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Results for “partially coherent imaging”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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All sourcesNASA NTRSDOE OSTI
DOE OSTI2026

Binary pseudo-random array standard for extreme ultraviolet lithography tool characterization

Extreme ultraviolet (EUV) imaging tools play a crucial role in EUV lithography. Achieving high accuracy in EUV metrology is essential for advanced semiconductor manufacturing. A thorough characterization of the instrumentation in use is required. Binary pseudo-random arrays (BPRAs) are an established standard for calibrating and characterizing optical instruments in the frequency domain. Here, we expand the BPRA standard to applications in EUV imaging. To extend the technology to the EUV spectral range, a high-resolution BPRA target with the smallest feature size of 40 nm is developed. The EUV BPRA target establishes an in situ and portable calibration and alignment standard for EUV imaging. The target is patterned by means of electron-beam lithography, using a nickel absorber with a thickness of 39 nm. The substrate is a 4″ silicon wafer with a molybdenum/silicon multilayer coating. To demonstrate the efficacy of the target and develop the instrument calibration protocol, the target is imaged on the Sharp Hyper-NA Actinic Reticle Review Project EUV mask microscope. Power spectral density (PSD) data are presented. The characteristics of the imaging system are imprinted on the PSD. The modulation transfer function is extracted from the PSD data. A partially coherent imaging model is used as a reference to the experimental results.

BPRA↗
DOE OSTI2024

Single Electron Self-coherence and Its Wave/Particle Duality in the Electron Microscope

Intensities in high-resolution phase-contrast images from electron microscopes build up discretely in time by detecting single electrons. A wave description of pulse-like coherent-inelastic interaction of an electron with matter implies a time-dependent coexistence of coherent partial waves. Their superposition forms a wave package by phase decoherence of 0.5 - 1 radian with Heisenbergs energy uncertainty ΔE H = $\hbar$/2 Δt -1 matching the energy loss ΔE of a coherent-inelastic interaction and sets the interaction time Δt. In these circumstances, the product of Planck's constant and the speed of light hc is given by the product of the expression for temporal coherence λ 2 /Δλ and the energy loss ΔE. Experimentally, the self-coherence length was measured by detecting the energy-dependent localization of scattered, plane matter waves in surface proximity exploiting the Goos–Hänchen shift. Chromatic-aberration Cc-corrected electron microscopy on boron nitride (BN) proves that the coherent crystal illumination and phase contrast are lost if the self-coherence length shrinks below the size of the crystal unit cell at ΔE > 200 eV. Finally, in perspective, the interaction time of any matter wave compares with the lifetime of a virtual particle of any elemental interaction, suggesting the present concept of coherent-inelastic interactions of matter waves might be generalizable.

72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS↗
DOE OSTI2026

Nonlinear reversal of photoexcitation on the attosecond time scale improves ultrafast X-ray diffraction images

The complex refractive index of a material governs its light-matter interactions, with intense light fields enabling tailored nonlinear optical responses. In the X-ray regime, rapid photoionization limits the potential of nonlinear techniques by inducing irreversible electronic damage. Here we demonstrate that intense, sub-femtosecond X-ray pulses, shorter than typical Auger decay times, can partially reverse photoexcitation via stimulated emission near atomic resonances. By analyzing thousands of coherent diffraction patterns and ion spectra from neon nanoparticles exposed to sub-fs and 15-fs pulses, we observe enhanced X-ray diffraction alongside reduced energy absorption for sub-fs pulses. Theoretical modeling attributes this to dynamics akin to Rabi flopping that prolong the lifetime of resonant states and suppress electronic bleaching. These findings suggest that ultrashort, intense X-ray pulses enable active control of X-ray refractive index and damage pathways, opening avenues for improved high-resolution imaging and nonlinear spectroscopy in complex nanoscale systems.

Ulmer, Anatoli [Universität Hamburg (Germany)] (OR↗
DOE OSTI2025

A detailed study of pre-heating effects in electron beam melting powder bed fusion process

Metal-based additive manufacturing processes, such as powder bed fusion with electron beam (PBF-EB) process, also referred to as electron beam melting (EBM), can produce high-density parts with minimal residual stresses due to the uniform and coherent preheating of the powder bed. However, understanding and controlling the multiple stages of preheating is required to enable the production of high-quality, consistent parts of various materials. This work presents a large-scale, multi-layer, three-dimensional numerical analysis focused on studying the preheating stages for predicting thermal history during the PBF-EB process. The model follows a continuous multi-stage cyclic process, that incorporates all the main stages of the PBF-EB process for 316 L stainless steel. This includes the gradual deposition of a new powder layer, the first and second preheating levels of the powder bed, and the energy deposition during melting (excluding the actual melt-pool behavior simulation). The model employs an adaptive time-scaling approach that automatically adjusts the energy deposition for each solution time-increment. This allows for localized changes in time-resolution over an otherwise computationally expensive multi-layer procedure. The material property variations are also taken into account, with an emphasis on the subtle irreversible changes in powder effective thermal conductivity after the two requisite preheating stages of the powder bed. This effect is studied using simplified conductivity models from the literature for partially sintered powder, validated by a dedicated experiment and numerical simulation. The large-scale model is then used to estimate the actual temperatures during first and second preheating levels for 316 L steel, which is not yet fully supported commercially for PBF-EB. Model predictions are corroborated by experiments, using and analyzing IR images, taken at the completion of each layer by the machine’s built-in infrared camera. The current model also incorporates a qualitative assessment for the effects of conductivity change during pre-heating, as well as evaluates the applicability of the time-scaling approach.

36 MATERIALS SCIENCE↗