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715 records · Page 40

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DOE OSTI2020

Highly selective Si 3 N 4 /SiO 2 etching using an NF 3 /N 2 /O 2 /H 2 remote plasma. I. Plasma source and critical fluxes

Highly selective plasma etching of silicon nitride (Si 3 N 4 ), while not etching silicon dioxide (SiO 2 ), is a critical step in the fabrication of microelectronics devices. In many applications, this etching must be damage-free and isotropic, which then motivates the use of remote plasmas where the reactants interacting with the substrate are dominantly neutral species. In this paper and Paper II, mechanisms for highly selective Si 3 N 4 etching in remote plasmas are discussed based on results from experiments and simulations. It has been shown experimentally that high Si 3 N 4 /SiO 2 etch selectivity (≈380) can be achieved in the downstream effluent of an NF 3 /N 2 /O 2 /H 2 plasma. The authors found that H2 plays a principal role in the reaction mechanism as Si 3 N 4 /SiO 2 selectivity shows a sharp maximum as a function of the H2 flow rate. Based on this observation, and measured densities of F-atoms and H2 in the process chamber, a mechanism of selective Si 3 N 4 /SiO 2 etching is proposed in which HF molecules in vibrationally excited states accelerate etching reactions. A reaction mechanism for NF 3 /N 2 /O 2 /H 2 plasmas and its afterglow was developed to computationally determine the species densities and fluxes on the wafer level, validated by comparing with experimentally measured F-atom and H 2 densities. The calculated species densities and fluxes were used as input to an analytical model of Si 3 N 4 and SiO 2 etching based on the results of quantum chemistry simulations. This paper presents experimental results (etching data and species densities), the reaction mechanism for NF 3 /N 2 /O 2 /H 2 plasmas, and the results of simulations of gas phase chemistry. Quantum chemistry simulations of elementary etching reactions, description of the analytical model of Si 3 N 4 and SiO 2 etching, calculations of the etch rates, and Si 3 N 4 and SiO 2 selectivity with this model are presented in Paper II.

42 ENGINEERING↗

DOE OSTI2026

Modeling the effect of MHD activity on runaway electron generation during SPARC disruptions

Magnetohydrodynamic (MHD) instabilities and runaway electrons (REs) interact in several ways, making it important to self-consistently model these interactions for accurate predictions of RE generation and the design of mitigation strategies, such as massive gas injection (MGI). Using M3D-C1 – an extended MHD code with a RE fluid model – we investigate the effects of 3-D nonlinear MHD activity, material injection, and 2-D axisymmetric vertical displacement events (VDEs) on RE evolution during disruptions on SPARC – a high-field, high-current tokamak designed to achieve a fusion gain Q > 1. Several cases, comprising different combinations of neon (Ne) and deuterium (D 2 ) injection, are considered. Here, our results demonstrate key effects that arise from the self-consistent RE + MHD coupling, such as an initial increase in RE generation due to MHD instability growth, decreased saturation energies of the m/n = 1/1 mode driving sawteeth-like activity, RE losses in stochastic magnetic fields, and subsequent RE confinement and plateau formation due to re-healing of flux surfaces. Large RE plateaus (>5 MA) are obtained with Ne-only injection (2-5 × 10 21 atoms), while combined D 2 + Ne injection (2 × 10 21 Ne atoms; 1.8 × 10 22 D 2 molecules) produces a lower RE current (<2 MA). With D 2 + Ne injection, a post thermal quench "cold" VDE terminates the RE beam, preventing a steady plateau. These simulations couple REs, 3-D MHD instabilities, MGI, and axisymmetric VDEs for the first time in SPARC disruption simulations and represent a crucial step in understanding RE generation and mitigation in high-current devices like SPARC.

Datta, Rishabh [Massachusetts Inst. of Technology ↗

DOE OSTI2023

Same-sided successive-shock HED instability experiments

Inertial confinement fusion (ICF) and high-energy density (HED) physics experiments experience complicated forcing for instability growth and mix due to the ubiquitous presence of multiple shocks interacting with perturbations on multiple material interfaces. One common driver of instability growth is successive shocks from the same direction. However, there is a severe lack of analytic work and modeling validation for same-sided successive shocks since they are extremely difficult to achieve with conventional (non-HED) drivers. Successive shocks access a large instability parameter space; idealized fluid theory [K. O. Mikaelian, Phys. Rev. A 31, 410 (1985)] predicts 15 different interface evolution scenarios for a sinusoidal perturbation. Growth becomes more complex for multi-mode, compressible HED systems. The Mshock campaign is the first experiment in any fluid regime to probe a wide portion of successive shock parameter space. This is enabled by our development of a hybrid direct/indirect drive platform capable of creating independently controllable successive shocks on the National Ignition Facility. These experiments have delivered the first data capable of rigorously challenging our models and their ability to accurately capture Richtmyer–Meshkov growth under successive shocks. Single-mode and two-mode experiments have successfully demonstrated the ability to access and control the various growth scenarios of the shocked interface, including re-inversion, freeze out, and continued growth. Simulations and theoretical modeling are shown to accurately capture the experimental observations in the linear growth phase, giving us confidence in our ICF/HED design codes.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

