Engineering Papers⌕ Search

SEARCH · Engineering Papers

Results for “BEOL”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 19 records
All sourcesNASA NTRSDOE OSTI
DOE OSTI2025

Vertical 2T-nC FeRAM Demonstration: BEOL Read Transistor for 4F 2 Memory Strings and Two-Terminal Selector Design for Polarization Disturb Mitigation

In this work, we demonstrate a vertical 2T-nC FeRAM with a back-end-of-line (BEOL) read transistor (T R ) for 4F 2 string and propose a selector design to mitigate polarization disturb in passive capacitor crossbar arrays. Key contributions include: 1) successful integration and operation composed of a Si MOSFET write transistor (T W ), 3-layer cylindrical ferroelectric capacitors, and Si-doped In 2 O 3 BEOL T R , demonstrating the feasibility of 4F 2 2T−nC string; 2) introducing nonlinearity into the capacitor stack to suppress ferroelectric voltage drop under inhibition biases while maintaining sufficient write voltage, reducing disturbance; 3)modeling and experimental validation of inserting a metalsemiconductor (a-Si)-metal (MSM) selector into the capacitor in mitigating the disturb, particularly achieving 9x reduction of disturb after 10 6 cycles in the V W /2 scheme.

42 ENGINEERING↗
DOE OSTI2026

Enhancing mobility and interface state engineering via UV-ozone treatment in BEOL-compatible ultrathin TiO 2 transistors

It has emerged as a potential candidate to improve the performance of monolithic-three-dimensional (M3D) integration of fused logic and memories through low-temperature in situ synthesis of high-performance metal–oxide–semiconductor (MOS) transistors. Here, we report the demonstration of the BEOL-compatible low thermal budget (350 °C) fabrication process of ultrathin-TiO2 transistors by the combination of RTA and UV-ozone treatment (RTA-UVOz). UV–ozone (UVOz) treatment of TiO2 anatase films significantly enhances stability, boosting ION current and field effect mobility (μ FE ) by two times of magnitude in TiO2 TFTs. UV ozone treatment helps to eliminate pre-existing oxygen vacancies and carbon contamination on TiO2 channels even at low temperature (100 °C), resulting in high-quality channel/dielectric interfaces with low interface states (D it ). During UVOz treatment, oxygen species (O x ) passivate the oxygen vacancies ($V$$^{2+}_{o}$), and hence low concentration of $V$$^{2+}_{o}$ would be left for ionization/de-ionization under PBS/NBS, leading to improved bias stress stability. Furthermore, the TiO 2 TFTs with thin ZrO 2 gate dielectric exhibited excellent performance including a lower subthreshold swing (SS) of 98 mV/dec with high drive I ON current ∼ 4.5 μA/μm, a high I ON /I OFF > 10 9 , and mobility μFE of 7 cm 2 /V-s under a battery powered voltage of 1 V. UV–ozone treatment enables high-performance, CMOS-compatible TiO 2 transistors with a low thermal budget, ideal for next-generation flexible, energy-efficient electronics.

BEOL↗
DOE OSTI2025

Amorphous Indium Oxide Channel FEFETs With Write Voltage of 0.9 V and Endurance >10 12 for Refresh-Free Embedded Memory

This work presents, for the first time, a back-end-of-the-line (BEOL)-compatible W-doped indium oxide (IWO) ferroelectric field-effect transistor (FEFET) with a record-low operating voltage below 0.9 V and a write speed of 20 ns while achieving a transient read current window (CW) ratio ( I LVT /I HVT ) greater than 10 4 . The device also exhibits exceptional reliability characteristics such as: 1) measured bipolar write endurance up to 10 12 cycles; 2) a fast read speed of 50 ns; 3) read endurance surpassing 10 12 cycles; and 4) retention exceeding 10 4 s at 85 ∘ C. Furthermore, a physics-based numerical model has been developed to investigate the nanoscale characteristics of BEOL FEFET devices, leveraging nucleation-limited switching in HfO 2 ferroelectrics and dc characterization to extract material and channel parameters for accurate device simulation. The simulation uncovers the stochastic switching behavior of BEOL amorphous oxide semiconductor (AOS) FEFETs and demonstrates an intrinsic switching time as low as 1 ps, highlighting the potential of BEOL AOS FEFETs for ultrafast memory applications. These results establish AOS FEFETs as a compelling candidate for high-density embedded memory applications for last-level cache (LLC) (L4) in advanced CMOS technology nodes.

