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At least 19 records

Binary pseudo-random array standard for extreme ultraviolet lithography tool characterization

Extreme ultraviolet (EUV) imaging tools play a crucial role in EUV lithography. Achieving high accuracy in EUV metrology is essential for advanced semiconductor manufacturing. A thorough characterization of the instrumentation in use is required. Binary pseudo-random arrays (BPRAs) are an established standard for calibrating and characterizing optical instruments in the frequency domain. Here, we expand the BPRA standard to applications in EUV imaging. To extend the technology to the EUV spectral range, a high-resolution BPRA target with the smallest feature size of 40 nm is developed. The EUV BPRA target establishes an in situ and portable calibration and alignment standard for EUV imaging. The target is patterned by means of electron-beam lithography, using a nickel absorber with a thickness of 39 nm. The substrate is a 4″ silicon wafer with a molybdenum/silicon multilayer coating. To demonstrate the efficacy of the target and develop the instrument calibration protocol, the target is imaged on the Sharp Hyper-NA Actinic Reticle Review Project EUV mask microscope. Power spectral density (PSD) data are presented. The characteristics of the imaging system are imprinted on the PSD. The modulation transfer function is extracted from the PSD data. A partially coherent imaging model is used as a reference to the experimental results.

BPRA

Modelling the SIR-B image response to partially coherent seas

A mathematical model of transient seas modulated by coherent swells is developed as a Rayleigh-Poisson random process subject to deterministic correlations of scattering sites, as they appear in a time window defined by a SAR's range-Doppler measurements of the surface coordinates. This model of SAR response to sea surface dynamics is discussed as a Fourier domain predictor/corrector of a dynamic motion blur.

Tilley, D. G.

Particle image fields and partial coherence

The accuracy of Young's fringe method for reducing velocity field data is compromized by a spatially incoherent background field which originates in the random locations of the seeding particles. The probability density function for the spatial frequency cutoff of this background is derived as a function of the particle count, the distribution governing the power in each frequency interval is derived, and conditions are found under which the Van Cittert-Zernike theorem applies. The background field resembles the far field of a partially coherent source in the high particle count limit, but departs significantly at low and moderate counts.

Rubinstein, Robert

Phase-Sensitive Coherence and the Classical-Quantum Boundary in Ghost Imaging

The theory of partial coherence has a long and storied history in classical statistical optics. the vast majority of this work addresses fields that are statistically stationary in time, hence their complex envelopes only have phase-insensitive correlations. The quantum optics of squeezed-state generation, however, depends on nonlinear interactions producing baseband field operators with phase-insensitive and phase-sensitive correlations. Utilizing quantum light to enhance imaging has been a topic of considerable current interest, much of it involving biphotons, i.e., streams of entangled-photon pairs. Biphotons have been employed for quantum versions of optical coherence tomography, ghost imaging, holography, and lithography. However, their seemingly quantum features have been mimicked with classical-sate light, questioning wherein lies the classical-quantum boundary. We have shown, for the case of Gaussian-state light, that this boundary is intimately connected to the theory of phase-sensitive partial coherence. Here we present that theory, contrasting it with the familiar case of phase-insensitive partial coherence, and use it to elucidate the classical-quantum boundary of ghost imaging. We show, both theoretically and experimentally, that classical phase-sensitive light produces ghost imaging most closely mimicking those obtained in biphotons, and we derived the spatial resolution, image contrast, and signal-to-noise ratio of a standoff-sensing ghost imager, taking into account target-induced speckle.

coherence theory

Diffraction image formation in optical systems with polarization aberrations. II - Amplitude response matrices for rotationally symmetric systems

In the previous paper in this series (McGuire and Chipman, 1990), a formulation was established for the calculation and analysis of diffraction image quality in polarizing optical systems illuminated with partially polarized, partially coherent light. In the present paper, the effect of second- and fourth-order polarization aberrations on the image plane diffraction patterns are examined. The amplitude response matrix is calculated for optical systems with small numerical apertures. Numerical results are presented for optical systems with circular apertures for three of the aberration types.

Mcguire, James P., Jr.

Perceiving the coherent movements of spatially-separated features

When a partially-occluded object is represented in an image, it is defined by a set of spatially-separated features that may be registered at different spatial scales. To understand the image, human vision must organize these fragmented optical features into common and distinct object surfaces. Although the common fate of moving features often is considered a primary source of reliable information for image segmentation, little is known of the visual system's capacity to discriminate the coherent relative movements of spatially-separated features. In a series of experiments, observers viewed elements whose movements were correlated (direction and magnitude) or were uncorrelated. Our results indicate that observers can discriminate the two types of movement about as well as they can detect any movement at all. Moreover, the ability to perceive coherent movements is maintained under a variety of conditions including differences in the elements' spatial frequency content, spatial position and contrast, and temporal phase shifts between the spatially-correlated displacements. These results suggest that coherent relative motion may be a fundamental source of information exploited by vision, despite considerable variability in the spatial and temporal characteristics of the individual features.

