NASA NTRS · 20060034574
Reliability Issues of COTS MEMS Packaging
Abstract
During the last decade, research and development of microelectromechanical systems (MEMS) has shown a significant promise for a variety of commercial applications including automobile and medical purposes.
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Gharrarian, R.. 2000-03-20. Reliability Issues of COTS MEMS Packaging. https://ntrs.nasa.gov/citations/20060034574
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