Challenges and Solutions to Failure Analysis in 3D Microsystems
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Cole, Edward I.↗
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Advances in Reliability Monitoring and Failure Analysis in 3D Microsystems
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Jordan, Matthew↗
Impact of Synthesis and Aging on Titanium Carbide MXenes for Printed Microsystems
This work investigates the long-term electrical stability of Ti3C2Tx MXene Inks under accelerated aging conditions. Inks were synthesized from commercial MAX-Phase precursors, drop-cast onto custom PCB’s and monitored automated in-situ measurements. Samples aged at 85°C/85% RH, 85°C/0% RH and ambient conditions revealed distinct degradation trends. Wet aged inks showed rapid resistance increased while etched formulations exhibited long term stability. These findings highlight the influence of synthesis stage and environmental exposure on MXene Inks reliability, offering critical insights for printed MEMS and sensor applications. Ongoing measurements extend the aging timeline beyond prior studies, marking the longest evaluation under accelerated aging conditions to date.
Aging↗
3D nanolithography with metalens arrays and spatially adaptive illumination
The growing demand for advanced materials, miniaturized devices and integrated microsystems calls for the reliable fabrication of complex, multiscale, three-dimensional (3D) architectures, a need increasingly addressed through light-based and laser-based processes. However, owing to the field-of-view (FOV) limitations of conventional imaging optics, existing 3D laser nanofabrication techniques face fundamental challenges in throughput, proximity error and stitching defects on the path to scaling. Here, in this study, we present a scalable 3D nanofabrication platform that uses a metalens-generated focal spot array to parallelize two-photon lithography (TPL) beyond centimetre-scale write field areas. Metalenses are ideally suited for producing submicron-scale focal spots for high-throughput nanolithography, as they uniquely feature large numerical apertures (NAs), immersion media compatibility and large-scale manufacturability. We experimentally demonstrate a printing system that uses a 12-cm 2 metalens array to produce more than 120,000 cooperative focal spots, corresponding to a throughput exceeding 10 8 voxels s −1 . By programmatically patterning the focal spot array using a spatial light modulator (SLM), an adaptive parallel printing strategy is developed for precise greyscale linewidth modulation and choreographed printing of semiperiodic and fully aperiodic 3D geometries. We demonstrate parallel printing of replicated microstructures (>50 M microparticles per day), centimetre-scale 3D architectures with feature sizes down to 113 nm, and photonic and mechanical metamaterials. This work demonstrates the potential of 3D nanolithography towards wafer-scale production, showing how TPL could be used at scale for applications in microelectronics, biomedicine, quantum technology and high-energy laser targets.
Materials science↗
Magnetically responsive nanocultures for direct microbial assessment in soil environments
Cultivating microorganisms in native-like conditions is vital for bioprospecting and accessing now unculturable species. However, there remains a gap in scalable tools that can both mimic native microenvironments and enable targeted recovery of microbes from complex settings. Such approaches are essential to advance our understanding of microbial ecology, predict community functions, and discover previously unidentified biotherapeutics. We present magnetic nanocultures—a high-throughput microsystem for isolating and growing environmental microbes under near-native conditions. These nanoliter-scale bioreactors are encapsulated in semipermeable membranes that form magnetic polymeric microcapsules using iron oxide nanoparticles within polydimethylsiloxane-based shells. This design offers mechanical stability and magnetic actuation, enabling efficient retrieval from soil-like environments. The nanocultures are optimized for optical and biological properties to support microbial encapsulation, growth, and sorting. Our study demonstrates the feasibility of using magnetically responsive microenvironments to cultivate elusive microbes, offering a promising platform for bioprospecting previously uncultured or unknown microbial species.
Usman, Huda [Department of Chemical Engineering, C↗
High-Precision Low-Cost Micro Birdbath Resonating Gyroscope (CRADA Final Report)
As part of the Cyclotron Road program, Enertia Microsystems Inc. (EMI) investigated a high-performance micro mechanical resonator called the micro birdbath resonator and a high-precision micro electromechanical systems (MEMS) gyroscope called the birdbath resonator gyroscope (BRG). The BRG is a novel fused-silica MEMS gyroscope. The BRG can obtain significantly greater accuracy, comparable size, and comparable cost with MEMS gyroscopes made of silicon that are currently on the market.