Mowafy, Lyn

Defect structure of EFG silicon ribbon

The defect structure of EFG ribbons was studied using EBIC, TEM and HVEM. By imaging the same areas in EBIC and HVEM, a direct correlation between the crystallographic nature of defects and their electrical properties was obtained. (1) Partial dislocations at coherent twin boundaries may or may not be electrically active. Since no microprecipitates were observed at these dislocations it is likely that the different electrical activity is a consequence of the different dislocation core structures. (2) 2nd order twin joins were observed which followed the same direction as the coherent first order twins normally associated with EFG ribbons. These 2nd order twin joins are in all cases strongly electrically active. EFG ribbons contain high concentrations of carbon. Since no evidence of precipitation was found with TEM it is suggested that the carbon may be incorporated into the higher order twin boundaries now known to exist in EFG ribbons.

Strunk, H.

Single Electron Self-coherence and Its Wave/Particle Duality in the Electron Microscope

Intensities in high-resolution phase-contrast images from electron microscopes build up discretely in time by detecting single electrons. A wave description of pulse-like coherent-inelastic interaction of an electron with matter implies a time-dependent coexistence of coherent partial waves. Their superposition forms a wave package by phase decoherence of 0.5 - 1 radian with Heisenbergs energy uncertainty ΔE H = $\hbar$/2 Δt -1 matching the energy loss ΔE of a coherent-inelastic interaction and sets the interaction time Δt. In these circumstances, the product of Planck's constant and the speed of light hc is given by the product of the expression for temporal coherence λ 2 /Δλ and the energy loss ΔE. Experimentally, the self-coherence length was measured by detecting the energy-dependent localization of scattered, plane matter waves in surface proximity exploiting the Goos–Hänchen shift. Chromatic-aberration Cc-corrected electron microscopy on boron nitride (BN) proves that the coherent crystal illumination and phase contrast are lost if the self-coherence length shrinks below the size of the crystal unit cell at ΔE > 200 eV. Finally, in perspective, the interaction time of any matter wave compares with the lifetime of a virtual particle of any elemental interaction, suggesting the present concept of coherent-inelastic interactions of matter waves might be generalizable.

72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS

Nonlinear reversal of photoexcitation on the attosecond time scale improves ultrafast X-ray diffraction images

The complex refractive index of a material governs its light-matter interactions, with intense light fields enabling tailored nonlinear optical responses. In the X-ray regime, rapid photoionization limits the potential of nonlinear techniques by inducing irreversible electronic damage. Here we demonstrate that intense, sub-femtosecond X-ray pulses, shorter than typical Auger decay times, can partially reverse photoexcitation via stimulated emission near atomic resonances. By analyzing thousands of coherent diffraction patterns and ion spectra from neon nanoparticles exposed to sub-fs and 15-fs pulses, we observe enhanced X-ray diffraction alongside reduced energy absorption for sub-fs pulses. Theoretical modeling attributes this to dynamics akin to Rabi flopping that prolong the lifetime of resonant states and suppress electronic bleaching. These findings suggest that ultrashort, intense X-ray pulses enable active control of X-ray refractive index and damage pathways, opening avenues for improved high-resolution imaging and nonlinear spectroscopy in complex nanoscale systems.

Ulmer, Anatoli [Universität Hamburg (Germany)] (OR

Two improved coherent optical feedback systems for optical information processing

Coherent optical feedback systems are Fabry-Perot interferometers modified to perform optical information processing. Two new systems based on plane parallel and confocal Fabry-Perot interferometers are introduced. The plane parallel system can be used for contrast control, intensity level selection, and image thresholding. The confocal system can be used for image restoration and solving partial differential equations. These devices are simpler and less expensive than previous systems. Experimental results are presented to demonstrate their potential for optical information processing.

Lee, S. H.

TPSAS-NF1676L-10819-DND

Additional aerodynamic data for the benchmark configuration of partially-dressed cavity-closed nose landing gear (PDCC-NLG), obtained at a flow Mach number of 0.166, are provided in this presentation. A detailed account of the unsteady surface pressure fluctuations acquired with a Kulite transducer designed to be mobile is also given. The roving nature of the transducer allowed the sensor to be placed at numerous locations where high-amplitude pressure fluctuations are expected. The measured surface pressure spectra are mainly broadband in nature, lacking any local peaks associated with coherent vortex shedding. This finding is in agreement with off-surface flow measurements based on particle image velocimetry, which revealed the flow field to be a collection of separated shear layers without any dominant vortex shedding processes.

