NASA NTRS · 20000057565
High Frequency Interconnects on Silicon Substrates
Abstract
The measured propagation constant of coplanar waveguide (CPW) on silicon wafers as a function of the line dimensions and the resistivity of the Si wafer; CPW on GaAs wafers as a function of the line dimensions, and thin film microstrip (TFMS) polyimide fabricated with polyimide on the surface of a silicon wafer is presented. It is shown that the attenuation of CPW on 2500 Omega-cm Si wafers and-of TFMS with a polyimide thickness of 4 micrometer or greater is comparable to the attenuation of similar lines on GaAs.
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Ponchak, George E., Downey, Alan N., Katehi, Linda P. B.. 1997-01-01. High Frequency Interconnects on Silicon Substrates. https://ntrs.nasa.gov/citations/20000057565
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