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At least 19 records

In situ process diagnostics of silane plasma for device-quality a-Si:H deposition

Coherent anti-Stokes Raman spectroscopy (CARS) and mass spectrometry (MS) have been applied to in situ process diagnostics of a silane plasma for device-quality a-Si:H film deposition. Silane depletion was directly measured by CARS and is linearly dependent on RF power in the region of 4-12 W with a slope of 0.5 percent/mW-sq cm. The depletion is also dependent on SiH4 flow rate starting with a 50 percent depletion at a low flow rate of 5.6 sccm and asymptotically approaching an 8 percent depletion at a flow rate of 80 sccm. The mass spectral line signal intensity of disilane increases with RF power and shows an apparent transition at 6 W. Disilane formation in silane plasma, film deposition rate, and silane depletion ratio as a function of the RF power indicate that the film growth mechanism in the low-power region of 3.5-6.5 W is substantially different from that in the high-power region of 6.5-12 W.

Shing, Y. H.

Plasma Diagnostics by Antenna Impedance Measurements

The impedance of an electrically short antenna immersed in a plasma provides an excellent in situ diagnostic tool for electron density and other plasma parameters. By electrically short we mean that the wavelength of the free-space electromagnetic wave that would be excited at the driving frequency is much longer than the physical size of the antenna. Probes using this impedance technique have had a long history with sounding rockets and satellites, stretching back to the early 1960s. This active technique could provide information on composition and temperature of plasmas for comet or planetary missions. Advantages of the impedance probe technique are discussed and two classes of instruments built and flown by SDL-USU for determining electron density (the capacitance and plasma frequency probes) are described.

Swenson, C. M.

The shuttle glow: A program to study the ram-induced phenomena

In January 1984, a proposal was submitted to NASA Headquarters entitled The Shuttle Glow: A Program to Determine the Physics of the Ram induced Phenomena. This proposal included the following elements in a shuttlebased experiment: (1) The use of a special flat generating surface 1 x 3 m on which the glow can be produced and observed. This surface will be maneuvered to vary the orientation of ram flow and of projected component of geomagnetic field. (2) Remotely mounted optical instruments to view the glowing layer on the plate. By scanning, the variation of radiance as a function of wavelength and standoff distance from the plate will be observed looking parallel to the plate. (3) The preferred location of the generating plate and in situ diagnostics is on the end of the Remote Manipulator System (RMS) arm.

Anderson, H. R.

Thermal processing of omicron-terphenyl - A Raman study

Raman spectra from omicron-terphenyl sealed in glass capillary tubes were acquired over temperatures ranging from 233 to 343 K. Over this temperature range, omicron-terphenyl can exist in the solid-crystalline, molten, supercooled-liquid, and amorphous-glassy states. Representative structure-sensitive spectra are presented along with a qualitative description. The lattice spectral feature occurring at a Raman shift of 123/cm displays abrupt changes in profile and intensity as melting and glass transition occur. The intensity ratio of the C-C stretching 996/cm line and C-H stretching line at 1008/cm displays a change related to the transformation of the ordered-crystalline phase to the disordered-liquid or glassy state. At a Raman shift of 1162/cm the solid-crystalline state shows a splitting due to the effect of the crystal field. The possibility of using these structure-sensitive Raman characteristics for in situ diagnostics during materials processing is discussed.

Biswas, A.

Diagnostics of silane and germane radio frequency plasmas by coherent anti-Stokes Raman spectroscopy

In situ plasma diagnostics using coherent anti-Stokes Raman spectroscopy have shown different dissociation characteristics for GeH4 and SiH4 in radio frequency (rf) plasma-enhanced chemical vapor deposition of amorphous silicon germanium alloy (a-SiGe:H) thin films. The GeH4 dissociation rate in rf plasmas is a factor of about 3 larger than that of SiH4. Plasma diagnostics have revealed that the hydrogen dilution of the SiH4 and GeH4 mixed plasma plays a critical role in suppressing the gas phase polymerization and enhancing the GeH4 dissociation.

Perry, Joseph W.

