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Comparison of Fuel Cycles for Lead-Lithium and Pure Lithium Liquid Metal Walls in a Magnetized Target Fusion Power Plant

General Fusion (GF) is developing an adaptable, commercial fusion power plant based on magnetized target fusion (MTF). The GF approach involves forming a spherical torus of deuterium-tritium plasma in a large (~4 m diameter) cavity formed in liquid metal, and then collapsing that cavity with an array of pneumatic piston drivers. The liquid metal is constantly flowing through the fusion chamber and out to processing systems where tritium and heat will be extracted using tritium extraction technologies and heat exchangers, respectively. Here, this study focuses on two candidate designs for the liquid metal blanket and first wall material for the General Fusion Magnetized Target Fusion (GF MTF) power plant and assesses their impact on the tritium fuel cycle. The first candidate is the lead lithium eutectic (LLE) and the second candidate is pure lithium (Li). It was found that the main differences between LLE and Li designs are the extraction technologies required to remove tritium from the blanket and the amount of tritium and its distribution within the facility. More than 80% of the in-process tritium inventory for the LLE design is contained in the isotope separation system, while for the Li design, over 60% of the in-process tritium inventory is contained within the blanket material. This is due to significant tritium retention by Li. For the Li blanket, the burden of tritium processing rests on the blanket extraction technology rather than the traditional exhaust processing route. Thus, the blanket extraction technology is a main driver of tritium inventory in the Li system and determines the subsequent interface with the tritium processing plant.

General Fusion

Topography restoration in white-light interferometry using an instrument transfer function evaluated with binary pseudo-random arrays

Accurate knowledge of the instrument transfer function (ITF) is vital for topography measurements using white-light interferometry (WLI). To this end, we derive a complete set of analytical expressions for the power spectral density (PSD) of a discretely sampled binary pseudo-random array (BPRA) as a theoretical benchmark. We then determine the ITF by comparing this theoretical PSD with the measured PSD of the BPRA. For the Zygo ZeGage Pro HR with a objective, the determined ITF closely matches the nominal modulation transfer function (MTF). Accordingly, we integrate the nominal MTF into Fourier-domain restoration filters and apply them to practical WLI topography data, yielding restored topographies that show improved agreement with atomic force microscopy measurements. Overall, our integrated BPRA-based ITF measurement and filtering methodology offers a robust yet practical means of characterizing WLI performance and enhancing the accuracy of surface measurements.

Hirose, Shigenobu [Japan Agency for Marine Earth S

Binary pseudo-random array standard for extreme ultraviolet lithography tool characterization

Extreme ultraviolet (EUV) imaging tools play a crucial role in EUV lithography. Achieving high accuracy in EUV metrology is essential for advanced semiconductor manufacturing. A thorough characterization of the instrumentation in use is required. Binary pseudo-random arrays (BPRAs) are an established standard for calibrating and characterizing optical instruments in the frequency domain. Here, we expand the BPRA standard to applications in EUV imaging. To extend the technology to the EUV spectral range, a high-resolution BPRA target with the smallest feature size of 40 nm is developed. The EUV BPRA target establishes an in situ and portable calibration and alignment standard for EUV imaging. The target is patterned by means of electron-beam lithography, using a nickel absorber with a thickness of 39 nm. The substrate is a 4″ silicon wafer with a molybdenum/silicon multilayer coating. To demonstrate the efficacy of the target and develop the instrument calibration protocol, the target is imaged on the Sharp Hyper-NA Actinic Reticle Review Project EUV mask microscope. Power spectral density (PSD) data are presented. The characteristics of the imaging system are imprinted on the PSD. The modulation transfer function is extracted from the PSD data. A partially coherent imaging model is used as a reference to the experimental results.

BPRA