NASA NTRS · 19830025052
Process Research On Polycrystalline Silicon Material (PROPSM)
Abstract
The mechanisms limiting performance in polycrystalline silicon was determined. The initial set of experiments in this task entails the fabrication of cells of various thicknesses for four different bulk resistivities between 0.1 and 10 omega-cm. The results for the first two lots are presented.
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Wohlgemuth, J. H., Culik, J. S.. 1982-01-01. Process Research On Polycrystalline Silicon Material (PROPSM). https://ntrs.nasa.gov/citations/19830025052
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