Amorphous silicon deposition diagnostics using coherent anti-Stokes Raman spectroscopy

This paper reports on an in situ silicon deposition process diagnostics, using CARS performed at state-of-the-art a-Si:H film deposition conditions in a reactor designed for a-Si:H solar cell fabrication. The diagnostics procedure measures the silane depletion in an RF plasma as a function of the silane flow rate (where the relationship is linear between 50-percent depletion, at a flow rate of 5.6 sccm, and about 8-percent depletion, at 80 sccm) and the RF power (where the silane depletion is linearly dependent on the RF power in the region of 4 to 12 W). The linear RF power dependence of the silane depletion is considered to be consistent with the mechanism of silane decomposition primarily by electron impact dissociations, while the flow rate dependence is interpreted in terms of the residence time of the SiH4 molecules in the glow discharge region, where an increase of the residence time at a low flow rate results in a high depletion ratio.

Shing, Y. H.

Low-frequency variability of sea level as related to the heat balance of global oceans

The TOPEX/POSEIDON mission will determine global changes of sea level with unprecedented accuracy. Our main objective is the use TOPEX/POSEIDON data, concurrent in situ ocean measurements, and other satellite observations to document and diagnose physical processes by which heat is exchanged with the atmosphere, stored in the ocean, or transported by ocean circulation. During the prelaunch period, our objectives are to advise the project on an improved method of retrieving sea level data and prepare for the application of TOPEX/POSEIDON data by developing a diagnostic model using in situ measurements and altimeter observations from Geosat and the European Remote Sensing satellite.

Liu, W. Timothy

Guided MHD waves as a coronal diagnostic tool

A description is provided of how fast magnetoacoustic waves are ducted along regions of low Alfven velocity (high density) in the corona, exhibiting a distinctive wave signature which may be used as a diagnostic probe of in situ coronal conditions (magnetic field strength, density inhomogeneity, etc.). Some observational knowledge of the start time of the impulsive wave source, possibly a flare, the start and end times of the generated wave event, and the frequency of the pulsations in that event permits a seismological deduction of the physical properties of the coronal medium in which the wave propagated. With good observations the theory offers a new means of probing the coronal atmosphere.

Roberts, B.

Electron cyclotron resonance deposition and plasma diagnostics of a-Si:H and a-C:H films

Amorphous silicon (a-Si:H) and amorphous carbon (a-C:H) films deposited by electron cyclotron resonance (ECR) microwave plasma-enhanced chemical vapor deposition are discussed. It is shown that the ECR microwave plasma deposition technique can produce a-Si:H films with material qualities similar to and with a deposition rate one order of magnitude higher than for films deposited by radio-frequency glow discharge. The ECR-deposited a-C:H films are characterized by fluorescence, IR, and Raman spectroscopy. In situ optical emission spectroscopy plasma diagnostics indicates that ECR plasmas have a strong emission at 434 nm, which indicates a higher chemical reactivity than radio-frequency glow discharge plasmas. The radio frequency bias to the substrate is found to play a critical role in determining the film structure and the carbon bonding configuration of ECR-deposited a-C:H films.

Shing, Y. H.

The POLAR code wake model - Comparison with in situ observations

Measurements made by the plasma diagnostics package during Spacelab 2 are discussed and compared with predictions made with the Air Force Geophysics Laboratory POLAR wake code. This code uses a complex geometric model of the orbiter and the self-similar solution of the expansion of a plasma into a vacuum as its model basis. Excellent qualitative and quantitative agreement is found at distances greater than about 30 m. At least to the first order, the model's approximations are justified.

Murphy, G.

SPEAR-1: An experiment to measure current collection in the ionosphere by high voltage biased conductors