DOE OSTI2022

Pit rim decomposition into multiple quantum dots on surfaces of epitaxial thin films grown on pit-patterned substrates

Here, we report results of dynamical simulations according to an experimentally validated surface morphological evolution model on the formation of regular arrays of quantum dot molecules (QDMs) consisting of 1D arrays of smaller interacting quantum dots (QDs). These QD arrays form along the sides of each pit rim on the surface of a coherently strained thin film epitaxially deposited on a semiconductor substrate, the surface of which consists of a periodic pattern of inverted prismatic pits with rectangular pit openings. We find that this complex QDM pattern results from the decomposition of the pit rim from a “quantum fortress” with four elongated QDs into four 1D arrays of multiple smaller QDs arranged along each side of the pit rim. Systematic parametric analysis indicates that varying the pit opening dimensions and the pit wall inclination directly impacts the number of QDs in the resulting QDM pattern, while varying the pit depth only affects the dimensions of the QDs in the nanostructure pattern. Therefore, the number, arrangement, and sizes of QDs in the resulting pattern of QDMs on the film surface can be engineered precisely by proper tuning of the pit design parameters. Our simulation results are supported by predictions of morphological stability analysis, which explains the pit rim decomposition into multiple QDs as the outcome of a tip-splitting instability and provides a fundamental characterization of the post-instability nanostructure pattern. Our theoretical findings can play a vital role in designing optimal semiconductor surface patterns toward enabling future nanofabrication technologies.

36 MATERIALS SCIENCE↗

DOE OSTI2026

Multi-modal dynamic radiography using short-pulse laser-generated probe beams

Radiography is an important tool for the interrogation of dynamic experiments in the fields of dynamic properties of materials, and in condensed matter, high explosive, and high-energy-density physics. Multi-modal radiography advances the hypothesis that combining the information delivered by multiple radiographic modalities can lead to more constrained (improved) “reconstruction” of the scene than can be obtained from a single probe. We identify four modalities: multi-probe, time sequence, multi-view, and multi-messenger. Multi-probe radiography is a promising candidate for a next-generation dynamic radiographic facility. High-energy X-rays are the most frequently used probe for dynamic radiography, although recent developments show the utility of proton (pRad), electron (eRad), and neutron probe beams. Because each probing species interacts with material in the radiographic scene through quantitatively different mechanisms, each returns independent information about the scene, which can add extra constraints to the reconstruction process. How to conduct detailed, quantitative “co-analysis” of multiple data streams remains an area of active research. Multi-beam, short-pulse, laser-generated probes offer sufficient dose, an appropriate spectrum, and appropriate spatio-temporal resolution to produce high-quality dynamic radiographs. This paper reports on technology development to advance the state of the art of multi-modal/multi-probe radiography and the pursuit of both deterministic and inferential (AI/ML assisted) co-analysis methodologies to produce more constrained reconstructions from multi-modal data.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

DOE OSTI2020

Development of a directly driven multi-shell platform: Laser drive energetics

Simulations predict that directly driven multi-shell targets can provide a robust alternative to conventional high-convergence implosion concepts by coupling two to three times more energy into the final igniting thermonuclear fuel assembly than indirect-drive concepts. The three-shell directly driven Revolver concept [K. Molvig, M. J. Schmitt, B. J. Albright, E.S. Dodd, N.M. Hoffman, G.H. McCall, and S.D. Ramsey, Phys. Rev. Lett. 116, 255003 (2016)] utilizes a design that maximizes laser energy conversion into inward kinetic energy of the outermost ablator shell (~9%) while minimizing the DT fuel convergence (~9) to reduce the mixing of material from the innermost shell into the fuel. Inherent in this design concept is the use of 192 narrow beams (with a 1/e laser beam-to-capsule diameter ratio of 0.33) from the National Ignition Facility laser pointed in a polar direct drive laser configuration. In this paper, we demonstrate that low average laser intensity at the capsule surface (≤300 TW/cm 2 ) limits the measured laser backscatter, indicating that a greater amount of laser energy is coupled into the target. Omega experiments have been performed to determine the coupling of laser energy to the outermost shell of a scaled Revolver target (i.e., the ablator shell) by measuring capsule implosion trajectories and scattered-light fractions for two different drive configurations. Comparisons of simulated shell trajectory and velocity profiles with experimental data obtained from self-emission images show good agreement and are consistent with measured scattered light data. Furthermore, the low levels of scattered light measured are consistent with post-shot simulation results that show high hydro-coupling efficiency. These results strengthen the case for using narrow beams at low intensity to drive large ablator capsules for future direct-drive, multi-shell ignition concepts.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

