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At least 343 records · Page 19

All sources NASA NTRS DOE OSTI

NASA NTRS1995

The Clementine mechanisms

The Clementine spacecraft was developed under the 'faster, better, cheaper' theme. The constraints of a low budget coupled with an unusually tight schedule forced many departures from the normal spacecraft development methods. This paper discusses technical lessons learned about several of the mechanisms on the Clementine spacecraft as well as managerial lessons learned for the entire mechanisms subsystem. A quick overview of the Clementine mission is included; the mission schedule and environment during the mechanisms releases and deployment are highlighted. This paper then describes the entire mechanisms subsystem. The design and test approach and key philosophies for a fast-track program are discussed during the description of the mechanisms subsystem. The mechanism subsystem included a marman clamp separation system, a separation nut separation system, a solar panel deployment and pointing system, a high gain antenna feed deployment system, and two separate sensor cover systems. Each mechanism is briefly discussed. Additional technical discussion is given on the marman clamp design, the sensor cover designs, and the design and testing practices for systems driven by heated actuators (specifically paraffin actuators and frangibolts). All of the other mechanisms were of conventional designs and will receive less emphasis. Lessons learned are discussed throughout the paper as they applied to the systems being discussed. Since there is information on many different systems, this paper is organized so that information on a particular topic can be quickly referenced.

Purdy, William↗

NASA NTRS1985

Effects of cooling system parameters on heat transfer in PAFC stack

Analytical and experimental study for the effects of cooling system parameters on the heat transfer and temperature distribution in the electrode plates of a phosphoric acid fuel-cell has been conducted. An experimental set-up that simulates the operating conditions prevailing in a phosphoric-acid fuel-cell stack was designed and constructed. The set-up was then used to measure the overall heat transfer coefficient, the thermal contact resistance, and the electrode temperature distribution for two different cooling plate configurations. Two types of cooling plate configurations, serpentine and straight, were tested. Air, water, and oil were used as coolants. Measurements for the heat transfer coefficient and the thermal contact resistance were made for various flow rates ranging from 16 to 88 Kg/hr, and stack clamping pressure ranging from O to 3448 Kpa. The experimental results for the overall heat transfer coefficient were utilized to derive mathematical relations for the overall heat transfer coefficient as a function of stack clamping pressure and Reynolds number for the three coolants. The empirically derived formulas were incorporated in a previously developed computer program to predict electrodes temperature distribution and the performance of the stack cooling system. The results obtained were then compared with those available in the literature. The comparison showed maximum deviation of +/- 11%.

Abdul-Aziz, Ali A.↗

NASA NTRS1996

Development of Torsional and Linear Piezoelectrically Driven Motors

The development of rotary and linear inchworm-motors using piezoelectric actuators is presented. The motors' design has the advantage of a macro and micro stepper motor with high load and speed. The torsional design is capable of fast angular positioning with micro level accuracy. Additionally, the rotary motor, as designed, can be used as a clutch/brake mechanism. Constructed prototype motors of both types along with their characteristics are presented. The torsional motor consists of a torsional section that provides angular displacement and torque, and two alternating clamping sections which provide the holding force. The motor relies on the principal piezoelectric coupling coefficient (d33) with no torsional elements, increasing its torque capability. The linear motor consists of a longitudinal vibrator that provides displacement and load, and two alternating clamping sections which provide the holding force. This design eliminates bending moment, tension and shear applied to the actuator elements, increase its load capability and life. Innovative flexure designs have been introduced for both motor types. Critical issues that affect the design and performance of the motors are explored and discussed. Experiments are performed demonstrating the motor prototypes based on the aforementioned design considerations.

Duong, Khanh↗

NASA NTRS1997

The Impact Response of Carbon/Epoxy Laminates (Center Director's Discretionary Fund, Project No. 94-13)

Low velocity dropweight impact tests were conducted on carbon/epoxy laminates under various boundary conditions. The composite plates were 8-ply (+45,0,-45,90)s laminates supported in a clamped-clamped/free-free configuration with varying amounts of in-plane load, N(sub x), applied. Specimens were impacted at energies of 3.4, 4.5, and 6 Joules (2.5, 3.3, and 4.4 ft-lb). The amount of damage induced into the specimen was evaluated using instrumented impact techniques, x-ray inspection, and cross-sectional photomicroscopy. Some static identation tests were performed to examine if the impact events utilized in this study were of a quasi-static nature and also to gain insight into the shape of the deflected surface at various impact load combinations. Load-displacement curves from these tests were compared to those of the impact tests, as was damage determined from x-ray inspection. The finite element technique was used to model the impact event and determine the stress field within the laminae. Results showed that for a given impact energy level, more damage was induced into the specimen as the external in-plane load, N(sub x), was increased. The majority of damage observed consisted of back face splitting of the matrix parallel to the fibers in that ply, associated with delaminations emanating from these splits. The analysis showed qualitatively the results of impact conditions on maximum load of impact, maximum transverse deflection, and first failure mode and location.

