to maintain good charge transfer efficiency and avoid the production of spurious and leakage charge.