DOE OSTI2025

Accelerating Embedding Potential Optimization by Reconstructing the Pseudo-Valence Electron Density

Density functional embedding theory (DFET) enables use of electronic structure methods with higher accuracy than density functional theory in a local region, with applications thus far ranging from (photo/electro)catalysis to reactions in solution. DFET partitions a large collection of atoms into smaller groups that interact via a shared embedding (interaction) potential V emb , determined via functional optimization. The optimized effective potential (OEP) process used to optimize V emb is time-consuming and becomes a computational bottleneck due to sharp, oscillating features of V emb near nuclei. Here, similar to pseudopotential theory, by reconstructing electron densities used in the OEP process from smoother pseudo-valence-only (PVO) electron densities as proxies for total densities of the full system and subsystems, we can retain accuracy in the embedded electronic structure calculations while potentially reducing the overhead of V emb construction, within the projector augmented-wave (PAW) formalism. We explore three different chemical reactions as exemplars to test PVO–DFET, namely, H 2 dissociative adsorption on a Cu(111) surface, H 2 O adsorption on a Pt(111) surface, and aqueous [Ca 2+ –SO 4 2– ] ion-pair formation. The PVO approximation works well for all three systems with minimal loss of accuracy (∼10–70 meV error relative to the original exact-derivative (ED) approach) while accelerating V emb generation for the Cu and Pt systems respectively by 20× and 5×. Given proper numerical convergence parameters, the spatial distributions of differences between PVO- and ED-based V emb outside the core regions are small, explaining the exceptional agreement between the two approaches. Finally, we anticipate that this more efficient PVO–DFET approximation will be useful whenever computation of V emb is much more expensive than subsequent embedded high-level electron correlation calculations.

approximation↗

DOE OSTI2022

X-ray source characterization and sample heating on x-ray diffraction experiments at the National Ignition Facility

X-ray diffraction is a powerful measurement technique for determining material properties, and it is now possible to perform these experiments at pressures exceeding 1 TPa [Rygg et al., Rev. Sci. Instrum. 91, 043902 (2020)] at the National Ignition Facility (NIF). The x-ray source for these experiments is the quasi-monochromatic Heα emission from metal foils heated to multi-keV temperatures. A critical aspect for understanding the sample's thermodynamic state is the amount of heating caused by absorption of the probe x-rays. In this work, we characterize the performance of the Ge foil x-ray source over more than 60 NIF x-ray diffraction experiments. We use this information to constrain the level of diffraction sample heating from the x-ray source and discuss the impact on the thermodynamic state.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

DOE OSTI2025

Experimental platforms for investigating feature-driven jets for HED mix model validation

High-energy-density (HED) systems, such as inertial confinement fusion (ICF), are susceptible to hydrodynamic instabilities that can significantly affect both experimental results and modeling predictions. Isolated features, such as fill tubes or divots in the capsule, can cause material to jet as a result of the compressive shock exciting the Richtmyer–Meshkov instability, and serve as one of the primary degradation mechanisms in ICF yield. Simulations of feature-driven jets and how they mix require extensive experimental validation, particularly for understanding to what degree the initial size and shape of a feature influence jet dynamics, and how much instability feeds through downstream layers. A better understanding of feature-driven jetting can improve our mix modeling capabilities and increase hydrodynamic simulation accuracy. This manuscript describes a series of experimental platforms fielded by Los Alamos National Laboratory as a part of the Mshock Omega 60 and ModCons Omega EP campaigns to explore feature-driven jetting. These platforms are designed to benchmark jet evolution and growth as a function of initial feature size and shape, investigate jet-layer interactions leading to instability feedthrough, and will be used to characterize jet-jet interactions resulting from clusters of features. In conclusion, preliminary results for both platforms are shown. The ModCons experiments are on-going, and a discussion of future work directions is included.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

DOE OSTI2023

Spectroscopic measurement of increases in hydrogen molecular rotational temperature with plasma-facing surface temperature and due to collisional-radiative processes in tokamaks

