Engineering Papers⌕ Search

SEARCH · Engineering Papers

Results for “pulses”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 19 records

Generation and Study of Am(IV) by Temperature-Controlled Electron Pulse Radiolysis

Used nuclear fuel (UNF) separation techniques that strive to separate radiotoxic americium (Am) from trivalent lanthanide fission products through oxidation state control have increased research efforts surrounding Am(V) and Am(VI). However, equivalent knowledge of the tetravalent state, Am(IV), has remained elusive, particularly in conditions more representative of UNF reprocessing, i.e., in concentrated nitric acid (HNO3). With this in mind, we have used electron pulse radiolysis to study the radiation-induced redox reaction of Am(III) with the oxidizing nitrate radical (NO3?) in 6 M HNO3: Am(III) + NO3? ? Am(IV) + NO3? . These experiments enabled us to observe the growth and decay of Am(IV) in a concentrated acidic solution for the first time. The transient Am(IV) species was found to have a lifetime of ~16 µs?sufficiently long-lived to play a critical mechanistic role in UNF reprocessing systems. Additionally, we performed the first-ever temperature-dependent kinetics study of an actinide element, elucidating unprecedented Arrhenius and Eyring activation parameters for the reaction of Am(III) with NO3?. This new knowledge provides much-needed molecular-level insights into the radiation-induced behavior of Am.

38 RADIATION CHEMISTRY, RADIOCHEMISTRY, AND NUCLEA↗

Reliable Determination of Pulses and Pulse-Shape Instability in Ultrashort Laser Pulse Trains Using Polarization-Gating and Transient-Grating Frequency-Resolved Optical Gating Using the RANA Approach

Devices that measure the presence of instability in the pulse shapes in trains of ultrashort laser pulses do not exist, so this task necessarily falls to pulse-measurement devices, like Frequency-Resolved Optical Gating (FROG) and its variations, which have proven to be a highly reliable class of techniques for measuring stable trains of ultrashort laser pulses. Fortunately, multi-shot versions of FROG have also been shown to sensitively distinguish trains of stable from those of unstable pulse shapes by displaying readily visible systematic discrepancies between the measured and retrieved traces in the presence of unstable pulse trains. However, the effects of pulse-shape instability and algorithm stagnation can be indistinguishable, so a never-stagnating algorithm—even when instability is present—is required and is generally important. In previous work, we demonstrated that our recently introduced Retrieved-Amplitude N-grid Algorithmic (RANA) approach produces highly reliable (100%) pulse-retrieval in the second-harmonic-generation (SHG) version of FROG for thousands of sample trains of pulses with stable pulse shapes. Further, it does so even for trains of unstable pulse shapes and thus both reliably distinguishes between the two cases and provides a rough measure of the degree of instability as well as a reasonable estimate of most typical pulse parameters. Here, we perform the analogous study for the polarization-gating (PG) and transient-grating (TG) versions of FROG, which are often used for higher-energy pulse trains. We conclude that PG and TG FROG, coupled with the RANA approach, also provide reliable indicators of pulse-shape instability. In addition, for PG and TG FROG, the RANA approach provides an even better estimate of a typical pulse in an unstable pulse train than SHG FROG does, even in cases of significant pulse-shape instability.

47 OTHER INSTRUMENTATION↗

ResNet and CycleGAN for pulse shape discrimination of He-4 detector pulses: Recovering pulses conventional algorithms fail to label unanimously

