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At least 19 records

Design and optimization of microbolometer multilayer optical cavity

Microbolometers are the most widely used detectors in long-wave infrared uncooled thermal imagers. An optical cavity is required within a microbolometer structure to increase its optical absorption. In this work we present a detailed study on the design and optimization of a microbolometer optical cavity using Essential-Macleod package. In the simulations, the cavity is considered as thin film multi-layers that form cascaded Fabry-Perot optical cavities. In the design phase, the layers structures are selected including materials and initial thickness. The absorbing layers are chosen to be vanadium-pentoxide (V{sub 2}O{sub 5}) and titanium (Ti). In the optimization phase, the designed layer thicknesses are varied to maximize optical absorption within the absorbing layers. The simulations show that Ti layer absorption dominates over V{sub 2}O{sub 5} layer. Also, the optimization proves that the air-gap cavity thickness is not simply quarter-wavelength because of the complex cascaded Fabry-Perot structure. The optimized air-gap thickness here is ≈3.5 µm at 10.6µm wavelength.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Low resistivity W{sub x}V{sub 1−x}O{sub 2}-based multilayer structure with high temperature coefficient of resistance for microbolometer applications

Materials that exhibit semiconductor-to-metal phase transition (SMT) are commonly used as sensing layers for the fabrication of uncooled microbolometers. The development of highly responsive microbolometers would benefit from using a sensing material that possesses a large thermal coefficient of resistance (TCR) close to room temperature and a resistivity low enough to compromise between noise reduction and high TCR, while it should also satisfies the requirements of current CMOS technology. Moreover, a TCR that remains constant when the IR camera surrounding temperature varies would contribute to achieve reliable temperature measurements without additional corrections steps for TCR temperature dependence. In this paper, the characteristics of the SMT occurring in undoped and tungsten-doped vanadium dioxide thin films deposited on LaAlO{sub 3} (100) substrates are investigated. They are further exploited to fabricate a W{sub x}V{sub 1−x}O{sub 2} (0 ≤ x ≤ 2.5) multilayer structure exhibiting a bottom-up gradient of tungsten content. This MLS displays a combination of properties that is promising for application to uncooled microbolometer, such as a large TCR of −10.4%/ °C and low resistivity values ranging from 0.012 to 0.10 Ω-cm over the temperature range 22 °C–42 °C.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Microbolometers Based On Epitaxial YBa(2)Cu(3)O(7-x) Thin Films

Improved microbolometers of superconducting-transition type developed with view toward eventual fabrication of staring, infrared-imaging planar arrays of such microbolometers integrated with addressing electronic circuitry. Superconducting thin films in microbolometers epitaxial. These devices exhibit high sensitivity and low noise.

Foote, Marc C.↗

Application and Design of Satellite Infrared Spectral Imaging Radiometers with Uncooled Microbolometer Array Detectors

Uncooled infrared microbolometer array detectors have application for space borne spectral imaging radiometer of several types to lower size, power and cost and provide improved performance. Other advantages of eliminating cooling requirement are simplified systems, simplified satellite integration and improved reliability. A prototype microbolometer instrument for cloud observations was flown on the STS-85 space shuttle mission. Extensive data were acquired at_km resolution at four thermal infrared wavelength bands. From the 320x280 detector array both spectral and angular information can be used to advantage in cloud retrievals and has been demonstrated. An engineering model Compact Visible and Infrared Imaging Radiometer (COVIR) for small satellite missions has been developed. Application of advanced microbolometer array detectors for three axis stabilized GOES thermal imagers has been studied.

Spinhirne, James↗

Broadband enhancement of infrared absorption in microbolometers using Ag nanocrystals

High performance microbolometers are widely sought for thermal imaging applications. In order to increase the performance limits of microbolometers, the responsivity of the device to broadband infrared (IR) radiation needs to be improved. In this work, we report a simple, quick, and cost-effective approach to modestly enhance the broadband IR response of the device by evaporating Ag nanocrystals onto the light entrance surface of the device. When irradiated with IR light, strong fields are built up within the gaps between adjacent Ag nanocrystals. These fields resistively generate heat in the nanocrystals and underlying substrate, which is transduced into an electrical signal via a resistive sensing element in the device. Through this method, we are able to enhance the IR absorption over a broadband spectrum and improve the responsivity of the device by ∼11%.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Atomic layer deposition synthesized TiO{sub x} thin films and their application as microbolometer active materials

This paper demonstrates the possible usage of TiO{sub x} thin films synthesized by atomic layer deposition as a microbolometer active material. Thin film electrical resistance is investigated as a function of thermal annealing. It is found that the temperature coefficient of resistance values can be controlled by coating/annealing processes, and the value as high as −9%/K near room temperature is obtained. The noise properties of TiO{sub x} films are characterized. It is shown that TiO{sub x} films grown by atomic layer deposition technique could have a significant potential to be used as a new active material for microbolometer-based applications.