Nettles, A. T.↗

NASA NTRS1999

Open-Mode Debonding Analysis of Curved Sandwich Panels Subjected to Heating and Cryogenic Cooling on Opposite Faces

Increasing use of curved sandwich panels as aerospace structure components makes it vital to fully understand their thermostructural behavior and identify key factors affecting the open-mode debonding failure. Open-mode debonding analysis is performed on a family of curved honeycomb-core sandwich panels with different radii of curvature. The curved sandwich panels are either simply supported or clamped, and are subjected to uniform heating on the convex side and uniform cryogenic cooling on the concave side. The finite-element method was used to study the effects of panel curvature and boundary condition on the open-mode stress (radial tensile stress) and displacement fields in the curved sandwich panels. The critical stress point, where potential debonding failure could initiate, was found to be at the midspan (or outer span) of the inner bonding interface between the sandwich core and face sheet on the concave side, depending on the boundary condition and panel curvature. Open-mode stress increases with increasing panel curvature, reaching a maximum value at certain high curvature, and then decreases slightly as the panel curvature continues to increase and approach that of quarter circle. Changing the boundary condition from simply supported to clamped reduces the magnitudes of open-mode stresses and the associated sandwich core depth stretching.

Ko, William L.↗

NASA NTRS1999

Assembly of a Full-Scale External Tank Barrel Section Using Friction Stir Welding

A full-scale pathfinder barrel section of the External Tank for the National Aeronautics and Space Administration (NASA) Space Transport System (Space Shuttle) has been assembled at Marshall Space Flight Center (MSFC) via a collaborative effort between NASA/MSFC and Lockheed Martin Michoud Space Systems. The barrel section is 27.5 feet in diameter and 15 feet in height. The barrel was assembled using Super-Light-Weight (SLWT), orthogrid, Al-Li 2195 panel sections and a single longeron panel. A vertical weld tool at MSFC was modified to accommodate FSW and used to assemble the barrel. These modifications included the addition of a FSW weld head and new controller hardware and software, the addition of a backing anvil and the replacement of the clamping system with individually actuated clamps. Weld process 4evelopment was initially conducted to optimize the process for the welds required for completing the assembly. The variable thickness welds in the longeron section were conducted via both two-sided welds and with the use of a retractable pin tool. The barrel assembly was completed in October 1998. Details of the vertical weld tool modifications and the assembly process are presented.

Jones, Chip↗

NASA NTRS2002

Computational Analysis of Towed Ballute Interactions

A ballute (balloon-parachute) is an inflatable, aerodynamic drag device for application to planetary entry vehicles. Ballutes may be directly attached to a vehicle, increasing its cross-sectional area upon inflation, or towed behind the vehicle as a semi-independent device that can be quickly cut free when the requisite change in velocity is achieved. The aerothermodynamics of spherical and toroidal towed ballutes are considered in the present study. A limiting case of zero towline length (clamped system) is also considered. A toroidal system can be designed (ignoring influence of the tethers) such that all flow processed by the bow shock of the towing spacecraft passes through the hole in the toroid. For a spherical ballute, towline length is a critical parameter that affects aeroheating on the ballute being towed through the spacecraft wake. In both cases, complex and often unsteady interactions ensue in which the spacecraft and its wake resemble an aero spike situated in front of the ballute. The strength of the interactions depends upon system geometry and Reynolds number. We show how interactions may envelope the base of the towing spacecraft or impinge on the ballute surface with adverse consequences to its thermal protection system. Geometric constraints to minimize or eliminate such adverse interactions are discussed. The towed, toroidal system and the clamped, spherical system show greatest potential for a baseline design approach.

