Development of ion implantation techniques for microelectronics
Ion implantation forming of conducting layers and p-n junctions in gallium arsenide and silicon carbide
Dunlap, H.↗
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Study of conduction of metallic layers implanted in amorphous layers
Electrical properties of metallic layers implanted in amorphous oxide glass
Donovan, R. P.↗
Implantable biotelemetry systems
Design criteria for implantable biotelemetry systems, discussing RF signal transmission through conductive body tissue
Fryer, T. B.↗
Ion implantation damage effects in silicon
Ion implantation lattice damage effects in crystalline silicon with allowance for optical reflectivity, considering annealing temperature and amorphous layer formation
Eberle, D. E.↗
Cardiovascular telemetry implants
Cardiovascular telemetry total implants, describing measurement problems, equipment design, low current operation, size and thermal and temporal stability
Rader, R. D.↗
Implanted telemeter for electrocardiogram and body temperature
Measuring system requiring one blocking oscillator to generate modulated pulse repetition rate is implantable in the bodies of small animals. Device has life of two years and transmission range of about three feet. EKG sensing unit also is used to sense electromyogram or electrooculogram of laboratory animals.
Barrows, W. F.↗
Implantable drug therapy device: A concept
Design is described of small, rechargeable, implantable infusor which contains fluid medicament stored under pressure and which dispenses fluid continuously through catheter. Body of infusor is covered by pliable silicone rubber sheath attached to suture pad for securing device.
Feldstein, C.↗
Applicability of implantable telemetry systems in cardiovascular research.
This paper briefly describes the results of an experimental program undertaken to develop and apply implanted telemetry to cardiovascular research. Because of the role the kidney may play in essential hypertension, emphasis is placed on telemetry's applicability in the study of renal physiology. Consequently, the relationship between pressure, flow, and hydraulic impedance are stressed. Results of an exercise study are given.
Krutz, R. W.↗
Mg and Be ion implanted GaAs.
Description of methods for generating desired Be and Mg ions and producing the electrical properties of p-type layers by implanting these ions in GaAs substrates. It is shown that the p-type layers thus produced have large hole concentrations and mobilities.
Hunsperger, R. G.↗
A study of the electrical properties of p-n junctions formed by ion-implantation into gallium arsenide
In the process of ion implantation, ion beams bombard the surface and create undesirable surface effects. The surface effects were investigated, and surface leakage currents were shown to be reduced by surface treatment. I-V characteristics and C-V measurements were obtained for the Zn-GaAs and Zn-(In,Ga)As junction is considered as a p-i-n heterojunction, without generation-recombination current. The Zn-GaAs junction is considered as a p-n homojunction with appreciable generation-recombination currents.
Lin, A. H.↗
Effects of positive ion implantation into antireflection coating of silicon solar cells
The state of technological development of Si solar cells for highest obtained efficiency and radiation resistance is summarized. The various theoretical analyses of Si solar cells are reviewed. It is shown that factors controlling blue response are carrier diffusion length, surface recombination, impurity concentration profile in surface region, high level of surface impurity concentration (degeneracy), reflection coefficient of oxide, and absorption coefficient of Si. The theory of ion implantation of charge into the oxide antireflection coating is developed and side effects are discussed. The experimental investigations were directed at determining whether the blue response of Si solar cells could be improved by phosphorus ion charges introduced into the oxide antireflection coating.
Middleton, A. E.↗
Single and multichannel implanted telemetry systems.
Description of improved single-channel and multichannel telemetry systems designed for measurements of single and multiple physiological parameters, respectively, with adequate accuracy. The systems include a single-channel biopotential transmitter, a temperature transmitter, a pressure transmitter, and a multichannel transmitter for implant telemetric applications.
Sandler, H.↗
Photoluminescence of Zn-implanted GaN
The photoluminescence spectrum of Zn-implanted GaN peaks at 2.87 eV at room temperature. The emission efficiency decreases linearly with the logarithm of the Zn concentration in the range from 1 x 10 to the 18th to 20 x 10 to the 18th Zn/cu cm.
Pankove, J. I.↗
The effect of Be/+/ ion implanted exponential and uniform impurity profiles on the electrical characteristics of GaAs solar cells
The high surface recombination velocity is the major deterrent to obtaining efficient GaAs solar cells. If, however, an electric field is built in at the surface, the carriers will be swept away from the surface thus minimizing the surface recombination velocity problem. It has been previously shown theoretically that an exponential impurity distribution in the doped region of the cell results in a built-in electric field. Ion implantation was used to produce solar cells with an exponential impurity profile and cells with uniform profiles. It is shown that cells with an exponential impurity profile have higher open-circuit voltage, fill factors, and spectral response than those with a uniform impurity profile.
Vaidyanathan, K. V.↗
Ion implantation effects in 'cosmic' dust grains
Cosmic dust grains, whatever their origin may be, have probably suffered a complex sequence of events including exposure to high doses of low-energy nuclear particles and cycles of turbulent motions. High-voltage electron microscope observations of micron-sized grains either naturally exposed to space environmental parameters on the lunar surface or artificially subjected to space simulated conditions strongly suggest that such events could drastically modify the mineralogical composition of the grains and considerably ease their aggregation during collisions at low speeds. Furthermore, combined mass spectrometer and ionic analyzer studies show that small carbon compounds can be both synthesized during the implantation of a mixture of low-energy D, C, N ions in various solids and released in space by ion sputtering.
Bibring, J. P.↗
A mass spectrometric system for analyzing thermal desorption spectra of ion-implanted argon and cesium in tungsten
A mass spectrometric system for determining the characteristics of materials used in instrumental development and aerospace applications was developed. The desorption spectra of cesium that was ion-implanted into polycrystalline tungsten and the effects on the spectra of bombardment of the tungsten by low energy (70 eV) electrons were investigated. Work function changes were measured by the retarding potential diode method. Flash desorption characteristics were observed and gas-reaction mechanisms of the surface of heated metal filaments were studied. Desorption spectra were measured by linearly increasing the sample temperature at a selected rate, the temperature cycling being generated from a ramp-driven dc power supply, with the mass spectrometer tuned to a mass number of interest. Results of the study indicate an anomolous desorption mechanism following an electron bombardment of the sample surface. The enhanced spectra are a function of the post-bombardment time and energy and are suggestive of an increased concentration of cesium atoms, up to 10 or more angstroms below the surface.
Wood, G. M., Jr.↗
Dosimeter design, construction, and implantation
To detect the passage of cosmic ray particles through the heads of the pocket mice during the Apollo XVII flight, a 'monitor' (dosimeter) composed of plastics was prepared and implanted under the scalp. The monitor was mounted on a platform, the undersurface of which fitted the contour of the skull. Numerous tests were run to assure that the presence of the monitor assembly beneath the scalp would be compatible with the well-being of the mice and that the capacity of the monitor to detect the traversal of cosmic ray particles would be preserved over the several weeks during which it would remain under the scalp.
Winter, D. L.↗
Ion implanted photodiode detectors in epitaxial /Ga/x/In/1-x//As
Ion implanted p-n junction photodiodes in epitaxially grown (Ga(x)In(1-x))As material are reported on here. Photoresponse in these diodes was investigated for approximately the entire composition range of x between zero and one. High values for quantum efficiency were obtained for the devices with a high value of x.
Ajmera, P. K.↗