Improving Microstructural Quantification in 3D FIB-SEM Tomography

Abstract

A detailed understanding of 3D microstructural features is crucial during postprocessing of the acquired data, while determining microstructural properties. Focused ion beam and scanning electron microscopy (fib-sem) is an ideal technique for the acquisition and quantification of 3D microstructures in subsurface features. In this work, we evaluated and implemented approaches to quantify 3D morphological features of plutonium oxalate and oxide particles. Image analysis, as well as statistical analysis were utilized to study the effect of process variables on the pore morphology of plutonium oxalate and oxide particles. The primary results were the creation of morphological maps of particles and identify indicators that correlated parameters allowing for discrimination between direct and reverse strike processes. This enabled us to properly quantify and map particles with their images obtained via sem. For this project, the highest correlation was found to be between Volume and Sphericity (R 2 = 0.7432) for the Revere Strike process, and Volume % and Sphericity (R 2 = 0.7450) for the Direct Strike process.