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The expanding areas of MEMS applications are often characterized by demanding operating conditions or harsh environments for those sensitive devices.
A novel Microelectromechanical Systems (MEMS) deformable mirror technology for large, lightweight, segmented space telescopes is being proposed.
MEMS fabrication processes are as diverse as their applications.
During the last decade, research and development of microelectromechanical systems (MEMS) has shown a significant promise for a variety of commercial applications including automobile and medical purposes.
Micro-Electrical Mechanical Systems (MEMS) are entering the stage of design and verification to demonstrate the utility of the technology for a wide range of applications including sensors and actuators for military, space, medical, industrial, consumer, automotive and instrumentation products.
In this paper, we present recent work on the design, fabrication, and packaging of a silicon MIcro-Electro-Mechanical System (MEMS) microgyroscope designed for space applications. A hermetically sealed package that houses the microgyroscope and most of its control electronics has been built and tested.
A prototype sun sensor has been developed. The accuracy of the MEMS based sun sensor on a chip is estimated to be 1 arcminute.
MEMS-based microchannel heat sinks are being investigated at the Jet Propulsion Laboratory for use in micro/nano spacecraft thermal control.
The success of NASA's future space missions and the development of portable, commercial instrument packages will depend greatly on miniaturized components enabled by the use of microelectromechanical systems (MEMS).
Research and development of Micro-Electro-Mechanical Systems (MEMS) in the last decade has shown a significant promise for a variety of commercial applications including automobile and medical purposes.
Three-dimesional MEMS microsystems that are commercially fabricated require minimal post-processing and are easily integrated with CMOS signal processing electronics.
Development of MEMS (Microelectromechanical Systems) micropropulsion at the Jet Propulsion Laboratory (JPL) is reviewed. This includes a vaporizing liquid micro-thruster for microspacecraft attitude control, a micro-ion emgine for microspacecraft primary propulsion or large spacecraft fine attitude control, as well as several valve studies, including a solenoid valve studied in collaboration with Moog Space Products Division, and a piezoelectric micro-valve.
Jet Propulsion Laboratory is looking for U.S. companies to license and further develop its family of piezoelectric MEMS microvalve technologies.
The purpose of this paper is to investigate potential reflectarray elements by taking into consideration the eventual implementation of MEMS technology for this particular application and detailed characterization of one of the potential element designs.
This slide presentation reviews a method for planet finding using microelectromechanical systems (MEMS) Adaptive Optics (AO). The use of a deformable mirror (DM) is described as a part of the instrument that was designed with a nulling interferometer. The strategy that is used is described in detail.
We report progress on a nulling coronagraph intended for direct imaging of extrasolar planets. White light is suppressed in an interferometer, and phase errors are measured by a second interferometer. A 1020-pixel MEMS deformable mirror in the first interferometer adjusts the path length across the pupil. A feedback control system reduces deflections of the deformable mirror to order of 1 nm rms.
The Analog Devices ADXL354 3-AXIS MEMS accelerometer was tested for single-event effects, both destructive and non-destructive. The device was characterized for single-event upset (SEU) sensitivity and evaluated for any possibility of single-event latchup (SEL), single-event dielectric rupture (SEDR) and single-event functional interrupts (SEFI). Single-event transient (SET) response was also monitored.
The future of robotic space missions in ever-smaller platforms and MicroElectroMechanical Systems (MEMS) will be key in this development.