47 OTHER INSTRUMENTATION↗
Engineered Microorganisms for Enhanced Rare Earth Element Bio-mining and Separations (Final Technical Report)
Rare earth elements (REE) are critical ingredients of sustainable energy technologies, but their extraction from ore and separation from one another pose formidable challenges. To solve the challenge of REE supply, we used advanced genomics, high-throughput screening with synthetic REE minerals, and synthetic biology to engineer two sets of exotic microbes to (1) extract REE from ores, spent cracking catalysts, coal ash and electronic waste with high efficiency and selectivity, and (2) to purify REE into single element batches, all under benign conditions without the need of harsh solvents and high temperatures. This work integrated our expertise in systems and synthetic biology (Buz Barstow); rare-earth geochemistry (Esteban Gazel) and mineral synthesis (Megan Holycross); and microsystems engineering (Mingming Wu) by first elucidating the set of rules that predict an organism’s phenotype and then applying them to solve this critical problem in sustainable energy. These new technologies could help to revitalize the US rare earth industry and provide a new source of these critical elements for future energy technologies. We have already had some big success in tech transfer. Two of our team members (postdoctoral fellow Alexa Schmitz and graduate student Sean Medin) were able to study the supply chain for REE in the United States, and identify an opportunity to commercialize our REE mineral-dissolution technology. Alexa and Sean recently founded REEgen, Inc., an REE biomining company. Dr. Schmitz was recently awarded a fellowship from the Activate Foundation to support the first two years of REEgen. Cornell showed its support for this technology and company, and Dr. Schmitz was awarded the Rising Women Innovator’s award. These two awards unlocked support from Cornell’s Praxis Incubator.
58 GEOSCIENCES↗
Accessing Fungal Contributions to the Birch Effect: Real-Time Respiration from Pore-Scale Microfluidics
Drying and rewetting of soil stimulates soil carbon emission. The Birch effect, driven by these cycles, leads to CO2 efflux, which can be monitored using real-time mass spectrometry (RTMS). Although soil fungi retain water during droughts, their contribution to CO2 release during drying–rewetting cycles remains unclear. In this study, we present the first demonstration of integrating micromodels with RTMS to monitor the Birch effect by simulating drought and rewetting. Micromodels were inoculated with axenic fungal culture and dried to assess moisture retention. After drying, RTMS quantified CO2 release upon rewetting with H218O mixtures. Our results showed that soil fungi released CO2 upon rehydration and immediately utilized the external water source at the pore scale by generating subsequent 46CO2. This work is the first to integrate RTMS with microsystems to investigate pore-scale biogeochemistry and the involvement of fungi in the Birch effect.
54 ENVIRONMENTAL SCIENCES↗
CUPID, the Cuore upgrade with particle identification
CUPID, the CUORE Upgrade with Particle Identification, is a next-generation experiment to search for neutrinoless double beta decay (0 νββ ) and other rare events using enriched Li 2 100 MoO 4 scintillating bolometers. It will be hosted by the CUORE cryostat located at the Laboratori Nazionali del Gran Sasso in Italy. The main physics goal of CUPID is to search for 0 νββ of 100 Mo with a discovery sensitivity covering the full neutrino mass regime in the inverted ordering scenario, as well as the portion of the normal ordering regime with lightest neutrino mass larger than 10 meV. With a conservative background index of 10 −4 cts/(keV·kg·yr), 240 kg isotope mass, 5 keV FWHM energy resolution at 3 MeV and 10 live-years of data taking, CUPID will have a 90% C.L. half-life exclusion sensitivity of 1.8 · 10 27 yr, corresponding to an effective Majorana neutrino mass ( m ββ ) sensitivity of 9–15 meV, and a 3σ discovery sensitivity of 1 · 10 27 yr, corresponding to an m ββ range of 12–21 meV.
Alfonso, K. [Virginia Polytechnic Institute and St↗
Publisher Erratum: CUPID, the Cuore upgrade with particle identification
Publisher Erratum: Eur. Phys. J. C (2025) 85:737 https://doi.org/10.1140/epjc/s10052-025-14352-1 The author M. Pavan (affiliations 9 and 10) was missing from the published author list. The online version of the article has been updated to include the author. Additionally, affiliations 4 and 17 have been corrected to reflect the proper institutional order. The publisher apologizes for the inconvenience caused.
Alfonso, K. [Virginia Polytechnic Institute and St↗
Impact of 12-nm FinFET Technology Variations on TID Effects: A Comparative Study of GF 12LP and 12LP+ at the Transistor Level
Here, this article presents a comparative analysis of total ionizing dose (TID) response in GlobalFoundries’ (GF) 12 low-power (LP) and 12LP+12-nm bulk fin field effect transistor (FinFET) technologies using 10-keV X-rays. Our findings show that 12LP+ n-type transistors demonstrate higher sensitivity to TID degradation of the off-state leakage drain current compared to 12LP. Data indicate that for both 12LP and 12LP+, transistors with higher threshold voltages (VTs) exhibit lower off-state drain-source leakage postirradiation compared to transistors with lower VTs. Data consistently show that transistors with fewer fins per transistor show superior TID tolerance, in both 12LP and 12LP+ technologies. Lower VT transistors in both technologies display similar preirradiation leakage currents. On the other hand, higher VT transistors in 12LP+ show lower preirradiation leakage currents than those in 12LP, highlighting that the front-end-of-line of 12LP+ technology has been modified compared to 12LP. p-type devices in 12LP+ presented negligible degradation. Larger TID sensitivity in 12LP+ might be attributed to the implementation of dual-metal gate work functions, reduced halo doping, deeper source/drain (S/D) doping profiles, and/or 12LP+ having narrower fins compared to 12LP.