36 MATERIALS SCIENCE↗

Air-bridge microbolometer for far-infrared detection

A new microbolometer for far-infrared detection has been fabricated that allows an increase in sensitivity of a factor of 4 over the best previously reported bolometer. By suspending the detector in the air above its substrate, a reduction in the thermal conductance out of the device by a factor of 5 has been achieved. At a modulation frequency of 100 kHz this microbolometer has an electrical noise equivalent power 28 pW/sq rt Hz. A thermal model is also presented that accurately fits the response of the detector.

Neikirk, D. P.↗

Evaluation of Microbolometer-Based Thermography for Gossamer Space Structures

In August 2003, NASA's In-Space Propulsion Program contracted with our team to develop a prototype on-board Optical Diagnostics System (ODS) for solar sail flight tests. The ODS is intended to monitor sail deployment as well as structural and thermal behavior, and to validate computational models for use in designing future solar sail missions. This paper focuses on the thermography aspects of the ODS. A thermal model was developed to predict local sail temperature variations as a function of sail tilt to the sun, billow depth, and spectral optical properties of front and back sail surfaces. Temperature variations as small as 0.5 C can induce significant thermal strains that compare in magnitude to mechanical strains. These thermally induced strains may result in changes in shape and dynamics. The model also gave insight into the range and sensitivity required for in-flight thermal measurements and supported the development of an ABAQUS-coupled thermo-structural model. The paper also discusses three kinds of tests conducted to 1) determine the optical properties of candidate materials; 2) evaluate uncooled microbolometer-type infrared imagers; and 3) operate a prototype imager with the ODS baseline configuration. (Uncooled bolometers are less sensitive than cooled ones, but may be necessary because of restrictive ODS mass and power limits.) The team measured the spectral properties of several coated polymer samples at various angles of incidence. Two commercially available uncooled microbolometer imagers were compared, and it was found that reliable temperature measurements are feasible for both coated and uncoated sides of typical sail membrane materials.

Miles, Jonathan J.↗

Transition Edge YBa_2Cu_3O_(7-x) Microbolometers for Infrared Staring Arrays

A potentially important application of high-temperature superconducting microbolometers is infrared staring arrays. In many such staring arrays, sensitivity is more important than speed of response. Thus, it is desirable to design low-thermal-mass pixels that are thermally isolated from the substrate. To this end, Johnson, et al. at Honeywell have fabricated meander lines of YBa_2Cu_3O_7(-x) (YBCO) sandwiched between layers of Si_3N_4 (SN). The silicon was etched out from under each YBCO meander line to form low-thermal-mass, thermally isolated microbolometers. These devices showed responsivities up to 60 kV/W with a 16 micro-A bias, and a noise equivalent power of 9x10^(-13) W/Hz^(1/2) at 7 Hz with a 5 micro-A bias (neglecting contact noise)...

Foote, M. C.↗

Maximal absorption in ultrathin TiN films for microbolometer applications

Ultrathin light absorbers present a viable route toward improving the specific detectivity and response time of microbolometers. However, for an ultrathin film to absorb light efficiently, the dielectric function of the film and its thickness must satisfy strict requirements. Here we experimentally demonstrate an average absorptance of 48% ± 2.5% in the 8–13 μm (769–1250 cm -1 ) spectral range for 10 nm thick titanium nitride (TiN), a value bordering on the 50% fundamental absorptance limit for a suspended thin film. The heat capacity per unit area of this absorber is only 1.2 × 10 -6 J/K/cm 2 , which is beneficial for improving the response time of a microfabricated bolometer. We also show that a sufficient condition for reaching maximal absorption in an ultrathin film is that ε" $\gg$ |ε'|.

36 MATERIALS SCIENCE↗

Electrical and infrared properties of thin niobium microbolometers near T(sub c)

Niobium microbolometers approximately 1 micron wide x 2 micron long x 10 nm thick have been integrated at the feeds of equiangular spiral antennas made of 200 nm thick Nb. The device's current-voltage characteristics and infrared responsivity as a function of DC bias voltage were measured over a range of temperature spanning approximately plus or minus 2 percent around T(sub c). The greatest voltage responsivity occurs well below T(sub c), in a regime where the I-V curve is significantly hysteretic due to self-heating and resembles the I-V curve of a superconducting microbridge.

Grossman, E. N.↗

The Economical Microbolometer-Based Environmental Radiometer Satellite (EMBERSAT) Designed for Forest Fire Detection and Monitoring

Thermal infrared imagery from several satellite instruments, such as the NOAA AVHRR and the NASA MODIS, is presently used to detect and map forest fires. But while these radiometers can identify fires they are designed and optimized for cloud detection, providing relatively low spatial resolution and quickly saturating even for small fires. Efforts to detect and monitor forest fires from space would benefit from the development of single-sensor satellites designed specifically for this purpose. With the advent of uncooled thermal detectors, and thus the absence of aggressive cooling, the possibility of developing small satellites for the purpose of fire detection and monitoring becomes practical and cost-effective. Thus is the case with the Economical Microbolometer Based Environmental Radiometer Satellite (EMBERSat) program. The objective of this program is to develop a single, prototype satellite that will provide multiband thermal imagery with a spatial resolution of 250m and a dynamic range of 300-1000K. The thermal imaging payload has flight heritage in the Infrared Spectral Imaging Radiometer that flew aboard mission STS-85 and the spacecraft is a variant of the SimpleSat bus launched from the shuttle Columbia as part of STS-109. The EMBERSat program is a technology demonstration initiative with the eventual goal of providing high-resolution thermal imagery to both the scientific community and the public.

