DOE OSTI · 2541712
Photolithography system including selective light array
Abstract
A system, device, and method for imparting or transferring a geometric pattern on the surface of a substrate. The device comprises, a housing forming at least a partially enclosed space, a light source body comprising an array of light emitters, a base disposed below the light source body and configured for supporting the substrate having a photoresist layer thereon, and a controller for activating a predetermined number of individual light emitters corresponding to the predetermined geometric pattern. Each individual light emitter within the array of light emitters is selectively activatable to emit a light. The array of light emitters comprises a plurality of light-emitting diodes, a plurality of quantum dots, or both.
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Young, Barbara Diane, Sedlock, Steven James, Lane, Jr., Gregory Layton, Ledden, Kevin Christopher. 2024-01-23. Photolithography system including selective light array. https://www.osti.gov/biblio/2541712
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