An experiment is described in which a high electrical potential difference, up to 45 kV, was applied between deployed conducting spheres and a sounding rocket in the ionosphere. Measurements were made of the applied voltage and the resulting currents for each of 24 applications of different high potentials. In addition, diagnostic measurements of optical emissions in the vicinity of the spheres, energetic particle flow to the sounding rocket, dc electric field and wave data were made. The ambient plasma and neutral environments were measured by a Langmuir probe and a cold cathode neutral ionization gauge, respectively. The payload is described and examples of the measured current and voltage characteristics are presented. The characteristics of the measured currents are discussed in terms of the diagnostic measurements and the in-situ measurements of the vehicle environment. In general, it was found that the currents observed were at a level typical of magnetically limited currents from the ionospheric plasma for potentials less than 12 kV, and slightly higher for larger potentials. However, due to the failure to expose the plasma contactor, the vehicle sheath modified the sphere sheaths and made comparisons with the analytic models of Langmuir-Blodgett and Parker-Murphy less meaningful. Examples of localized enhancements of ambient gas density resulting from the operation of the attitude control system thrusters (cold nitrogen) were obtained. Current measurements and optical data indicated localized discharges due to enhanced gas density that reduced the vehicle-ionosphere impedance.

Raitt, W. John

Ionospheric aerodynamics and space simulation studies utilizing the Shuttle/Spacelab platform

A new philosophy for the second generation of in situ experiments in the area of plasma flows over bodies is discussed. A brief review of the present state of the theory and terrestrial laboratory and in situ studies is given, which points toward the need for further in situ investigations which utilize independently maneuverable test bodies and diagnostic instrument packages on board the Shuttle/Spacelab. The possibility of utilizing the Space Shuttle/Spacelab in the broader context of a general in situ plasma laboratory is considered, as well as the possibility of addressing questions of geo/astrophysical interest if the principle of qualitative scaling is used in conjunction with such a facility.

Samir, U.

Zero potential vorticity envelopes for the zonal-mean velocity of the Venus/Titan atmospheres

The diagnostic analysis of numerical simulations of the Venus/Titan wind regime reveals an overlooked constraint upon the latitudinal structure of their zonal-mean angular momentum. The numerical experiments, as well as the limited planetary observations, are approximately consistent with the hypothesis that within the latitudes bounded by the wind maxima the total Ertel potential vorticity associated with the zonal-mean motion is approximately well mixed with respect to the neutral equatorial value for a stable circulation. The implied latitudinal profile of angular momentum is of the form M equal to or less than M(sub e)(cos lambda)(exp 2/Ri), where lambda is the latitude and Ri the local Richardson number, generally intermediate between the two extremes of uniform angular momentum (Ri approaches infinity) and uniform angular velocity (Ri = 1). The full range of angular momentum profile variation appears to be realized within the observed meridional - vertical structure of the Venus atmosphere, at least crudely approaching the implied relationship between stratification and zonal velocity there. While not itself indicative of a particular eddy mechanism or specific to atmospheric superrotation, the zero potential vorticity (ZPV) constraint represents a limiting bound for the eddy - mean flow adjustment of a neutrally stable baroclinic circulation and may be usefully applied to the diagnostic analysis of future remote sounding and in situ measurements from planetary spacecraft.

Allison, Michael

Advances in laser technology for the atmospheric sciences; Proceedings of the Seminar, San Diego, Calif., August 25, 26, 1977

These papers deal with recent research, developments, and applications in laser and electrooptics technology, particularly with regard to atmospheric effects in imaging and propagation, laser instrumentation and measurements, and particle measurement. Specific topics include advanced imaging techniques, image resolution through atmospheric turbulence over the ocean, an efficient method for calculating transmittance profiles, a comparison of a corner-cube reflector and a plane mirror in folded-path and direct transmission through atmospheric turbulence, line-spread instrumentation for propagation measurements, scaling laws for thermal fluctuations in the layer adjacent to ocean waves, particle sizing by laser photography, and an optical Fourier transform analysis of satellite cloud imagery. Other papers discuss a subnanosecond photomultiplier tube for laser application, holography of solid propellant combustion, diagnostics of turbulence by holography, a camera for in situ photography of cloud particles from a hail research aircraft, and field testing of a long-path laser transmissometer designed for atmospheric visibility measurements.

Trolinger, J. D.

