Progress Toward a Bulk Micromachined Tunneling Tip Microaccelerometer

Abstract

Ultrasensitive accelerometers are needed for microgravity measurement of orbital drag and active isolation systems. We have designed an accelerometer capable of measuring accelerations of the order of 10(i) g. A tunneling tip sensor can be used as a position sensor with a potential performance advantage of two orders of magnitude over capacitive sensors. In this paper, we disclose our progress in the fabrication and measurement of a bulk microaccelerometer which employs a tunneling tip. Fully assembled accelerometers consisting of four separate die have been fabricated. The device employs a unique folded spring system with a low spring constant. To protect the tunneling tip, we have employed electrostatic clamping. Stiction has not been observed, but the required clamping voltage is greater than expected. We have developed a simple model to analyze our results.