System for depositing thin films
A system for depositing a thin film of one material on another is described. A mass filter is interposed between the source of material being deposited and the object upon which deposition is being made.
Engineering topics
Publications and source records attributed to Tashbar, P. W..
A system for depositing a thin film of one material on another is described. A mass filter is interposed between the source of material being deposited and the object upon which deposition is being made.
A commercial quadrupole mass spectrometer (residual gas analyzer, RGA) system has been modified to operate at large separations of its electronics console and sensing head. The methods implemented have made practical applications, as well as operation, of such a system possible for the first time. This advance was stimulated by a need for placing sensors at remote (45 or 60 m) chamber locations for space simulation testing of orbital flight spacecraft. Emphasis is placed on instrument functional requirements and describing the hardware changes and adjustment techniques necessary to assure operation at the extended cable lengths.
With the increasing applications of mass spectrometry technology to diverse services areas, a need has developed for a consolidated survey of the essential characteristics and features of the various instruments and techniques. This report is one approach to satisfying this need. Information has been collected and consolidated into a format which includes for each approach: (1) a general technique description, (2) instrument features information, and (3) a summary of pertinent advantages and disadvantages. With this information, the potential mass spectrometer user should be able to more efficiently select the most appropriate instrument.
A commercial quadrupole residual gas analyzer system has been upgraded for operation at extended cable lengths. Operation inside a vacuum chamber for the standard quadrupole nude head is limited to approximately 2 m from its externally located rf/dc generator because of the detuning of the rf oscillator circuits by the coaxial cable reactance. The advance of long distance remote operation inside a vacuum chamber for distances of 45 and 60 m was made possible without altering the quadrupole's rf/dc generator circuit by employing an rf link to drive the quadrupole rods. Applications of the system have been accomplished for in situ space simulation thermal/vacuum testing of sophisticated payloads.
The areas of orbital and ground contamination of flight experiment hardware have been well established. This report relates directly to results of vacuum chamber testing for the ground evaluation of flight experiment hardware performance. First, the data obtained during the V-3 contamination testing in the Johnson Space Center's Chamber A space simulation test facility are presented. Second, during the V-3 contamination tests, the MSFC Space Sciences Laboratory's quartz crystal microbalance exhibited two periods of anomalous readings. Therefore, a subsequent small chamber tests was conducted in a controlled cryogenic/vacuum environment. The objective was to reproduce with known parameters the anomalous behavior patterns of the V-3 test data. Analyses of the anomalous readings are made on the basis of these tests. Additionally, as a by-product of the small chamber tests, calibration curves then existing for the quartz crystal microbalance were empirically extended, and certain data-formatting aids were documented.
The V-3 contamination test was designed to measure the degree to which the vacuum facility might be a source of contamination. One test measurement subsystem consisting of a quadrupole residual gas analyzer, a quartz crystal microbalance, and an ion gage is described.
Contaminated optical surface investigation technique in near UV, visible and near IR range, investigating property changes of systems in transmission and reflection
Diffusion and ion pump vacuum systems using ionic and kinetic methods of gas evacuation