Meteorological context for fall experiments including distributions of water vapor, ozone, and carbon monoxide

Meteorological contexts for the NASA GTE/CITE 1 fall 1983 flight series are presented and discussed. The large-scale wind, cold cloud, and moisture patterns are illustrated by composite diagrams based on the National Oceanic and Atmospheric Administration 700-, 500-, and 250-mbar analyses and the GOES-West broadband and 6.7-micron (water vapor) infrared photographs. Detailed flight path diagrams are included for seven maritime flights and one continental flight in the free troposphere and boundary layer. For three flights from Hickam Field, in Honolulu, HI, to the Intertropical Convergence Zone, vertical profiles of temperature, dew/frost point departures, wind velocity, and ozone, and carbon monoxide mixing ratios are also presented and discussed. Excellent agreement is demonstrated between the in situ and remote measurements. In particular, the predictive and diagnostic value of the 6.7-micron water vapor photographs is demonstrated.

Danielsen, Edwin F.

Design of a self-diagnostic beam-mode piezoelectric accelerometer

A technique was developed for detecting in situ real-time soft failures in a beam-mode piezoelectric accelerometer. The new technique can be used to detect changes in the piezoelectric capacitance, the equivalent mechanical stiffness of the piezoelectric element and the surface mounting impedance, and the piezoelectric efficiency.

Flanagan, Patrick M.

Quantitative 3-D imaging topogrammetry for telemedicine applications

The technology to reliably transmit high-resolution visual imagery over short to medium distances in real time has led to the serious considerations of the use of telemedicine, telepresence, and telerobotics in the delivery of health care. These concepts may involve, and evolve toward: consultation from remote expert teaching centers; diagnosis; triage; real-time remote advice to the surgeon; and real-time remote surgical instrument manipulation (telerobotics with virtual reality). Further extrapolation leads to teledesign and telereplication of spare surgical parts through quantitative teleimaging of 3-D surfaces tied to CAD/CAM devices and an artificially intelligent archival data base of 'normal' shapes. The ability to generate 'topogrames' or 3-D surface numerical tables of coordinate values capable of creating computer-generated virtual holographic-like displays, machine part replication, and statistical diagnostic shape assessment is critical to the progression of telemedicine. Any virtual reality simulation will remain in 'video-game' realm until realistic dimensional and spatial relational inputs from real measurements in vivo during surgeries are added to an ever-growing statistical data archive. The challenges of managing and interpreting this 3-D data base, which would include radiographic and surface quantitative data, are considerable. As technology drives toward dynamic and continuous 3-D surface measurements, presenting millions of X, Y, Z data points per second of flexing, stretching, moving human organs, the knowledge base and interpretive capabilities of 'brilliant robots' to work as a surgeon's tireless assistants becomes imaginable. The brilliant robot would 'see' what the surgeon sees--and more, for the robot could quantify its 3-D sensing and would 'see' in a wider spectral range than humans, and could zoom its 'eyes' from the macro world to long-distance microscopy. Unerring robot hands could rapidly perform machine-aided suturing with precision micro-sewing machines, splice neural connections with laser welds, micro-bore through constricted vessels, and computer combine ultrasound, microradiography, and 3-D mini-borescopes to quickly assess and trace vascular problems in situ. The spatial relationships between organs, robotic arms, and end-effector diagnostic, manipulative, and surgical instruments would be constantly monitored by the robot 'brain' using inputs from its multiple 3-D quantitative 'eyes' remote sensing, as well as by contact and proximity force measuring devices. Methods to create accurate and quantitative 3-D topograms at continuous video data rates are described.

Altschuler, Bruce R.

In situ stratospheric ozone measurements by long path UV absorption - Developments and interpretation

A high-sensitivity, in situ UV absorption ozone sensor has been developed for use in the stratosphere. The instrument couples 254-nm radiation from a low-pressure mercury discharge lamp into a 40-pass White cell to attain a high-sensitivity ozone absorption measurement. Preflight/postflight laboratory tests utilizing an ozone source coupled to a laboratory UV ozone photometer in a fast-flow system as well as in-flight diagnostics verify the successful operation of the instrument. Evidence is presented to verify that in situ UV absorption ozone photometers can measure stratospheric ozone with better than 3 percent precision and 5 percent accuracy, provided proper attention is given to both the thermal field surrounding the gondola and the ambient pressure measurements. Ozone data are compared with modeled profiles in the 28- to 40-km region. An assessment of the disagreement between observations and modeled profiles is given along with suggestions for future experiments designed to constrain photochemical models.

Weinstock, E. M.