Mehdi R Khorrami

TPSAS-NF1676L-10756-DND

Additional aerodynamic data for the benchmark configuration of partially-dressed cavity-closed nose landing gear (PDCC-NLG), obtained at a flow Mach number of 0.166, are provided in this presentation. A detailed account of the unsteady surface pressure fluctuations acquired with a Kulite transducer designed to be mobile is also given. The roving nature of the transducer allowed the sensor to be placed at numerous locations where high-amplitude pressure fluctuations are expected. The measured surface pressure spectra are mainly broadband in nature, lacking any local peaks associated with coherent vortex shedding. This finding is in agreement with off-surface flow measurements based on particle image velocimetry, which revealed the flow field to be a collection of separated shear layers without any dominant vortex shedding processes.

Mehdi R Khorrami

Chasing Shadows: Rotation of the Azimuthal Asymmetry in the TW Hya Disk

We have obtained new images of the protoplanetary disk orbiting TW Hya in visible, total intensity light with the Space Telescope Imaging Spectrograph (STIS) on the Hubble Space Telescope (HST), using the newly commissioned BAR5 occulter. These HSTSTIS observations achieved an inner working angle of approximately 0 "2, or11.7 au, probing the system at angular radii coincident with recent images of the disk obtained by ALMA and in polarized intensity near-infrared light. By comparing our new STIS images to those taken with STIS in 2000 and with NICMOS in 1998, 2004, and 2005, we demonstrate that TW Hyas azimuthal surface brightness asymmetry moves coherently in position angle. Between 50 au and 141 au we measure a constant angular velocity in the azimuthal brightness asymmetry of 22.deg7 yr(exp -1) in a counterclockwise direction, equivalent to a period of 15.9yrassuming circular motion. Both the (short) inferred period and lack of radial dependence of the moving shadow pattern are inconsistent with Keplerian rotation at these disk radii. We hypothesize that the asymmetry arises from the fact that the disk interior to 1 au is inclined and precessing owing to a planetary companion, thus partially shadowing the outer disk. Further monitoring of this and other shadows on protoplanetary disks potentially opens anew avenue for indirectly observing the sites of planet formation.

protoplanetary disk orbiting TW Hya

Search for Pulsations from a Nearby Millisecond Pulsar and Wasilewski 49: Mirror for a Hidden Seyfert 1 Nucleus