Gnoffo, Peter A.↗

NASA NTRS2000

Hybrid Active/Passive Control of Sound Radiation from Panels with Constrained Layer Damping and Model Predictive Feedback Control

There has been considerable interest over the past several years in applying feedback control methods to problems of structural acoustics. One problem of particular interest is the control of sound radiation from aircraft panels excited on one side by a turbulent boundary layer (TBL). TBL excitation appears as many uncorrelated sources acting on the panel, which makes it difficult to find a single reference signal that is coherent with the excitation. Feedback methods have no need for a reference signal, and are thus suited to this problem. Some important considerations for the structural acoustics problem include the fact that the required controller bandwidth can easily extend to several hundred Hertz, so a digital controller would have to operate at a few kilohertz. In addition, aircraft panel structures have a reasonably high modal density over this frequency range. A model based controller must therefore handle the modally dense system, or have some way to reduce the bandwidth of the problem. Further complicating the problem is the fact that the stiffness and dynamic properties of an aircraft panel can vary considerably during flight due to altitude changes resulting in significant resonant frequency shifts. These considerations make the tradeoff between robustness to changes in the system being controlled and controller performance especially important. Recent papers concerning the design and implementation of robust controllers for structural acoustic problems highlight the need to consider both performance and robustness when designing the controller. While robust control methods such as H1 can be used to balance performance and robustness, their implementation is not easy and requires assumptions about the types of uncertainties in the plant being controlled. Achieving a useful controller design may require many tradeoff studies of different types of parametric uncertainties in the system. Another approach to achieving robustness to plant changes is to make the controller adaptive. For example, a mathematical model of the plant could be periodically updated as the plant changes, and the feedback gains recomputed from the updated model. To be practical, this approach requires a simple plant model that can be updated quickly with reasonable computational requirements. A recent paper by the authors discussed one way to simplify a feedback controller, by reducing the number of actuators and sensors needed for good performance. The work was done on a tensioned aircraft-style panel excited on one side by TBL flow in a low speed wind tunnel. Actuation was provided by a piezoelectric (PZT) actuator mounted on the center of the panel. For sensing, the responses of four accelerometers, positioned to approximate the response of the first radiation mode of the panel, were summed and fed back through the controller. This single input-single output topology was found to have nearly the same noise reduction performance as a controller with fifteen accelerometers and three PZT patches. This paper extends the previous results by looking at how constrained layer damping (CLD) on a panel can be used to enhance the performance of the feedback controller thus providing a more robust and efficient hybrid active/passive system. The eventual goal is to use the CLD to reduce sound radiation at high frequencies, then implement a very simple, reduced order, low sample rate adaptive controller to attenuate sound radiation at low frequencies. Additionally this added damping smoothes phase transitions over the bandwidth which promotes robustness to natural frequency shifts. Experiments were conducted in a transmission loss facility on a clamped-clamped aluminum panel driven on one side by a loudspeaker. A generalized predictive control (GPC) algorithm, which is suited to online adaptation of its parameters, was used in single input-single output and multiple input-single output configurations. Because this was a preliminary look at the potential constrained layer damping for adaptive control, static feedback control with no online adaptation was used. Two configurations of CLD in addition to a bare panel configuration were studied. For each CLD configuration, two sensor arrangements for the feedback controller were compared. The first arrangement used fifteen accelerometers on the panel to estimate the responses of the first six radiation modes of the panel. The second sensor arrangement was simpler, using the summed responses of only four accelerometers to approximate the response of the first radiation mode of the panel. In all cases a PZT patch was mounted at the center of the panel for control input. The performance of the controller was quantified using the responses of the fifteen accelerometers on the panel to estimate radiated sound power. The paper begins with a brief discussion of the GPC algorithm and the experimental setup. The experimental results are discussed next, comparing the CLD and sensor configurations, followed by discussion and conclusions.

Cabell, Randolph H.↗

NASA NTRS2000

Comparison of Nonlinear Random Response Using Equivalent Linearization and Numerical Simulation

A recently developed finite-element-based equivalent linearization approach for the analysis of random vibrations of geometrically nonlinear multiple degree-of-freedom structures is validated. The validation is based on comparisons with results from a finite element based numerical simulation analysis using a numerical integration technique in physical coordinates. In particular, results for the case of a clamped-clamped beam are considered for an extensive load range to establish the limits of validity of the equivalent linearization approach.

