NASA NTRS · 19810048442
A high frequency silicon pressure sensor
Abstract
Theoretical and design considerations as well as fabrication and experimental work involved in the development of high-frequency silicon pressure sensors with an ultra-small diaphragm are discussed. A sensor is presented with a rectangular diaphragm of 0.0127 cm x 0.0254 cm x 1.06 micron; the sensor has a natural frequency of 625 kHz and a sensitivity of 0.82 mv/v-psi. High-frequency results from shock tube testing and low-frequency (less than 50 kHz) comparison with microphones are given.
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Kahng, S. K., Gross, C.. 1980-01-01. A high frequency silicon pressure sensor. https://ntrs.nasa.gov/citations/19810048442
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