1-V ferroelectric field-effect transistor (FEFET)↗
DOE OSTI2025

Multistate resistance in TaN/(Hf,Zr)O 2 /Ta ferroelectric tunnel junctions

Ferroelectric tunnel junctions (FTJs) utilizing hafnium zirconium oxide (HZO) have emerged as promising non-volatile memory elements for microelectronics, compatible with back end of line (BEOL) complementary–metal–oxide semiconductor fabrication. This study investigates asymmetric electrode TaN/HZO/Ta devices with a 6 nm thick HZO layer as FTJs for multistate resistive memory applications. The individual FTJs exhibit a resistance ratio exceeding 10× when utilized as a binary state device, with pulsing between −1.7 and +1.4 V to set the high resistance state (HRS) and low resistance state (LRS), respectively. Following with reduced write voltage pulses allows the ferroelectric device to operate with a selection of over 32 distinct resistance states (2 5 bits) between the LRS and HRS. This work then explores the stability of the resistance states during write/read pulse cycling, along with the stability of the state after multiple read pulses. Accessing the multibit state shows stability within 50 reads with the binary state remaining stable for more than 4000 reads pulses. With their multistate tunability and versatility, FTJs hold promise as BEOL memory elements for compute-in-memory (CiM) arrays, binary digital memory, or weighted vector matrix multiplication applications with low power consumption during computations.

CMOS↗
DOE OSTI2025

Thermally Stable Ruthenium Contact for Robust p‑Type Tellurium Transistors

Tellurium (Te) is attractive for p-channel transistors due to its high hole mobility. Despite having a low thermal budget suitable for back-end-of-line (BEOL) monolithic integration, the practical realization of Te transistors is hindered by its thermal stability. In this work, we investigate thermal stability for Te thin films grown via scalable thermal evaporation. Our findings identify ruthenium as a more thermally stable contact for p-type Te transistors, capable of withstanding temperatures up to 250 °C. Ruthenium exhibits significantly lower diffusivity in Te compared to other contact metals commonly used such as nickel and palladium. Using the transfer-length method, we measured a contact resistance of 1.25 kΩ·μm at the ruthenium-tellurium interface. Additionally, the incorporation of high-κ ZrO2 encapsulation not only suppresses the sublimation of the Te channel at elevated temperatures but also serves as the gate dielectric in top-gate devices operating at 1 V, achieving an on/off current ratio of 105.

Rahman, I K M Reaz↗
DOE OSTI2026

ALD-Derived WO 3– x Leads to Nearly Wake-Up-Free Ferroelectric Hf 0.5 Zr 0.5 O 2 at Elevated Temperatures

Breaking the memory wall in advanced computing architectures will require complex 3D integration of emerging memory materials such as ferroelectrics─either within the back-end-of-line (BEOL) of CMOS front-end processes or through advanced 3D packaging technologies. Achieving this integration demands that memory materials exhibit high thermal resilience, with the capability to operate reliably at elevated temperatures, such as 125°C, due to the substantial heat generated by front-end transistors. However, silicon-compatible HfO 2 -based ferroelectrics tend to exhibit antiferroelectric-like behavior in this temperature range, accompanied by a more pronounced wake-up effect, posing significant challenges to their thermal reliability. Here, we report that by introducing a thin tungsten oxide (WO 3–x ) layer─known as an oxygen reservoir─and carefully tuning its oxygen content, ultrathin Hf 0.5 Zr 0.5 O 2 (5 nm) films can be made robust against the ferroelectric-to-antiferroelectric transition at elevated temperatures. This approach not only minimizes polarization loss in the pristine state but also effectively suppresses the wake-up effect, reducing the required wake-up cycles from 10 5 to only 10 at 125°C, a qualifying temperature for back-end memory integrated with front-end logic, as defined by the JEDEC standard. First-principles density functional theory (DFT) calculations reveal that WO 3 enhances the stability of the ferroelectric orthorhombic phase (o-phase) at elevated temperatures by increasing the tetragonal-to-orthorhombic phase energy gap and promoting favorable phonon mode evolution, thereby supporting o-phase formation under both thermodynamic and kinetic constraints.