Pulse shape discrimination (PSD) capable detectors, such as He-4, that respond to neutron and gamma-ray 7 interactions have a threshold deposited energy value below which n/γ discrimination vanishes when using 8 conventional PSD algorithms. Recent attempts in applying supervised learning based artificial neural 9 networks for PSD use the pulses in the separated regions to train the networks so they can be used to classify 10 another set of separated pulses. In doing so, pulses previously indistinguishable are not recovered for 11 classification, which would have increased the number of neutron and gamma-ray pulses that could be used 12 for further analysis. Assuming the reason why conventional PSD algorithms have unseparated regions is 13 because the parameter space of the algorithms fail to capture the intrinsic (but subtle) distinguishing 14 behavior of some of the neutron and gamma-ray pulses, a cycle-consistent generative adversarial network 15 (CycleGAN) was trained to amplify those differences and extract well separated neutron and gamma-ray 16 clusters. Results show that, once the network is trained with pulses from separated and unseparated regions, 17 it was able to transform the pulses in the unseparated region to improve the PSD. Subsequent n/γ 18 classification was performed using deep residual network (ResNet) that takes pulses with 512 data points 19 as an input. Two different ResNets were explored – simple ResNet and modified ResNet which takes 20 segmented pulse inputs in the first layer and the corresponding time axis values in the last hidden layer. 21 The later approach enables the network to extract time correlated pulse features to enhance its ability to 22 capture the pulse behaviors relevant for PSD. Although it achieves slightly lower accuracy, 99.41% versus 23 99.89%, based on simply counting the number of correct n/γ labels assigned, compared to the simple 24 ResNet, the modified ResNets architecture was able to decreases the cross-entropy loss function by half, 25 which implies that the correct n/γ labels assigned are less likely to be accidental. PSD parameter 26 distributions based on n/γ classification by ResNet before and after transforming unseparated pulses using 27 CycleGAN show that by enhancing the separation between neutrons and gamma-rays, the transformation 28 helps improve the performance of classifier networks that are trained using labeled dataset. The 29 enhancement of neutron and gamma-ray separation by the CycleGAN increased the PSD figure of merit 30 (FOM) by up to 70% in some regions. Here, the results show that, if a given detector achieves clear separation 31 between neutron and gamma-ray pulses in any energy region, such neural network approaches can help 32 lower the energy threshold for the separation and increasing the number of neutron and gamma-ray pulses 33 that can be used for further analysis.

4He↗

Impulse Response Functions for Characterizing Pulse-to-Pulse Junction Temperature Behavior in Laser Diode Pulse Trains

A method is proposed for determination of the pulse-to-pulse variation in junction temperature and emission wavelength of a semiconductor laser diode during a train of pulses. Here, this approach, based on impulse response functions, enables predictions for pulse trains with arbitrary pulse-to-pulse variations in output power, pulse width, and pulse delay using a limited set of experimental characterization data. The use of this approach is illustrated by application to a particular device structure.

Deri, Robert J. [Lawrence Livermore National Labor↗

Dynamic pulse-to-pulse thermal load effects in pulse-train-mode self-seeded X-ray free-electron laser

Thermal load has been a haunting factor that undermines the brightness and coherence of the self-seeded X-ray free-electron laser. Additionally, different from uniformly pulsed mode, in pulse train mode a thermal quasi-steady state of the crystal monochromator may not be reached. This leads to a dynamic thermal distortion of the spectral transmission curves and seed quality degradation. In this paper, the pulse-to-pulse thermal load effects on the spectral transmission curves and seed quality are shown, and some instructive information for the tuning process is provided.

47 OTHER INSTRUMENTATION↗

Gas–Liquid Chemical Reactions with Nanosecond Pulses: Role of Frequency and Pulse Delivery Modes

The effects of changes in the mode of delivery of nanosecond pulses in a gas-liquid plasma reactor on the formation of hydrogen peroxide, H 2 O 2 , and, as an indicator for ·OH radicals, the decoloration of methylene blue, MB, were determined for pulse delivery by a) increasing frequency with uniform pulses (5-50 kHz), b) variation of the time between bursts of pulses (burst period), c) changing the inner burst frequency (1 over the time between the pulses in the burst), and d) variation of number of pulses in a burst (N-cycles). H 2 O 2 peroxide formation was not affected by the method of pulse delivery in the range of parameters studied here and all data followed an approximately linear increase in H 2 O 2 production rate with discharge power. In contrast, the MB decoloration rate was affected by the burst modes. In terms of discharge power, the MB decoloration rate was highest for the uniform pulse mode; however, the linear trend in increase of MB decoloration with power when the burst period was varied, suggest that at higher power the burst mode may be more effective than the uniform pulsing. Consideration of the per pulse decoloration with energy per pulse and with number of pulses suggest that the burst mode can affect reactions differently from applying a uniform pulse.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Effects of inter-pulse coupling on nanosecond pulsed high frequency discharge ignition in a flowing mixture