Rizzi, Stephen A.↗

NASA NTRS2002

Three-Dimensional Postbuckling Analysis of Curved Beams

Presented here is a method of solving highly flexible curved beam undergoing huge static or quasi-static deformations. A geometrically exact beam theory based on the use of Jaumann stresses and strains and exact coordinate transformation is presented in terms of 17 first-order ordinary differential equations, and a multiple shooting method is used to solve the corresponding nonlinear two-point boundary value problems. The geometrically exact beam theory accounts far large rotations, large displacements, initial curvatures, extensionality, and transverse shear strains. Four examples are used to demonstrate this method, including a rotating clamped-free beam under the influence of gravity and centrifugal forces, an L-frame subjected to an in-plane tip load, a circular arch subjected to a concentrated load, and a clamped-hinged helical spring subjected to an axial displacement. Results show that the combination of the multiple shooting method and the geometrically exact beam theory works very well. Moreover, the obtained numerically exact solutions can be used to verify the accuracy of nonlinear finite element codes for nonlinear analysis of complex structures.

Pai, P. Frank↗

NASA NTRS1995

Design and Process Considerations for a Tunneling Tip Accelerometer

In this paper, we discuss issues related to the fabrication of a bulk micromachined single axis accelerometer. The accelerometer is designed to have a full scale range of ten millig and a sensitivity of tens of nanog. During the process, three distinctly different die are fabricated. These are subsequently assembled using an ally bonding technique. During the bonding operation, electrical contacts are made between layers. The accelerometer is controlled by electrostatic force plates above and below the proof mass. The lower electrode has a dual role. In operation, it provides a necessary control electrode. When not in operation, it is used to clamp the proof mass and prevents its motion. Results of the fabrication process and initial testing of the clamping function are reported.

tunneling tip accelerometer, accelerometer fabrica↗

NASA NTRS1995

Progress Toward a Bulk Micromachined Tunneling Tip Microaccelerometer

Ultrasensitive accelerometers are needed for microgravity measurement of orbital drag and active isolation systems. We have designed an accelerometer capable of measuring accelerations of the order of 10(i) g. A tunneling tip sensor can be used as a position sensor with a potential performance advantage of two orders of magnitude over capacitive sensors. In this paper, we disclose our progress in the fabrication and measurement of a bulk microaccelerometer which employs a tunneling tip. Fully assembled accelerometers consisting of four separate die have been fabricated. The device employs a unique folded spring system with a low spring constant. To protect the tunneling tip, we have employed electrostatic clamping. Stiction has not been observed, but the required clamping voltage is greater than expected. We have developed a simple model to analyze our results.

micromachining, microaccelerometer↗

NASA NTRS2006

Studies of acoustic-electric feed-throughs for power transmission through structures

There are numerous engineering design problems where the use of wires to transfer power and communicate data thru the walls of a structure is prohibitive or significantly difficult that it may require a complex design. Using physical feedthroughs in such systems may make them susceptible to leakage of chemicals or gasses, loss of pressure or vacuum, as well as difficulties in providing adequate thermal or electrical insulation. Moreover, feeding wires thru a wall of a structure reduces the strength of the structure and makes the structure prone to cracking due to fatigue that can result from cyclic loading and stress concentrations. One area that has already been identified to require a wireless alternative to electrical feedthroughs is the container of the Mars Sample Return Mission, which will need wireless sensors to sense a pressure leak and to avoid potential contamination. The idea of using elastic or acoustic waves to transfer power was suggested recently by [Y. Hu, et al., July 2003]. This system allows for the avoidance of cabling or wiring. The technology is applicable to the transfer of power for actuation, sensing and other tasks inside any sealed container or vacuum/pressure vessel. An alternative approach to the modeling presented previously [Sherrit et a., 2005] used network analysis to solve the same problem in a clear and expandable manner. Experimental tests on three different designs of these devices were performed. The three designs used different methods of coupling the piezoelectric element to the wall. In the first test the piezoelectric material was bolted using a backing structure. In the second test the piezoelectric was clamped after the application of grease and finally the piezoelectric element was attached using a conductive epoxy. The mechanical clamp with grease produced the highest measured efficiency of 53% however this design was the least practical from a fabrication viewpoint. The power transfer efficiency of conductive epoxy joint was 40% and the stress bolts (12%).

ultrasonics↗

NASA NTRS2001

Pressure vessel bottle mount

A mounting assembly for mounting a composite pressure vessel to a vehicle includes a saddle having a curved surface extending between two pillars for receiving the vessel. The saddle also has flanged portions which can be bolted to the vehicle. Each of the pillars has hole in which is mounted the shaft portion of an attachment member. A resilient member is disposed between each of the shaft portions and the holes and loaded by a tightening nut. External to the holes, each of the attachment members has a head portion to which a steel band is attached. The steel band circumscribes the vessel and translates the load on the springs into a clamping force on the vessel. As the vessel expands and contracts, the resilient members expand and contract so that the clamping force applied by the band to the vessel remains constant.