36 MATERIALS SCIENCE↗
DOE OSTI2025

Aluminum Boron Nitride Ferroelectric Field-Effect Transistors With ZnO Semiconductor Channel

The discovery of ferroelectricity in hafnium zirconium oxide (HfxZr 1−x O2) and related fluorite materials has spurred interest in ferroelectric devices suitable for integration with silicon integrated circuits (ICs), especially those that can be embedded in the back-end-of-line (BEOL) process. More recently, ferroelectricity has been found in wurtzite aluminum nitride-based materials, such as scandium and boron-doped aluminum nitride (Al 1−x ScxN and Al 1−x BxN). Although these materials currently have undesirably large coercive electric fields, and small breakdown electric field-to-coercive electric field ratio, their low processing temperatures and large remanent polarization offer intriguing possibilities for device applications. Furthermore, we report ferroelectric field-effect transistors (FeFETs) with a 15 nm thick Al0.88B0.12N layer and an 11 nm ZnO semiconductor channel, achieving a memory window >1 V and switching voltages ( V switch ) <±10 V.

42 ENGINEERING↗
DOE OSTI2025

First observation of strange baryon enhancement with effective energy in pp collisions at the LHC

The production of (multi-)strange hadrons is measured at midrapidity in proton-proton collisions at $\sqrt{s}$ = 13 TeV as a function of the local charged-particle multiplicity in the pseudorapidity interval |η| < 0.5 and of the very-forward energy measured by the ALICE Zero-Degree Calorimeters. The latter provides information on the effective energy, i.e. the energy available for particle production in the collision once subtracted from the centre-of-mass energy. The yields of K$^{0}_{s}$, $Λ$ + $\overline{Λ}$, and $Ξ$ – + $\overline{Ξ}$ + per charged-particle increase with the effective energy. In addition, this work exploits a multi-differential approach to decouple the roles of local multiplicity and effective energy in such an enhancement. The results presented in this article provide new insights into the interplay between global properties of the collision, such as the initial available energy in the event, and the locally produced final hadronic state, connected to the charged-particle multiplicity at midrapidity. Notably, a strong increase of strange baryon production with effective energy is observed for fixed charged-particle multiplicity at midrapidity. These results are discussed within the context of existing phenomenological models of hadronisation implemented in different tunes of the PYTHIA 8 event generator.

72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS↗
DOE OSTI2025

Multiplicity-dependent jet modification from di-hadron correlations in pp collisions at $ \sqrt{s} $ = 13 TeV

Short-range correlations between charged particles are studied via two-particle angular correlations in pp collisions at $\sqrt{s}$ = 13 TeV. The correlation functions are measured as a function of the relative azimuthal angle ∆φ and the pseudorapidity separation ∆η for pairs of primary charged particles within the pseudorapidity interval |η| < 0.9 and the transverse-momentum range 1 < p T < 8 GeV/c. Near-side (|∆φ| < 1.3) peak widths are extracted from a generalised Gaussian fitted over the correlations in full pseudorapidity separation (|∆η| < 1.8), while the per-trigger associated near-side yields are extracted for the short-range correlations (|∆η| < 1.3). Both are evaluated as a function of charged-particle multiplicity obtained by two different event activity estimators. The width of the near-side peak decreases with increasing multiplicity, and this trend is reproduced qualitatively by the Monte Carlo event generators PYTHIA 8, AMPT, and EPOS. However, the models overestimate the width in the low transverse-momentum region (p T < 3 GeV/c). The per-trigger associated near-side yield increases with increasing multiplicity. Although this trend is also captured qualitatively by the considered event generators, the yield is mostly overestimated by the models in the considered kinematic range. The measurement of the shape and yield of the short-range correlation peak can help us understand the interplay between jet fragmentation and event activity, quantify the narrowing trend of the near-side peak as a function of transverse momentum and multiplicity selections in pp collisions, and search for final-state jet modification in small collision systems.

