NASA NTRS · 19820000168
Liner for Silicon Reactor
Abstract
Coating of sodium tetrafluoride minimizes contaminating high-purity silicon during removal from reactor chamber. Using an NaF liner, reaction products are removed by simply turning reactor chamber updside down. Liner acts as seeding agent for NaF formed during reaction and insulates nickel walls from hot reaction products.
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Sanjurjo, A.. 1983-03-01. Liner for Silicon Reactor. https://ntrs.nasa.gov/citations/19820000168
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