Dual-metal gate work functions↗
A gravity-based mounting approach for large-scale cryogenic calorimeter arrays
Cryogenic calorimeters are among the leading technologies for searching for rare events. The CUPID experiment is exploiting this technology to deploy a tonne-scale detector to search for neutrinoless double-beta decay of 100 Mo. The CUPID collaboration proposed an innovative approach to assembling cryogenic calorimeters in a stacked configuration, held in position solely by gravity. This gravity-based assembly method is unprecedented in the field of cryogenic calorimeters and offers several advantages, including relaxed mechanical tolerances and simplified construction. To assess and optimize its performance, we constructed a medium-scale prototype hosting 28 Li 2 MoO 4 crystals and 30 Ge light detectors, both operated as cryogenic calorimeters at the Laboratori Nazionali del Gran Sasso (Italy). Despite an unexpected excess of noise in the light detectors, the results of this test proved (i) a thermal stability better than ±0.5 mK at 10 mK, (ii) a good energy resolution of Li 2 MoO 4 cryogenic calorimeters, (6.6 ± 2.2) keV FWHM at 2615 keV, and (iii) a Li 2 MoO 4 light yield measured by the closest light detector of 0.36 keV/MeV, sufficient to guarantee the particle identification requested by CUPID.
72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS↗
Publisher Erratum: A gravity-based mounting approach for large-scale cryogenic calorimeter arrays
In the originally published version of this article, several errors were identified in the author list and acknowledgements section. These have now been corrected as follows: Corrections to the Author List: Barrera has been corrected to Barresi. Copello (affiliation 18) has been corrected to Copello (affiliation 19). F. De Domizio has been corrected to S. Di Domizio. Figueros-Feliciamo has been corrected to Figueroa-Feliciano. Mancarella (affiliations 8, 17) has been corrected to Mancarella (affiliations 8, 18). Manenti (affiliations 18, 19) has been corrected to Manenti (affiliations 19, 20). Mayer (affiliations 3, 20, 31) has been corrected to Mayer (affiliations 3, 21, 31). Pagot has been corrected to Pageot. Puranam (affiliation 20) has been corrected to Puranam (affiliation 21). O. Penek has been corrected to Ö. Penek. L. Pettinacci has been corrected to V. Pettinacci. P. Pirro has been corrected to S. Pirro. Previtale has been corrected to Previtali. Rappoldi (affiliation 18) has been corrected to Rappoldi (affiliation 19). Raselli (affiliation 18) has been corrected to Raselli (affiliation 19). Rizzoli (affiliations 8, 17) has been corrected to Rizzoli (affiliations 8, 18). Rossella (affiliation 18) has been corrected to Rossella (affiliation 19). Correction to the Acknowledgements Section: The following grant numbers were missing and have now been added: This work was supported by NSF-PHY-2412377 and NSF-PHY-1913374. Additionally, on page 11, Section 5, second line, the chemical formula was incorrectly given as Li 2 MO 4 . The correct formula is Li 2 MoO 4 . The original article has been updated to reflect these corrections. The publisher apologizes for the inconvenience.
Alfonso, K. [Virginia Polytechnic Institute and St↗
Sensitivity of the CUPID experiment to $0\nu \beta \beta$ decay of 100 Mo
CUPID is a next-generation bolometric experiment to search for neutrinoless double-beta decay ($0\nu \beta \beta$ ) of 100 Mo using Li 2 MoO 4 scintillating crystals. It will operate 1596 crystals at ~10 mK in the CUORE cryostat at the Laboratori Nazionali del Gran Sasso in Italy. Each crystal will be facing two Ge-based bolometric light detectors for α rejection. We compute the discovery and the exclusion sensitivity of CUPID to $0\nu \beta \beta$ in a Frequentist and a Bayesian framework. This computation is done numerically based on pseudo-experiments. For the CUPID baseline scenario, with a background and an energy resolution of 1.0 x 10 –4 counts/keV/kg/yr and 5 keV FWHM at the Q-value, respectively, this results in a Bayesian exclusion sensitivity (90% c.i.) of $\hat{T}_{1/2} > 1.6 \times 10^{27} \ \textrm{yr}$, corresponding to the effective Majorana neutrino mass of $\hat{m}_{\beta \beta } < \ 9.6$ – 28 meV. The Frequentist discovery sensitivity (3σ ) is $\hat{T}_{1/2}= 1.0 \times 10^{27} \ \textrm{yr}$, corresponding to $\hat{m}_{\beta \beta }= \ 12$ – 36 meV.