72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS↗
DOE OSTI2025

Measurement of ω meson production in pp collisions at $\sqrt{s}$ = 13 TeV

The p T -differential cross section of ω meson production in pp collisions at $\sqrt{s}$ =13 TeV at midrapidity (|y| < 0.5) was measured with the ALICE detector at the LHC, covering an unprecedented transverse-momentum range of 1.6 < p T < 50 GeV/c. The meson is reconstructed via the ω → π + π − π 0 decay channel. The results are compared with various theoretical calculations: PYTHIA8.2 with the Monash 2013 tune overestimates the data by up to 50%, whereas good agreement is observed with Next-to-Leading Order (NLO) calculations incorporating ω fragmentation using a broken SU(3) model. The ω/π 0 ratio is presented and compared with theoretical calculations and the available measurements at lower collision energies. The presented data triples the p T ranges of previously available measurements. A constant ratio of C ω/π0 = 0.578 ± 0.006 (stat.) ± 0.013 (syst.) is found above a transverse momentum of 4 GeV/c, which is in agreement with previous findings at lower collision energies within the systematic and statistical uncertainties.

72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS↗
DOE OSTI2026

Space-time evolution of particle emission in p–Pb collisions at $\sqrt{{s}_{\text{NN}}} = 5.02$ TeV with 3D kaon femtoscopy

The measurement of three-dimensional femtoscopic correlations between identical charged kaons (K ± K ± ) produced in p–Pb collisions at center-of-mass energy per nucleon pair $\sqrt{{s}_{\text{NN}}}=5.02$ TeV with ALICE at the LHC is presented for the first time. This measurement, supplementary to those in pp and Pb–Pb collisions, allows understanding the particle-production mechanisms at different charged-particle multiplicities and provides information on the dynamics of the source of particles created in p–Pb collisions, for which a general consensus does not yet exist. It is shown that the measured source sizes increase with charged-particle multiplicity and decrease with increasing pair transverse momentum. These trends for K ± K ± are similar to the ones observed earlier in identical charged-pion and ${\text{K}}_{\text{s}}^{0}{\text{K}}_{\text{s}}^{0}$ correlations in Pb–Pb collisions at various energies and in π ± π ± correlations in p–Pb collisions at $\sqrt{{s}_{\text{NN}}}=5.02$ TeV. At comparable multiplicity, the source sizes measured in p–Pb collisions agree within uncertainties with those observed in pp collisions, and there is an indication that they are smaller than those observed in Pb–Pb collisions. The obtained results are also compared with predictions from the hadronic interaction model EPOS 3, which tends to underestimate the source size for the most central collisions and agrees with the data for semicentral and peripheral events. Furthermore, the time of maximal emission for kaons is extracted. It turns out to be comparable with the value obtained in highly peripheral Pb–Pb collisions at the same energy, indicating that the kaon emission evolution is similar to that in p–Pb collisions.

Heavy Ion Experiments↗
DOE OSTI2026

Observation of flow vector fluctuations in p–Pb collisions at \(\sqrt{{s}_{NN}}=5.02\) TeV

Measurements of transverse momentum (pT) and pseudorapidity (η) dependent flow vector fluctuations in p–Pb collisions at $$\sqrt{{s}_{NN}}=5.02$$ TeV at the CERN Large Hadron Collider are presented. By studying long-range two-particle correlations with a template fit method, potential biases from non-flow effects such as jets and resonance decays are effectively suppressed. Significant pT- and η-dependent fluctuations of the second-harmonic flow vector are observed with more than 5σ confidence in p–Pb collisions, similar to the observations in Pb–Pb collisions. The influence of residual non-flow effects has been evaluated and cannot account for the observed fluctuations, thereby confirming the observation of flow vector fluctuations in small collision systems at the LHC. Comparisons to model calculations from 3DGlauber+MUSIC+UrQMD and the parton transport model from AMPT are also presented. The measurements provide constraints on the theoretical modelling of the three-dimensional initial geometry and its event-by-event fluctuations, offering critical insights into the origin of collective flow in small collision systems at the LHC.