Five studies are reported in this final report. The recently discovered 5.3 ms pulsar J1012+5307 at a distance of 520 pc is in an area of the sky which is particularly deficient in absorbing gas. The column density along the line of sight is less than 7.5 x 10(exp 19) CM(exp -2) which facilitates soft X-ray observations. Halpern reported a possible ROSAT Position Sensitive Proportional Counter (PSPC) detection of the pulsar in a serendipitous, off-axis observation. We have now confirmed the X-ray emission of PSR J1012+,5307 in a 23 ksec observation with the ROSAT High Resolution Imager (HRI). A point source is detected within 3" of the radio position. Its count rate of 1.6 +/- 0.3 x 10(exp -3) s(exp -1) corresponds to an unabsorbed 0. 1-2.4 keV flux of 6.4 x 10(exp -14) ergs cm(exp -2) s(exp -1), similar to that reported previously. This counts-to-flux conversion is valid for N(sub H) = 5 x 10(exp 19) cm(exp -2), and either a power-law spectrum of photon index 2.5 or a blackbody of kT = 0.1 keV. The implied X-ray luminosity of 2.0 x 10(exp 30) ergs s(exp -1) is 5 X 10(exp -4) of the pulsar's spin-down power dot-E, and similar to that of the nearest millisecond pulsar J0437-4715, which is nearly a twin of J1012+5307 in P dot-E. We subjected the 37 photons (and 13 background counts) within the source region to a pulsar search, but no evidence for pulsation was found. The pulsar apparently emits over a large fraction of its rotation cycle, and the absence of sharp modulation can be taken as evidence for surface thermal emission, as is favored for PSR J0437-4715, rather than magnetospheric X-ray emission which is apparent in the sharp pulses of the much more energetic millisecond pulsar B1821-24. A further test of this interpretation will be made with a longer ROSAT observation, which will increase the number of photons collected by a factor of 5, and permit a more sensitive examination of the light curve for modulation due to emission from heated polar caps. If found, such modulation will be further evidence that surface reheating by the impact of particles accelerated along open fiel;d lines operates in these approximately 10(exp -9) year old pulsars. In a second study, a new AM Her star serendipitously in a 25 day observation was detected with the EUVE satellite. A coherent period of 85.82 min is present in the EUVE Deep Survey imager light curve of this source. A spectroscopic optical identification is made with a 19th magnitude blue star that has H and He emission lines, and broad cyclotron humps typical of a magnetic cataclysmic variable. A lower limit to the polar magnetic field of 50 MG is estimated from the spacing of the cyclotron harmonics. EUVE J0425.6-5714 is also detected in archival ROSAT HRI observations spanning two months, and its stable and highly structured light curve permits us to fit a coherent ephemeris linking the ROSAT and EUVE data over a 1.3 yr gap. The derived period is 85.82107 +/- 0.00020 min, and the ephemeris should be accurate to 0.1 cycles until the year 2005. A narrow but partial X-ray eclipse suggests that this object belongs to the group of AM Her stars whose viewing geometry is such that the accretion stream periodically occults the soft X-ray emitting accretion spot on the surface of the white dwarf. A non-detection of hard X-rays from ASCA observations that are contemporaneous with the ROSAT HRI shows that the soft X-rays must dominate by at least an order of magnitude, which is consistent with a known trend among AM Her stars with large magnetic field. This object should not be confused with the Seyfert galaxy IH 0419-577 (= LB 1727), another X-ray/EUV source which lies only 3'95 away, and was the principal target of these monitoring observations. In a third report; the identity of the persistent high-energy (> 100 MeV) gamma-ray sources in the Galaxy, still largely a mystery is investigated. The second installment of the EGRET (2EG) lists a total of 128 sources, of which 51 are likely or possibly identified with AGNs, five with rotation-powered pulsars, and one is the LMC. There are 71 unidentified sources, of which 33, or almost half, lie in the narrow band of absolute value of b < 10 degrees along the Galactic plane. This excess of low-latitude sources must, therefore, constitute a Galactic population that is either similar to the already identified gamma-ray pulsars, or an entirely new class of gamma-ray emitters associated with the disk population. We are continuing our program, begun in A06, that is aimed at intermediate-latitude sources, arguing that X-ray detection of them is the most plausible method of identifying the Galactic population. The sources at high latitude must statistically be mostly AGNS, and are more straightforwardly identified through radio and optical means. For the fourth report, identification of the EGRET Source the identity of the persistent, high-energy gamma-ray sources in the Galactic plane is a mystery. The most likely scenario is a population of middle-aged pulsars, many of which could be radio quiet like Geminga. We have an ongoing program of ROSAT, VLA, and optical observations of selected EGRET error circles at intermediate Galactic latitude. For one of these fields, at (l, b) = (106 degrees, +3), our complete census of X-ray and radio sources, reveals a remarkable association between a radio shell with unique properties, and a complete census of X-ray and radio sources reveals a remarkable association between a radio shell with unique properties, and a compact X-ray source. Further observations are needed to determine whether or not this source has a hard X-ray spectrum like that of other gamma ray pulsars and, ideally, to find its pulsations. A fifth report reviews, Wasilewski 49, an interacting pair of Seyfert galaxies at z = 0.063, one of which contains a hidden Seyfert I nucleus as evidenced by broad wings on its Balmer lines.

Halpern, Jules P.

Topics in inference and decision-making with partial knowledge

Two essential elements needed in the process of inference and decision-making are prior probabilities and likelihood functions. When both of these components are known accurately and precisely, the Bayesian approach provides a consistent and coherent solution to the problems of inference and decision-making. In many situations, however, either one or both of the above components may not be known, or at least may not be known precisely. This problem of partial knowledge about prior probabilities and likelihood functions is addressed. There are at least two ways to cope with this lack of precise knowledge: robust methods, and interval-valued methods. First, ways of modeling imprecision and indeterminacies in prior probabilities and likelihood functions are examined; then how imprecision in the above components carries over to the posterior probabilities is examined. Finally, the problem of decision making with imprecise posterior probabilities and the consequences of such actions are addressed. Application areas where the above problems may occur are in statistical pattern recognition problems, for example, the problem of classification of high-dimensional multispectral remote sensing image data.