This work numerically investigates the effects of non-equilibrium nanosecond plasma discharge pulse rep- etition frequency, pulse number, and flow velocity on the critical ignition volume, minimum ignition energy, and chemistry in a plasma-assisted H 2 /air flow at 300 K and 1 atm using a multi-scale adaptive reduced chemistry solver for plasma assisted combustion (MARCS-PAC). The interactions between discharges/ignition kernels spanning decoupled, partially-coupled and fully-coupled regimes in a pulse train are studied. For a single pulse discharge, increased flow velocity increases the minimum ignition energy required due to the increase of convective heat loss and flame stretch. The results show that the minimum ignition kernel prop- agation speed at the critical ignition kernel volume increases with the flow velocity. The minimum critical ignition volume decreases with the increase of plasma discharge energy. For sequential two-pulse discharges, ignition fails at both decoupled and partially-coupled regimes even when the total discharge energy is above the minimum ignition energy, but succeeds only in the fully-coupled regime at a shorter inter-pulse time. Overlap of the OH radical pool between the sequential two-pulse discharges and the increase of the chemistry effect due to the increase of reduced electric field in the fully-coupled regime contribute to the ignition enhancement. In addition, for two-pulse discharges in the fully-coupled discharge regime, the mixture can be ignited at a total energy below the minimum ignition energy of a single pulse with the same flow conditions. Moreover, for a given total discharge energy with multiple pulsed discharges, the enhancement of the ignition kernel volume has a non-monotonic dependence on discharge frequency and pulse number. The effective ignition enhancement can be achieved with an optimal pulse repetition frequency and pulse number. Furthermore, this work provides a new understanding of the mechanism for repetitive plasma ignition and insights for the optimization of plasma ignition in a reactive flow.

42 ENGINEERING↗

Pulse-by-pulse transient thermal deformation in crystal optics under high-repetition-rate FEL

Time-domain modeling of the thermal deformation of crystal optics can help define acceptable operational ranges across the pulse-energy repetition-rate phase space. In this paper, we have studied the transient thermal deformation of a water-cooled diamond crystal for a cavity-based X-ray free-electron laser (CBXFEL), either an X-ray free-electron laser oscillator (XFELO) or a regenerative amplifier X-ray free-electron laser (RAFEL), by numerical simulations including finite-element analysis and advanced data processing. Pulse-by-pulse transient thermal deformation of a 50 µm-thick diamond crystal has been performed with X-ray pulse repetition rates between 50 kHz and 1 MHz. Results for temperature and thermal deformation have been compared with the results of transient analysis using a continuous wave (CW) power loading. Temperature and thermal deformation results from pulse-by-pulse transient analysis vary with time about the results for the CW case for the same average power. The variation amplitude increases with pulse energy and decreases with repetition rate. When the repetition rate increases to infinity, both temperature and thermal deformation converge to the results for the CW case. Two critical time scales for the operation of crystal optics in a CBXFEL are (1) first-turn time, i.e. the time for the XFEL pulse to complete the first turn around the cavity so that the crystal sees the recirculated XFEL pulse, and (2) period-end time, i.e. the time that the next electron bunch arrives for the amplification, so that the crystal outcouples the amplified FEL power. For the same average power, simulation results show that the crystal thermal deformation seen by the XFEL beam decreases with repetition rate at the first-turn time of a 300 m-long cavity and increases with repetition rate at the period-end time. For the wavefront preservation requirement of the crystal optics, a pulse-energy versus repetition-rate phase space has been established. The upper bounds of the pulse energy at both first-turn and period-end times decreases with repetition rate, especially at the period-end time. The upper bound of the thermal deformation of the crystal at the period-end time for any repetition frequency can be estimated from the CW case. For a water-cooled diamond crystal of dimension 5 mm × 5 mm × 0.05 mm, the time to reach a quasi steady-state is about 50 ms for temperature and 50 µs for thermal deformation.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗

