@misc{indiciae785c9bc76bcf,
  title = {Progress Toward a Bulk Micromachined Tunneling Tip Microaccelerometer},
  author = {Frank T. Hartley, Ben Dolgen, Paul M. Zavracky},
  year = {1995},
  url = {https://ntrs.nasa.gov/citations/20060041969},
  note = {Source identifier: 20060041969}
}