Safavian, S. Rasoul

Smooth Pursuit of a Partially Occluded Object

There has long been qualitative evidence that humans can pursue an object defined only by the motion of its parts. We explored this quantitatively using an occluded diamond stimulus. Four subjects (one naive) tracked a line-figure diamond moving along an elliptical path (0.9 Hz) either clockwise (CW) or counterclockwise (CCW) behind either an X-shaped aperture (CROSS) or two vertical rectangular apertures (BARS), which obscured the corners. Although the stimulus consisted of only four line segments (108 cd/square m) moving within a visible aperture (0.2 cd/square m) behind a foreground (38 cd/square m), it is largely perceived as a coherently moving diamond. The inter-saccadic portions of eye-position traces were fit with sinusoids. All subjects tracked object motion with considerable temporal accuracy. The mean phase lag was 5 deg/6 deg (CROSS/BARS) and the mean relative phase between the horizontal and vertical components was +95 deg/+92 deg (CW) and -85 deg/-75 deg (CCW), which is close to perfect. Furthermore, a chi-square analysis showed that 56% of BARS trials were consistent with tracking the correct elliptical shape (p is less than 0.05), although segment motion was purely vertical. These data disprove the main tenet of most models of pursuit: that it is a system that seeks to minimize retinal image motion through negative feedback. Rather, the main drive must be a visual signal which has already integrated spatiotemporal retinal information into an object-motion signal.

Stone, L. S.

Imaging the Moon's Core with Seismology

Constraining the structure of the lunar core is necessary to improve our understanding of the present-day thermal structure of the interior and the history of a lunar dynamo, as well as the origin and thermal and compositional evolution of the Moon. We analyze Apollo deep moonquake seismograms using terrestrial array processing methods to search for the presence of reflected and converted energy from the lunar core. Although moonquake fault parameters are not constrained, we first explore a suite of theoretical focal spheres to verify that fault planes exist that can produce favorable core reflection amplitudes relative to direct up-going energy at the Apollo stations. Beginning with stacks of event seismograms from the known distribution of deep moonquake clusters, we apply a polarization filter to account for the effects of seismic scattering that (a) partitions energy away from expected components of ground motion, and (b) obscures all but the main P- and S-wave arrivals. The filtered traces are then shifted to the predicted arrival time of a core phase (e.g. PcP) and stacked to enhance subtle arrivals associated with the Moon s core. This combination of filtering and array processing is well suited for detecting deep lunar seismic reflections, since we do not expect scattered wave energy from near surface (or deeper) structure recorded at varying epicentral distances and stations from varying moonquakes at varying depths to stack coherently. Our results indicate the presence of a solid inner and fluid outer core, overlain by a partial-melt-containing boundary layer (Table 1). These layers are consistently observed among stacks from four classes of reflections: P-to-P, S-to-P, P-to-S, and S-to-S, and are consistent with current indirect geophysical estimates of core and deep mantle properties, including mass, moment of inertia, lunar laser ranging, and electromagnetic induction. Future refinements are expected following the successful launch of the GRAIL lunar orbiter and SELENE 2 lunar lander missions.

Weber, Renee C.

A detailed study of pre-heating effects in electron beam melting powder bed fusion process

Metal-based additive manufacturing processes, such as powder bed fusion with electron beam (PBF-EB) process, also referred to as electron beam melting (EBM), can produce high-density parts with minimal residual stresses due to the uniform and coherent preheating of the powder bed. However, understanding and controlling the multiple stages of preheating is required to enable the production of high-quality, consistent parts of various materials. This work presents a large-scale, multi-layer, three-dimensional numerical analysis focused on studying the preheating stages for predicting thermal history during the PBF-EB process. The model follows a continuous multi-stage cyclic process, that incorporates all the main stages of the PBF-EB process for 316 L stainless steel. This includes the gradual deposition of a new powder layer, the first and second preheating levels of the powder bed, and the energy deposition during melting (excluding the actual melt-pool behavior simulation). The model employs an adaptive time-scaling approach that automatically adjusts the energy deposition for each solution time-increment. This allows for localized changes in time-resolution over an otherwise computationally expensive multi-layer procedure. The material property variations are also taken into account, with an emphasis on the subtle irreversible changes in powder effective thermal conductivity after the two requisite preheating stages of the powder bed. This effect is studied using simplified conductivity models from the literature for partially sintered powder, validated by a dedicated experiment and numerical simulation. The large-scale model is then used to estimate the actual temperatures during first and second preheating levels for 316 L steel, which is not yet fully supported commercially for PBF-EB. Model predictions are corroborated by experiments, using and analyzing IR images, taken at the completion of each layer by the machine’s built-in infrared camera. The current model also incorporates a qualitative assessment for the effects of conductivity change during pre-heating, as well as evaluates the applicability of the time-scaling approach.

36 MATERIALS SCIENCE