NASA NTRS · 19880000514
Tunable Microwave Cavity For Ion Source
Abstract
Movable probe and tuning wall adjusted to obtain resonance at microwave frequency used to generate plasma in cell at one end of microwave cavity. Electroless discharge without disadvantages of dc-cathode-discharge and RF-induction methods. To achieve precise positioning, coaxial probe extends into microwave cavity through tube.
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Nakanishi, Shigeo, Calco, Frank S., Scarpelli, August R.. 1988-11-01. Tunable Microwave Cavity For Ion Source. https://ntrs.nasa.gov/citations/19880000514
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