Development of Long-Lifetime Pulsed Gas Valves for Pulsed Electric Thrusters

It is advantageous for gas-fed pulsed electric thrusters to employ pulsed valves so propellant is only flowing to the device during operation. The propellant utilization of the thruster will be maximized when all the gas injected into the thruster is acted upon by the fields produced by the electrical pulse. Gas that is injected too early will diffuse away from the thruster before the electrical pulse can act to accelerate the propellant. Gas that is injected too late will miss being accelerated by the already-completed electrical pulse. As a consequence, the valve must open quickly and close equally quickly, only remaining open for a short duration. In addition, the valve must have only a small amount of volume between the sealing body and the thruster so the front and back ends of the pulse are as coincident as possible with the valve cycling, with very little latent propellant remaining in the feed lines after the valve is closed. For a real mission of interest, a pulsed thruster can be expected to pulse at least 10(exp 10) - 10(exp 11) times, setting the range for the number of times a valve must open and close. The valves described in this paper have been fabricated and tested for operation in an inductive pulsed plasma thruster (IPPT) for in-space propulsion. In general, an IPPT is an electrodeless space propulsion device where a capacitor is charged to an initial voltage and then discharged, producing a high-current pulse through a coil. The field produced by this pulse ionizes propellant, inductively driving current in a plasma located near the face of the coil. Once the plasma is formed, it can be accelerated and expelled at a high exhaust velocity by the electromagnetic Lorentz body force arising from the interaction of the induced plasma current and the magnetic field produced by the current in the coil. The valve characteristics needed for the IPPT application require a fast-acting valve capable of a minimum of 10(exp 10) valve actuation cycles. Since even 10(exp 9) cycles is well above anything demonstrated, this lower value was selected as the design point for the present work. The valve seal must remain leak-tight throughout operation, and the body must maintain a low internal leakage at relatively high operating temperatures. The full set of design requirements used for this program are summarized in Table 1. In this work, we describe two pulsed gas valves that have been fabricated to have long lifetime and demonstrate the characteristics listed above. The first is a miniaturized, conventional electromagnet-based valve while the second is a piezoelectric-based valve design. The conventional valve, shown in Fig. 1, is opened by use of a solenoid electromagnetic actuator. When current is applied to the solenoid coil, magnetic forces pull the plunger away from the valve seat, allowing fluid to flow through the valve. Removal of electrical current permits the spring and fluid pressure to seat the plunger, halting the flow of fluid. The valve body is fabricated from 304L corrosion resistant steel (CRES) and while the parts that form the magnetic circuit are fabricated from 430 CRES. This material does not have optimum magnetic properties, but its corrosion resistance permits incorporation into a design without requiring an additional plating process. A viton O-ring compound (Parker V0884-75), selected for its mechanical strength at elevated temperatures, was used for the valve seat seal. The design was based solely on the use of analytical sizing calculations, as opposed to a more rigorous finite element analysis. While this valve is small and relatively lightweight, it does not represent a design that is optimized for mass and/or a given volume envelope. The piezoelectric valve is a "puller" valve design. Applying a voltage to the piezo crystal causes it to elongate and pull a pintle off the seat, opening the valve. The valve seal consists of the pintle with an external, spherically-formed tip fabricated from Inconel 625 and the seat fabricated from Inconel 718 and possessing a spherical surface that permits the pintle to align with the valve body centerline after each cycle, maintaining the circumferential metal-on-metal seal. The contact stress on the valve pintle is expected in the worst case to be 96.5 MPa (14 ksi), which is well below the work hardening value of 413.7 MPa (60 ksi) for Inconel 615. Results presented in this work will compare the performance of each valve, both to each other and to the valve design requirements given in Table 1. In general, both valves meet all the performance envelope requirements, but the piezoelectric valve consumes considerably less power and has a faster response time over the conventional solenoid-driven valves.

Burkhardt, Wendel M.↗

Overcoming energy limitation in post-compression of picosecond pulses by free beam propagation in air and temporal pulse splitting and recombining

Cryogenically cooled diode-pumped Yb:YAG has been demonstrated to efficiently generate pulses of >1 J energy and several picoseconds duration at a kilohertz repetition rate. Pulse broadening and post-compression techniques capable of operating at these high pulse energies will expand the use of these lasers in applications requiring shorter pulses. Towards this goal, we demonstrate the post-compression of 5.5 ps pulses with energy in the 0.1 J range by spectral broadening of self-collimated large area beams in air. In proof-of-principle experiments, pulses of 65 mJ energy from a cryogenically cooled Yb:YAG laser were compressed to 1.1 ps after 65 m propagation in a compact setup in which the beam was folded using flat mirrors. Further energy scaling was demonstrated by combining this spectral broadening technique with temporal pulse splitting and recombining. 120 mJ pulses were split into two pulses and coherently recombined with 85% efficiency after 50 m of propagation in air to yield 1.4 ps pulses.

High Energy Laser↗

Recovery of coincident frequency domain multiplexed detector pulses using sequential deconvolution

Multiplexing of radiation detector signals into a single channel significantly reduces the need for a large number of digitizer channels, which reduces the cost and the power consumption of a data acquisition system. We previously demonstrated frequency domain multiplexing by convolution using a prototype system that multiplexed two EJ-309 organic scintillators signals into a single channel. Each detector pulse was converted to a damped sinusoid which was then combined into a single channel. The combined signal was digitized and the original detector signal was recovered from the damped sinusoid by deconvolution. In this paper, we demonstrate the recovery of multiple detector signals that arrive during the same digitized record via a new sequential deconvolution method. Here, when two detectors produce signals in the same digitized record and their pulses do not overlap in time, we found that the charge, arrival time, and particle type can be estimated fairly precisely for the first pulse, but the second pulse exhibits substantial degradation in the precision of the estimated charge and arrival time. When the pulses overlap in time, we demonstrate both theoretically and experimentally that the part of the first pulse that does not overlap with the second can be recovered accurately, so the arrival time and amplitude of the first pulse can be estimated fairly precisely, but not the charge or particle type. None of these quantities can be estimated precisely for the second pulse when the two pulses overlap.

