A Common-path, Multi-channel Heterodyne Laser Interferometer for Sub-nanometer Surface Metrology
A multi-channel heterodyne laser interferometer is proposed for measurement of optical surface deformations at the sub-nanometer level.
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A multi-channel heterodyne laser interferometer is proposed for measurement of optical surface deformations at the sub-nanometer level.
A multi-channel heterodyne laser interferometer is proposed for the JPL Thermo-Opto-Mechanical Testbed, which requires the measurement of optical surface deformations at the sub-nanometer level.
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In this paper, we present some of the experimental results from a laboratory demonstration unit and design considerations for SIM's internal metrology beam launcher.