Testing Conductive Films For Continuity

Abstract

Apparatus tests thin conductive films for continuity without touching them. Specimen irradiated with 10-keV electrons; then noncontacting electrostatic probe scans specimen and measures charge on spot directly under it. Avoids damage to film and error from contact resistance resulting from touching film with conventional probe. Developed to determine integrity of conductive coats applied to surfaces of dielectric materials to inhibit accumulation of electrostatic charges.