Wingett, Paul↗

NASA NTRS2007

Bounds on Flexural Properties and Buckling Response for Symmetrically Laminated Plates

Nondimensional parameters and equations governing the buckling behavior of rectangular symmetrically laminated plates are presented that can be used to represent the buckling resistance, for plates made of all known structural materials, in a very general, insightful, and encompassing manner. In addition, these parameters can be used to assess the degree of plate orthotropy, to assess the importance of anisotropy that couples bending and twisting deformations, and to characterize quasi-isotropic laminates quantitatively. Bounds for these nondimensional parameters are also presented that are based on thermodynamics and practical laminate construction considerations. These bounds provides insight into potential gains in buckling resistance through laminate tailoring and composite-material development. As an illustration of this point, upper bounds on the buckling resistance of long rectangular orthotropic plates with simply supported or clamped edges and subjected to uniform axial compression, uniform shear, or pure inplane bending loads are presented. The results indicate that the maximum gain in buckling resistance for tailored orthotropic laminates, with respect to the corresponding isotropic plate, is in the range of 26-36% for plates with simply supported edges, irrespective of the loading conditions. For the plates with clamped edges, the corresponding gains in buckling resistance are in the range of 9-12% for plates subjected to compression or pure inplane bending loads and potentially up to 30% for plates subjected to shear loads.

Weaver, Paul M.↗

NASA NTRS2011

Helium-Cooled Black Shroud for Subscale Cryogenic Testing

This shroud provides a deep-space simulating environment for testing scaled-down models of passively cooling systems for spaceflight optics and instruments. It is used inside a liquid-nitrogen- cooled vacuum chamber, and it is cooled by liquid helium to 5 K. It has an inside geometry of approximately 1.6 m diameter by 0.45 m tall. The inside surfaces of its top and sidewalls have a thermal absorptivity greater than 0.96. The bottom wall has a large central opening that is easily customized to allow a specific test item to extend through it. This enables testing of scale models of realistic passive cooling configurations that feature a very large temperature drop between the deepspace-facing cooled side and the Sun/Earth-facing warm side. This shroud has an innovative thermal closeout of the bottom wall, so that a test sample can have a hot (room temperature) side outside of the shroud, and a cold side inside the shroud. The combination of this closeout and the very black walls keeps radiated heat from the sample s warm end from entering the shroud, reflecting off the walls and heating the sample s cold end. The shroud includes 12 vertical rectangular sheet-copper side panels that are oriented in a circular pattern. Using tabs bent off from their edges, these side panels are bolted to each other and to a steel support ring on which they rest. The removable shroud top is a large copper sheet that rests on, and is bolted to, the support ring when the shroud is closed. The support ring stands on four fiberglass tube legs, which isolate it thermally from the vacuum chamber bottom. The insides of the cooper top and side panels are completely covered with 25- mm-thick aluminum honeycomb panels. This honeycomb is painted black before it is epoxied to the copper surfaces. A spiral-shaped copper tube, clamped at many different locations to the outside of the top copper plate, serves as part of the liquid helium cooling loop. Another copper tube, plumbed in a series to the top plate s tube, is clamped to the sidewall tabs where they are bolted to the support ring. Flowing liquid helium through these tubes cools the entire shroud to 5 K. The entire shroud is wrapped loosely in a layer of double-aluminized Kapton. The support ring s inner diameter is the largest possible hole through which the test item can extend into the shroud. Twelve custom-sized trapezoidal copper sheets extend inward from the support ring to within a few millimeters of the test item. Attached to the inner edge of each of these sheets is a custom-shaped strip of Kapton, which is aluminum- coated on the warm-facing (outer) side, and has thin Dacron netting attached to its cold-facing side. This Kapton rests against the test item, but the Dacron keeps it from making significant thermal contact. The result is a non-contact, radiatively reflective thermal closeout with essentially no gap through which radiation can pass. In this way, the part of the test item outside the shroud can be heated to relatively high temperatures without any radiative heat leaking to the inside.

