DOE OSTI · 3421088
Topography restoration in white-light interferometry using an instrument transfer function evaluated with binary pseudo-random arrays
Abstract
Accurate knowledge of the instrument transfer function (ITF) is vital for topography measurements using white-light interferometry (WLI). To this end, we derive a complete set of analytical expressions for the power spectral density (PSD) of a discretely sampled binary pseudo-random array (BPRA) as a theoretical benchmark. We then determine the ITF by comparing this theoretical PSD with the measured PSD of the BPRA. For the Zygo ZeGage Pro HR with a objective, the determined ITF closely matches the nominal modulation transfer function (MTF). Accordingly, we integrate the nominal MTF into Fourier-domain restoration filters and apply them to practical WLI topography data, yielding restored topographies that show improved agreement with atomic force microscopy measurements. Overall, our integrated BPRA-based ITF measurement and filtering methodology offers a robust yet practical means of characterizing WLI performance and enhancing the accuracy of surface measurements.
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Hirose, Shigenobu [Japan Agency for Marine Earth Science and Technology (JAMSTEC), Kanagawa (Japan)] (ORCID:000000027780837X), Takacs, Peter Z. [Surface Metrology Solutions LLC, Minneapolis, MN (United States)] (ORCID:0000000264589278), Yashchuk, Valeriy V. [Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)] (ORCID:0000000179702862), Munechika, Keiko [HighRI Optics, Inc., Oakland, CA (United States)] (ORCID:0000000203758429), Kawamura, Yoji [Japan Agency for Marine Earth Science and Technology (JAMSTEC), Kanagawa (Japan)] (ORCID:0000000259315512), Oguni, Kenji [Japan Agency for Marine Earth Science and Technology (JAMSTEC), Kanagawa (Japan)], Hoshino, Yasushi [Kanagawa University (Japan)], Suzuki, Katsuhiko [Japan Agency for Marine-Earth Science and Technology (JAMSTEC), Kanagawa (Japan)], Rochester, Simon [Rochester Scientific, LLC, El Cerrito, CA (United States)] (ORCID:0000000152025718). 2025-06-25. Topography restoration in white-light interferometry using an instrument transfer function evaluated with binary pseudo-random arrays. https://doi.org/10.1364/ao.562002
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