47 OTHER INSTRUMENTATION↗

Near-complete extraction of maximum stored energy from large-core fibers using coherent pulse stacking amplification of femtosecond pulses

High field science relies on ultrashort pulse lasers with multi-joule pulse energies for studying light–matter interactions under extreme conditions and for driving particle accelerators and secondary radiation sources of x rays, gamma rays, neutrons, positrons, muons, and protons. Next-generation laser drivers will require a 10 3 -10 4 times increase in pulse repetition rates, producing multi-joule energies at multi-kilowatt average powers to enable practical applications in nuclear engineering, advanced materials, medicine, biology, homeland security, and high-energy physics. Spatially coherently combined femtosecond fiber lasers are recognized as a pathway to these next-generation drivers, with significant practical advantages including high efficiency and the possibility of compact integration. However, chirped pulse amplification in fibers is capable of extracting only a small fraction (usually ~1%) of the maximum stored energy. Here we demonstrate near-complete maximum stored energy extraction with low accumulated nonlinearity from a large-core fiber amplifier using coherent pulse stacking amplification. We have amplified a 81-pulse stacking burst in a 85 µm core chirally coupled core Yb-doped fiber, extracting up to 9.5 mJ (~90% of stored energy) with < 4.5 radians of accumulated nonlinear phase, temporally combined this burst into a single pulse, and achieved 4.2 mJ pulses of 313 fs bandwidth-limited duration after compression. This represents, to our knowledge, the highest energy extracted and compressed into a femtosecond pulse from a single fiber amplifier, enabling approximately two orders of magnitude size reduction of future high-energy coherently spatially combined fiber laser arrays.

47 OTHER INSTRUMENTATION↗

Evaluating pulse-shaping capabilities of next-generation pulsed power architectures

This project evaluated the pulse shaping capabilities of next-generation pulsed power (NGPP) architectures. NGPP architectures share several common attributes including multiple independent pulse-generation lines, a radial water-insulated impedance transformer, and a central vacuum insulated load region. A multi-module circuit model was developed, incorporating independent pulse-generation lines and a 2-D transmission line mesh of the radial impedance transformer to assess the effects of azimuthal asymmetry in pulse-shaped experiments. Circuit model simulations demonstrated that NGPP architectures are able to produce the the desired current pulse shapes for exemplar NGPP experiments. Additionally, the project explored automated methods for experiment design, including derivative -ree optimization and machine learning. Pulse-shaped experiments require designers to determine machine parameters that reliably produce the desired current pulse at the load, a process that typically relies on expert knowledge and iterative adjustments using the Z circuit model. Given the increased complexity of NGPP systems, this manual approach may be impractical. While the evaluated methods do not eliminate the need for manual iteration, they can reduce the time required for experiment design. Derivative-free optimization automates much of the trial-and-error process, providing a close starting point for manual adjustments or making small modifications to near-final designs. Meanwhile, deep neural network methods can generate a good qualitative match to the desired current pulse in under one second without requiring circuit model simulations.

42 ENGINEERING↗

Dual-Pulse Pulse Position Modulation (DPPM) for Deep-Space Optical Communications: Performance and Practicality Analysis

Due to its simplicity and robustness against wavefront distortion, pulse position modulation (PPM) with photon counting detector has been seriously considered for long-haul optical wireless systems. This paper evaluates the dual-pulse case and compares it with the conventional single-pulse case. Analytical expressions for symbol error rate and bit error rate are first derived and numerically evaluated, for the strong, negative-exponential turbulent atmosphere; and bandwidth efficiency and throughput are subsequently assessed. It is shown that, under a set of practical constraints including pulse width and pulse repetition frequency (PRF), dual-pulse PPM enables a better channel utilization and hence a higher throughput than it single-pulse counterpart. This result is new and different from the previous idealistic studies that showed multi-pulse PPM provided no essential information-theoretic gains than single-pulse PPM.

