NASA NTRS · 19870007011
Polycrystalline silicon research and development
Abstract
The development of fluidized-bed reactor technology for producing silicon by the pyrolysis of silanes is described.
Keep this discovery
Explore connections, maps & timelines
Iya, S.. 1986-01-01. Polycrystalline silicon research and development. https://ntrs.nasa.gov/citations/19870007011
Cite the original work for its findings. Save a collection to share your selection of sources.