Engineering topics

Kahng, S. K.

Publications and source records attributed to Kahng, S. K..

3 records

NASA NTRS1980

Miniature piezoresistive solid state integrated pressure sensors

The characteristics of silicon pressure sensors with an ultra-small diaphragm are described. The pressure sensors utilize rectangular diaphragm as small as 0.0127 x 0.0254 cm and a p-type Wheatstone bridge consisting of diffused piezoresistive elements, 0.000254 cm by 0.00254 cm. These sensors exhibit as high as 0.5 MHz natural frequency and 1 mV/V/psi pressure sensitivity. Fabrication techniques and high frequency results from shock tube testing and low frequency comparison with microphones are presented.

Kahng, S. K.↗

NASA NTRS1980

A high frequency silicon pressure sensor

Theoretical and design considerations as well as fabrication and experimental work involved in the development of high-frequency silicon pressure sensors with an ultra-small diaphragm are discussed. A sensor is presented with a rectangular diaphragm of 0.0127 cm x 0.0254 cm x 1.06 micron; the sensor has a natural frequency of 625 kHz and a sensitivity of 0.82 mv/v-psi. High-frequency results from shock tube testing and low-frequency (less than 50 kHz) comparison with microphones are given.

Kahng, S. K.↗

NASA NTRS1972

Development of piezoelectric skin friction force vector transducer for a hypersonic wind tunnel

A surface shear force transducer for use in impulse type hypersonic tunnels is described. Sensors are constructed of lead zirconate titanate composition piezoelectric ceramic materials. The diameter of the sensing diaphragm is 0.75 inches and overall transducer dimensions are 1.0 inch diameter and 0.625 inch height. Analysis of the tranducer is made to help design criteria and fabrication techniques. Discussions on design and fabrication techniques are presented as well as performance of transducers delivered.

Kahng, S. K.↗