Li, Jing↗

Pulse Energy and Pulse Duration Effects in the Ionization and Fragmentation of Iodomethane by Ultraintense Hard X Rays

The interaction of intense femtosecond x-ray pulses with molecules sensitively depends on the interplay between multiple photoabsorptions, Auger decay, charge rearrangement, and nuclear motion. Here, we report on a combined experimental and theoretical study of the ionization and fragmentation of iodomethane (CH 3 I) by ultraintense (~10 19 W/cm 2 ) x-ray pulses at 8.3 keV, demonstrating how these dynamics depend on the x-ray pulse energy and duration. We show that the timing of multiple ionization steps leading to a particular reaction product and, thus, the product’s final kinetic energy, is determined by the pulse duration rather than the pulse energy or intensity. While the overall degree of ionization is mainly defined by the pulse energy, our measurement reveals that the yield of the fragments with the highest charge states is enhanced for short pulse durations, in contrast to earlier observations for atoms and small molecules in the soft x-ray domain. Finally, we attribute this effect to a decreased charge transfer efficiency at larger internuclear separations, which are reached during longer pulses.

36 MATERIALS SCIENCE↗

Generation of gamma radiation by a subterawatt ultrashort laser pulse: optimisation of preplasma and pulse duration

We report an experimental and numerical study of the acceleration of electrons in a plasma interacting with a subterawatt laser pulse (intensity of ∼3 × 10{sup 18} W cm{sup −2} at a pulse duration of 50 fs). A preplasma layer on the surface of a molybdenum target is formed by an additional laser pulse with a duration of 8 ns and an intensity of ∼2 × 10{sup 12} W cm{sup −2}. It is shown that an increase in the laser pulse duration to 1700 fs at a constant energy (and a proportional decrease in intensity) leads to an increase in the yield of bremsstrahlung γ-radiation by more than an order of magnitude when the nanosecond pulse is ahead of the femtosecond one by 15 − 25 ns. Interferometry data and results of diagnostics of optical and γ-radiation of a plasma demonstrate that the collisional ionisation of atoms by electrons oscillating in the field of such a laser pulse plays an essential role in the formation of electron density profile. The sensitivity of the described effect to the level of amplified spontaneous emission is determined, despite the nanosecond pulse impact. Numerical simulations show that at a large pulse duration, the acceleration of electrons is stipulated by the beaking of plasma waves excited during stimulated Raman scattering of laser radiation. (paper)

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Analysis and Mitigation of Pulse-Pile-Up Artifacts in Plasma Pulse-Height X-ray Spectra

Pulse pile-up in pulse-height energy analyzers increases when the incident rate of pulses increases relative to the inverse of the dead time per pulse of the detection system. Changes in the observed energy distributions with incident rate and detector-electronics-formed pulse shape then occur. Here, we focus on weak high energy tails in X-ray spectra, important for measurements on partially ionized, warm (50–500 eV average electron energy), pure hydrogen plasma. A first-principles two-photon pulse-pile-up model is derived specific to trapezoidal-shaped pulses; quantitative agreement is found between the measurements and the model’s predictions. The model is then used to diagnose pulse-pile-up tail artifacts and mitigate them in relatively low count-rate spectra.

2-photon↗

Transients using low-high pulsed power in inductively coupled plasmas

Pulsed inductively coupled plasmas (ICPs) are widely deployed in the fabrication of semi-conductor devices. Pulse repetition frequencies (PRFs) of up to tens of kHz are commonly used during plasma etching for the high power densities they generate during the pulse-on period, and for their unique chemistries during the pulse-off period. The use of highly attaching halogen gases produces low electron densities during the pulse-off period, and these low density can result in instabilities, E-H transitions and ignition delays when applying power on the next pulse. To mitigate these possibilities, a low-level power environment could be maintained during “pulse-off” to moderate the minimum plasma density, therefore reducing ignition delays and enhancing plasma stability. In this work, ICPs sustained by 5 kHz pulsed power using Ar/Cl 2 mixtures at 20 mTorr were computationally investigated. For these conditions, the computed electron temperature (T e ) reaches a quasi-steady state during both the high- and low-power excitation. The model predicts that within the electromagnetic skin-depth, T e spikes to a high value during a low-to-high power modulation, and to a low value during a high-to-low power modulation. At the same time, a few cm above the substrate, there is little modulation in T e , as electron power convected from the skin depth disperses in traversing the reactor. Finally, the positive and negative spikes, and convection of transients across the reactors, are functions of power ramping time and gas mixtures.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