Tuttle, James↗

NASA NTRS2006

Carbon-Nanotube-Carpet Heat-Transfer Pads

Microscopic thermal-contact pads that include carpet-like arrays of carbon nanotubes have been invented for dissipating heat generated in integrated circuits and similarly sized single electronic components. The need for these or other innovative thermal-contact pads arises because the requisite high thermal conductances cannot be realized by scaling conventional macroscopic thermal-contact pads down to microscopic sizes. Overcoming limitations of conventional thermal-contact materials and components, the carbon-nanotube thermal-contact pads offer the high thermal conductivities needed to accommodate the high local thermal power densities of modern electronic circuits, without need for large clamping pressures, extreme smoothness of surfaces in contact, or gap-filling materials (e.g., thermally conductive greases) to ensure adequate thermal contact. Moreover, unlike some conventional thermal-contact components, these pads are reusable. The figure depicts a typical pad according to the invention, in contact with a rough surface on an electronic component that is to be cooled. Through reversible bending and buckling of carbon nanotubes at asperities on the rough surface, the pad yields sufficiently, under relatively low contact pressure, that thermal contact is distributed to many locations on the surface to be cooled, including valleys where contact would not ordinarily occur in conventional clamping of rigid surfaces. Hence, the effective thermal-contact area is greater than that achievable through scaling down of a macroscopic thermal-contact pad. The extremely high longitudinal thermal conductivities of the carbon nanotubes are utilized to conduct heat away from potential hot spots on the surface to be cooled. The fibers protrude from a layer of a filler material (Cu, Ag, Au, or metal-particle- filled gels), which provides both mechanical support to maintain the carbon nanotubes in alignment and thermal conductivity to enhance the diffusion of concentrated heat from the nanotubes into the larger adjacent volume of a heat sink. The array of carbon nanotubes, the filler material, and the heat sink are parts of a unitary composite structure that is fabricated as follows: 1. Using techniques that have been reported previously, the array of substantially perpendicularly oriented carbon nanotubes is grown on a metal, silicon, or other suitable thermally conductive substrate that is intended to become the heat sink. 2. By means of chemical vapor deposition, physical vapor deposition, plasma deposition, ion sputtering, electrochemical deposition, or casting from a liquid phase, some or all of the interstitial volume between carbon nanotubes is filled with the aforementioned layer of mechanically supporting, thermally conductive material. 3. To cause the carbon nanotubes to protrude the desired length from the filler material, an outer layer of filler is removed by mechanical polishing, chemical mechanical polishing, wet chemical etching, electrochemical etching, or dry plasma etching.

Li, Jun↗

NASA NTRS2003

Miniature Inchworm Actuators Fabricated by Use of LIGA

Miniature inchworm actuators that would have relatively simple designs have been proposed for applications in which there are requirements for displacements of the order of microns or tens of microns and for the ability to hold their positions when electric power is not applied. The proposed actuators would be members of the class of microelectromechanical systems (MEMS), but would be designed and fabricated following an approach that is somewhat unusual for MEMS. Like other MEMS actuators, the proposed inchworm actuators could utilize thermoplastic, bimetallic, shape-memory-alloy, or piezoelectric actuation principles. The figure depicts a piezoelectric inchworm actuator according to the proposal. As in other inchworm actuators, linear motion of an extensible member would be achieved by lengthening and shortening the extensible member in synchronism with alternately clamping and releasing one and then the other end of the member. In this case, the moving member would be the middle one; the member would be piezoelectric and would be shortened by applying a voltage to it. The two outer members would also be piezoelectric; the release of the clamps on the upper or lower end would be achieved by applying a voltage to the electrodes on the upper or lower ends, respectively, of these members. Usually, MEMS actuators cannot be fabricated directly on the side walls of silicon wafers, yet the geometry of this actuator necessitates such fabrication. The solution, according to the proposal, would be to use the microfabrication technique known by the German acronym LIGA - "lithographie, galvanoformung, abformung," which means lithography, electroforming, molding. LIGA involves x-ray lithography of a polymer film followed by selective removal of material to form a three-dimensional pattern from which a mold is made. Among the advantages of LIGA for this purpose are that it is applicable to a broad range of materials, can be used to implement a variety of designs, including those of structures >1 mm high, affords submicron precision, and is amenable to mass production at relatively low unit cost. Fabrication of the proposed actuators would involve some technological risks - in particular, in the integration of electrode connection lines and placement of actuator elements. It will also be necessary to perform an intensive study of the feasibility of growing piezoelectric crystals onto LIGA molds.

Yang, Eui-Hyeok↗