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NASA NTRS · 19790021427

Semiconductor Grade, Solar Silicon Purification Project

Abstract

A low cost by-product, SiF4, is reacted with mg silicon to form SiF2 gas which is polymerized. The (SiF2)x polymer is heated forming volatile SixFy homologues which disproportionate on a silicon particle bed forming silicon and SiF4. The silicon analysis procedure relied heavily on mass spectroscopic and emission spectroscopic analysis. These analyses demonstrated that major purification had occured and some samples were indistinguishable from semiconductor grade silicon (except possibly for phosphorus). However, electrical analysis via crystal growth reveal that the product contains compensated phosphorus and boron.

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BibTeXRIS

Ingle, W. M., Rosler, R. S., Thompson, S. W., Chaney, R. E.. 1979-01-01. Semiconductor Grade, Solar Silicon Purification Project. https://ntrs.nasa.gov/citations/19790021427

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