Alfonso, K. [Virginia Polytechnic Institute and St↗
Cobalt–Nickel Exchange in Exfoliated Battery Layered Cathode Sheets with Application to Recycling
With the emerging dominance of electric vehicles (EV) in the transportation sector, recycling or upcycling spent battery materials will be required to reduce EV costs, lessen waste, and ease critical material supply chain issues for EV batteries. Here, motivated by work in the literature describing the exfoliation of layered oxides, first‐principles calculations are performed to show that Li x CoO 2 , if exfoliated into nanosheets, can readily undergo transition metal cation exchange in aqueous media. The substitution of Co 3+ or Co 4+ cations inside the sheet by Ni 2+ is associated with modest reaction barriers (Δ G* ≈ 0.3–0.7 eV) and is at most mildly endothermic (Δ G ≈ 0.2–0.3 eV). In contrast, previous battery degradation studies have shown that Co 3+ diffusion is strongly inhibited inside bulk layered oxides. This suggests that processing spent layered oxides as nanosheets can provide a potentially low‐energy‐cost pathway to altering the transition metal and/or dopant stoichiometry, which can be used toward developing new room‐temperature upcycling routes for cathodes from end‐of‐life batteries.
battery recycling↗
Upper critical magnetic field and multiband superconductivity in artificial high-𝑇 𝑐 superlattices of nano quantum wells
Artificial high-T c superlattices (AHTS) composed of quantum building blocks with tunable superconducting critical temperature have been synthesized by engineering their nanoscale geometry using the Bianconi-Perali Valletta (BPV) two-gap superconductivity theory. These quantum heterostructures consist of quantum wells made of superconducting, modulation-doped Mott insulators (S), confined by a metallic (N) potential barrier. The lattice geometry has been carefully engineered to induce the predicted Fano-Feshbach shape resonance between the gaps, near a topological Lifshitz transition. Here, we validate the BPV theory by providing compelling experimental evidence that AHTS samples, at the peak of the superconducting dome, exhibit resonant two-band, two-gap superconductivity. This is demonstrated by measuring the temperature dependence of the upper critical magnetic field, μ 0 H c2 , in samples with superlattice periods 3.3 < d < 5.28 nm and L/d ratios close to the magic value 2/3 (where L is the thickness of the superconducting La 2 CuO 4 layer and d is the superlattice period). Here, the data reveal the predicted upward concavity in H c2 (T) and a characteristic kink in the coherence length as a function of temperature, confirming the predicted two-band superconductivity with Fermi velocity ratio ≈ 0.25 and significant pair-exchange term among the two condensates.
Heterostructures↗
Energy Efficiency Scaling for 2 Decades (EES2) Roadmap for Computing
In response to the looming crisis in global energy consumption required for advanced computing applications, the United States Department of Energy (DOE) Advanced Materials and Manufacturing Technology Office (AMMTO) is leading a multi-organizational effort to define a roadmap for energy efficiency scaling for two decades (EES2) with the aim to reduce energy use in all aspects of computation by more than a factor of 1000 in two decades. By July of 2024, over 60 organizations representing industry, academia, and the national laboratories have pledged to work in various aspects of research and development to enable energy efficiency in computing including in the development of the EES2 roadmap, with an initial public release in 2024 as the first phase of an ongoing commitment to energy-efficient and sustainable computation.
Kaarsberg, Tina [U.S. Department of Energy (DOE)]↗
Towards Scalable 3D Integration of 2T-nC FeRAM with Hundreds of Layer Stacking
In this article, we study the limits of the number of capacitors and read history dependence in a 2T-nC ferroelectric random-access memory (FeRAM) cell, paving the way for its high-density integration toward hundreds of stacked layers. Through a comprehensive experimental and simulation study on the scaling behavior of the 2T-nC FeRAM architecture, we demonstrate: (i) successful fabrication of 2T-64C cells with robust memory operation and clearly distinguishable ‘0’ and ‘1’ states, even in 64- capacitor configurations; (ii) that the parasitic capacitance of the floating node originates predominantly from the linear component of the ferroelectric capacitor, and its impact on n-scaling—due to degraded sense margin—can be mitigated by floating unselected capacitors with enough TΩ isolation; (iii) that sharing write and read transistors among n capacitors introduces a read history dependence issue due to fluctuating floating node voltage (VFN); and (iv) that a proposed FN discharge scheme can effectively eliminate read-sequence dependence, at the cost of reduced read endurance.
36 MATERIALS SCIENCE↗