Lancaster, Redgie S.↗

The Economical Microbolometer-Based Environmental Radiometer Satellite (EMBERSat) Designed for Forest Fire Detection and Monitoring

Thermal infrared imagery from several satellite instruments, such as the NOAA AVHRR and the NASA MODIS, is presently used to detect and map forest fires. But while these radiometers can identify fires they are designed and optimized for cloud detection, providing relatively low spatial resolution and quickly saturating even for small fires. Efforts to detect and monitor forest fires from space would benefit from the development of single-sensor satellites designed specifically for this purpose. With the advent of uncooled thermal detectors, and thus the absence of aggressive cooling, the possibility of developing small satellites for the purpose of fire detection and monitoring becomes practical and cost-effective. Thus is the case with the Economical Microbolometer Based Environmental Radiometer Satellite (EMBERSat) program. The objective of this program is to develop a single, prototype satellite that will provide multiband thermal imagery with a spatial resolution of 250m and a dynamic range of 300-1000K. The thermal imaging payload has flight heritage in the Infrared Spectral Imaging Radiometer that flew aboard mission STS-85 and the spacecraft is a variant of the SimpleSat bus launched from the shuttle Columbia as part of STS-105. The EMBERSat program is a technology demonstration initiative with the eventual goal of providing high-resolution thermal imagery to both the scientific community and the public.

Lancaster, Redgie S.↗

Transition Edge YBa(sub 2)Cu(sub 3)O(sub 7-x) Microbolometers for Infrared Staring Arrays

High-temperature superconducting staring arrays are potentially important for both space and terrestrial applications which require the combination of high sensitivity over a broad wavelength range and relatively high temperature operation. In many such array applications sensitivity is more important than speed of response. Thus, it is desirable to design low-thermal-mass pixels that are thermally isolated from the substrate. To this end, Johnson, et al. at Honeywell have fabricated meander lines of YBCO sandwiched between layers of silicon nitride on silicon substrates. The silicon was etched out from under each YBCO meander line to form low-thermal-mass, thermally isolated microbolometers.

infrared staring arrays↗

The Effect of a Pre-Lens Aperture on the Temperature Range and Image Uniformity of Microbolometer Infrared Cameras

This paper explores the temperature range extension of long-wavelength infrared (LWIR) cameras by placing an aperture in front of the lens. An aperture smaller than the lens will reduce the radiance to the sensor, allowing the camera to image targets much hotter than typically allowable. These higher temperatures were accurately determined after developing a correction factor which was applied to the built-in temperature calibration. The relationship between aperture diameter and temperature range is linear. The effect of pre-lens apertures on the image uniformity is a form of anti-vignetting, meaning the corners appear brighter (hotter) than the rest of the image. An example of using this technique to measure temperatures of high melting point polymers during 3D printing provide valuable information of the time required for the weld-line temperature to fall below the glass transition temperature.

3D Printing↗

Potential for reactive pulsed-dc magnetron sputtering of nanocomposite VO{sub x} microbolometer thin films

Vanadium oxide (VO{sub x}) thin films were deposited by reactive pulsed-dc sputtering a metallic vanadium target in argon/oxygen mixtures with substrate bias. Hysteretic oxidation of the vanadium target surface was assessed by measuring the average cathode current during deposition. Nonuniform oxidization of the target surface was analyzed by Raman spectroscopy. The VO{sub x} film deposition rate, resistivity, and temperature coefficient of resistance were correlated to oxygen to argon ratio, processing pressure, target-to-substrate distance, and oxygen inlet positions. To deposit VO{sub x} in the resistivity range of 0.1–10 Ω-cm with good uniformity and process control, lower processing pressure, larger target-to-substrate distance, and oxygen inlet near the substrate are useful.

36 MATERIALS SCIENCE↗

Superconducting terahertz mixer using a transition-edge microbolometer

We present a new device concept for a mixer element for THz frequencies. This uses a superconducting transition-edge microbridge biased at the center of its superconducting transition near 4.2 K. It is fed from an antenna or waveguide structure. Power from a local oscillator and an RF signal produce a temperature and resulting resistance variation at the difference frequency. The new aspect is the use of a very short bridge in which rapid (less than 0.1 ns) outdiffusion of hot electrons occurs. This gives large intermediate frequency (IF) response. The mixer offers about 4 GHz IF bandwidth, about 80 ohm RF resistive impedance, good match to the IF amplifier, and requires only 1-20 nW of local oscillator power. The upper RF frequency is determined by antenna or waveguide properties. Predicted mixer conversion efficiency is 1/8, and predicted double-sideband receiver noise temperatures are 260 and 90 K for transition widths of 0.1 and 0.5 Tc, respectively.

Prober, D. E.↗