NASA NTRS · 19780016688
Semiconductor grade, solar silicon purification project
Abstract
The conversion of metallurgical grade silicon into semiconductor grade silicon by way of a three step SiF2 polymer transport purification process was investigated. Developments in the following areas were also examined: (1) spectroscopic analysis and characterization of (SiF2) sub x polymer and Si sub x F sub y homologue conversion; (2) demonstration runs on the near continuous apparatus; (3) economic analysis; and (4) elemental analysis.
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Ingle, W. M., Thompson, S., Rosler, D., Jackson, J.. 1977-12-21. Semiconductor grade, solar silicon purification project. https://ntrs.nasa.gov/citations/19780016688
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