Polycrystalline silicon research and development
The development of fluidized-bed reactor technology for producing silicon by the pyrolysis of silanes is described.
Iya, S.↗
Engineering topics
Iya, S.
Publications and source records attributed to Iya, S..
A fluidized-bed reactor for silane pyrolysis
The silane decomposition in a fluidized bed reactor was studied. The process feasibility and operating windows were determined. Long duration tests were conducted and silicon purity was demonstrated. A high purity linear was installed in the fluid bed reactor; the FBR product was melted and single crystallized. Product purity improvements are noted.
Iya, S.↗