Abdallah, D A H↗
DOE OSTI2026

Strangeness enhancement at its extremes: multiple (multi-)strange hadron production in pp collisions at \(\sqrt{s}=5.02\) TeV

The probability to observe a specific number of strange and multi-strange hadrons (nS), denoted as P(nS), is measured by ALICE at midrapidity (|y| < 0.5) in $$\sqrt{s}=5.02$$ TeV proton-proton (pp) collisions, dividing events into several multiplicity-density classes. Exploiting, for the first time, a technique based on counting the number of strange-particle candidates event-by-event, this measurement allows one to extend the study of strangeness production beyond the mean of the distribution. This constitutes a new test bench for production mechanisms, probing events with a large imbalance between strange and non-strange content. The analysis of a large-statistics data sample makes it possible to extract P(nS) up to a maximum nS of 7 for $${\text{K}}_{\text{S}}^{0}$$, 5 for Λ and $$\overline{\Lambda }$$, 4 for Ξ− and $${\overline{\Xi } }^{+}$$, and 2 for Ω− and $${\overline{\Omega } }^{+}$$. From this, the probability of producing strange hadron multiplets per event is calculated, thereby enabling the extension of the study of strangeness enhancement to extreme situations where several strange quarks hadronize in a single event at midrapidity. Moreover, comparing hadron combinations with different u and d quark compositions and equal overall s quark content, the contribution to the enhancement pattern coming from non-strangeness related mechanisms is isolated. The results are compared with state-of-the-art phenomenological models implemented in commonly used Monte Carlo event generators, including PYTHIA 8 Monash 2013, PYTHIA 8 with QCD-based Color Reconnection and Rope Hadronization (QCD-CR + Ropes), and EPOS LHC, which incorporates both partonic interactions and hydrodynamic evolution. These comparisons show that the new approach dramatically enhances the sensitivity to the different underlying physics mechanisms modeled by each generator.

Abualrob, I J↗
DOE OSTI2025

J/ ψ -hadron correlations at midrapidity in pp collisions at $\sqrt{s}$ = 13 TeV

We report on the measurement of inclusive, non-prompt, and prompt J/ψ-hadron correlations by the ALICE Collaboration at the CERN Large Hadron Collider in pp collisions at a center-of-mass energy of 13 TeV. The correlations are studied at midrapidity (|y| < 0.9) in the transverse momentum ranges p T < 40 GeV/c for the J/ψ and 0.15 < p T < 10 GeV/c and |η| < 0.9 for the associated hadrons. The measurement is based on minimum bias and high multiplicity data samples corresponding to integrated luminosities of L int = 34 nb −1 and L int = 6.9 pb −1 , respectively. In addition, two more data samples are employed, requiring, on top of the minimum bias condition, a threshold on the tower energy of E = 4 and 9 GeV in the ALICE electromagnetic calorimeters, which correspond to integrated luminosities of L int = 0.9 pb −1 and L int = 8.4 pb −1 , respectively. The azimuthally integrated near and away side yields of associated charged hadrons per J/ψ trigger are presented as a function of the J/ψ and associated hadron transverse momentum. The measurements are discussed in comparison to PYTHIA calculations.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗
DOE OSTI2025

Multiplicity-dependent inclusive J/ ψ production at forward rapidity in pp collisions at $\sqrt{s}$ = 13 TeV

This paper presents a study of the inclusive forward J/ψ yield as a function of forward charged-particle multiplicity in pp collisions at $\sqrt{s}$ = 13 TeV using data collected by the ALICE experiment at the CERN LHC. The results are presented in terms of relative J/ψ yields and relative charged-particle multiplicities with respect to these quantities obtained in inelastic collisions having at least one charged particle in the pseudorapidity range |η| < 1. The J/ψ mesons are reconstructed via their decay into μ + μ − pairs in the forward rapidity region (2.5 < y < 4). The relative multiplicity is estimated in the forward pseudorapidity range which overlaps with the J/ψ rapidity region. The results show a steeper-than-linear increase of the J/ψ yields versus the multiplicity. They are compared with previous measurements and theoretical model calculations.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗
DOE OSTI2025