Abstract Spatially resolved rotational temperature of ground state hydrogen molecules desorbed from plasma-facing surface was measured in QUEST, LTX-β, and DIII-D tokamaks, and the increases of the rotational temperature with the surface temperature and due to collisional-radiative processes in the plasmas were evaluated. The increase due to collisional-radiative processes was calculated by solving rate equations considering electron and proton collisional excitation and deexcitation and spontaneous emission. The calculation results suggest a high sensitivity for the rotational temperature to electron and proton densities, but a negligible sensitivity to the electron, proton, and surface temperatures. In the three tokamaks with different plasma parameters and plasma-facing surface materials, the spatial profile of the rotational temperature was estimated using Fulcher-α emission lines (600–608 nm). In QUEST, the spatial profile of the rotational temperature was estimated from spatially resolved spectra. In the other tokamaks, the rotational temperature was evaluated assuming a single point emission with a location determined from the Fulcher-α emission profile as measured with a filtered camera. In metal-walled devices QUEST and LTX-β, the rotational temperature increased with the surface temperature, and the calculated collisional-radiative increase is consistent with measured increase assuming that the rotational temperature at the surface is approximately 500–600 K higher than the surface temperature. In DIII-D with carbon walls, a larger collisional-radiative increase than the other tokamaks was observed because of the higher density leading to a large difference from the calculated increase compared to the other smaller tokamaks. Measurement of the Fulcher-α emission profile with higher spatial resolution in DIII-D may reduce the difference and reveal the effect of the surface temperature on the rotational temperature. These results show the increases in the rotational temperature with the surface temperature and due to the collisional-radiative processes.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

DOE OSTI2025

Comparison of plasma start-up with high Z and low Z first wall in WEST

The choice of first wall material is of paramount importance for the plasma start-up conditions in ITER and future fusion power plants. In this context, the present work focuses on the correlations between first wall impurity sources and total radiated power during plasma start-up in the tungsten (W) Environment in Steady-state Tokamak (WEST). The objective is to highlight experimental indications for a preferable combination of start-up plasma scenario and first wall materials. Until 2019, WEST featured a full high Z first wall with all limiters exposing only W surfaces to the plasma. To study the impact of a low Z first wall in WEST, boron nitride tiles were installed in the central part of the inner and outer limiters in 2020. Although visible spectroscopy and bolometry measurements show respectively a strong weakening of the WI line intensity on the limiters and a reduction of radiated power after the changeover, a degradation occurs with the accumulation of plasma exposure. In addition, the different plasma facing elements of the main chamber do not influence equally the radiated power during start-up. In both high Z and low Z environments, a clear non-linear dependence is found between the start-up radiated power and the outer limiter W impurity source. Since W seems to be the main cause for core radiation, correlation between outer limiter W sources and other impurity sources are investigated. Finally, analysis of the legacy of B powder drops on a number of start-up plasmas suggests that it is less effective at reducing radiated power when the first wall is covered with W.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

DOE OSTI2025

Perspective on Many-Body Methods for Molecular Polaritonic Systems

Recent advances in strong light–matter interactions have revealed a wealth of new physical phenomena in molecules embedded in optical cavities, including modified chemical reactivity, altered excitation spectra, and novel quantum correlations. To describe these effects from first-principles, the field of ab initio quantum electrodynamics (QED) has emerged as a compelling extension of quantum chemistry that treats electronic and photonic degrees of freedom on equal footing. In this Perspective, we review the growing landscape of many-body QED methods, including Hartree–Fock, density functional theory (QEDFT), time-dependent DFT (QED-TDDFT), configuration interaction (QED-CI), complete active space (QED-CASSCF), coupled cluster (QED-CC), quantum Monte Carlo (QED-QMC), and density matrix renormalization group (QED-DMRG), highlighting recent developments and implementations. We further explore real-time methods, gradient and Hessian formalisms, and the integration of nonadiabatic nuclear dynamics. Applications range from benchmark simulations of polaritonic chemistry to quantum simulations on emerging quantum hardware. We conclude by outlining future directions for theory development and interdisciplinary efforts at the interface of quantum chemistry, condensed matter, and quantum optics.

36 MATERIALS SCIENCE↗

DOE OSTI2026

Roadmap for warm dense matter physics

This roadmap presents the state-of-the-art, current challenges and near future developments anticipated in the thriving field of warm dense matter (WDM) physics. Originating from strongly coupled plasma physics, high pressure physics and high energy density science, the WDM physics community has recently taken a giant leap forward. This is due to spectacular developments in laser technology, diagnostic capabilities, and computer simulation techniques. Only in the last decade has it become possible to perform accurate enough simulations & experiments to truly verify theoretical results as well as to reliably design experiments based on predictions. Consequently, this roadmap discusses recent developments of and contemporary challenges for theoretical methods and experimental techniques needed to describe, create and diagnose WDM. A large part of this roadmap is dedicated to specific WDM systems and applications in astrophysics, inertial confinement fusion and novel material synthesis.

dense astrophysical objects↗