NASA NTRS · 19750004089
System for depositing thin films
Abstract
A system for depositing a thin film of one material on another is described. A mass filter is interposed between the source of material being deposited and the object upon which deposition is being made.
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Tashbar, P. W.. 1974-11-12. System for depositing thin films. https://ntrs.nasa.gov/citations/19750004089
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