Light neutral-meson production in pp collisions at $\sqrt{\text{s}}$ = 13 TeV

The momentum-differential invariant cross sections of π 0 and η mesons are reported for pp collisions at $\sqrt{s}$ = 13 TeV at midrapidity (|y| < 0.8). The measurement is performed in a broad transverse-momentum range of 0.2 < p T < 200 GeV/c and 0.4 < p T < 60 GeV/c for the π 0 and η, respectively, extending the p T coverage of previous measurements. Transverse-mass-scaling violation of up to 60% at low transverse momentum has been observed, agreeing with measurements at lower collision energies. Transverse Bjorken x (x T ) scaling of the π 0 cross sections at LHC energies is fulfilled with a power-law exponent of n = 5.01 ± 0.05, consistent with values obtained for charged pions at similar collision energies. The data are compared to predictions from next-to-leading order perturbative QCD calculations, where the π 0 spectrum is best described using the CT18 parton distribution function and the NNFF1.0 or BDSS fragmentation function. Expectations from PYTHIA8 and EPOS LHC overestimate the spectrum for the π 0 and are not able to describe the shape and magnitude of the η spectrum. The charged-particle multiplicity dependent π 0 and η p T spectra show the expected change of the spectral shape, characterized by a flatter slope with increasing multiplicity. This is demonstrated across a broad transverse-momentum range and up to events with a charged-particle multiplicity exceeding five times the mean value in minimum bias collisions. The η/π 0 ratio depends on the charged-particle multiplicity for p T < 4 GeV/c. PYTHIA8 and EPOS LHC qualitatively explain this behavior with an increasing contribution from the feed-down of heavier particles to the π 0 spectrum.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗
DOE OSTI2025

Measurement of correlations among net-charge, net-proton, and net-kaon multiplicity distributions in Pb-Pb collisions at $\sqrt{s_{NN}}$ = 5.02 TeV

Correlations among conserved quantum numbers, such as the net-electric charge, the net-baryon, and the net-strangeness in heavy-ion collisions, are crucial for exploring the QCD phase diagram. In this paper, these correlations are investigated using net-proton number (as a proxy for the net-baryon), net-kaon number (for the net-strangeness), and net-charged particle number in Pb-Pb collisions at $\sqrt{s_{NN}}$ = 5.02 TeV with the ALICE detector. The observed correlations deviate from the Poissonian baseline, with a more pronounced deviation at LHC energies than at RHIC. Theoretical calculations of the Thermal-FIST hadron resonance gas model, HIJING, and EPOS LHC event generators are compared with experimental results, where a significant impact of resonance decays is observed. Thermal-FIST calculations under the grand canonical and canonical ensembles highlight significant differences, underscoring the role of local charge conservation in explaining the data. Recent lattice QCD studies have demonstrated that the magnetic field generated by spectator protons in heavy-ion collisions affects susceptibility ratios, in particular those related to the net-electric charge and the net-baryon numbers. The experimental findings are in qualitative agreement with the expectations of lattice QCD.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗
DOE OSTI2025

First measurement of D* + vector meson spin alignment in Pb–Pb collisions at $\sqrt{{s}_{\text{NN}}}={5}.0{2}$ TeV

The first measurement of prompt D *+ -meson spin alignment in ultrarelativistic heavy-ion collisions with respect to the direction orthogonal to the reaction plane is presented. The spin alignment is quantified by measuring the element ρ 00 of the diagonal spin-density matrix for prompt D *+ mesons with 4 < p T < 30 GeV/c in two rapidity intervals, |y| < 0.3 and 0.3 < |y| < 0.8, in central (0–10%) and midcentral (30–50%) Pb–Pb collisions at $\sqrt{{s}_{\text{NN}}}={5}.0{2}$ TeV. Evidence of spin alignment ρ 00 > 1/3 has been found for p T > 15 GeV/c and 0.3 < |y| < 0.8 with a significance of 3.1σ. The measured spin alignment of prompt D *+ mesons is compared with the one of inclusive J/ψ mesons measured at forward rapidity (2.5 < y < 4).

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