Effects of phosphorus diffusions in epitaxial silicon layers.
Phosphorus diffusion into epitaxial silicon layers studied by electrical and structural characteristics of epitaxial diffused planar junctions
Chu, T. L.↗
Engineering topics
Publications and source records attributed to Stickler, R..
Phosphorus diffusion into epitaxial silicon layers studied by electrical and structural characteristics of epitaxial diffused planar junctions
Electron microscopy analysis of microinhomogeneities in commercial Si used in preparation of p-n junction devices
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