NASA NTRS · 19720031811
A large granite stage and measuring microscope.
Abstract
A stage and measuring microscope servocontrolled by a computer have been constructed. The travel of the stage is 0.5 x 0.5 m and the travel of the microscope objective is 7.5 cm. The measuring accuracy is 1 micron in the x-y plane and 5 microns along the z axis. The mechanical and optical construction of the stage and microscope, as well as the way in which the control electronics are organized, permit great flexibility of operation. Possible applications include the scanning and measuring of astronomical plates, the laying out of patterns of semiconductor devices of very large sizes, and the measurement of precision grids.
Keep this discovery
Explore connections, maps & timelines
Alston-Garnjost, M., Davis, J. W., Dauber, P. M., Smits, R. G.. 1971-11-01. A large granite stage and measuring microscope.. https://ntrs.nasa.gov/citations/19720031811
Cite the original work for its findings. Save a collection to share your selection of sources.