SEARCH · Engineering Papers

Results for “effective sensitivity”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

SourceResearch connectionFrom yearThrough year

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 19 records

All sources NASA NTRS DOE OSTI

DOE OSTI2026

ICRF near-field effects sensitivity to magnetic tilt-angle

This paper complements the study reported in G. Urbanczyk et al 2025 Nucl. Fusion 65 046018 by investigating how near-field effects from Ion Cyclotron Range of Frequency (ICRF) antennas depend on the magnetic geometry, particularly focusing on the sensitivity of rectified sheath potentials and associated impurity production to variations in magnetic field tilt-angle. Simulations were conducted using Petra-M, employing a flat model of the ASDEX Upgrade (AUG) three-strap antenna, and COMSOL, utilizing a curved model of the WEST antenna. Results demonstrate indications of sensitivity of the rectified sheath potentials and impurity sputtering to the alignment of Faraday screen bars with the magnetic field lines, emphasizing the necessity for careful consideration of geometric alignment in antenna design for fusion devices. This trend is consistent with experimental data measured with various diagnostics.

Urbanczyk, Guillaume [Universite de Lorraine, Nanc↗

DOE OSTI2025

The role of specimen size and grain boundary characteristics in the yield strength of tungsten in microtensile tests

To effectively use the measured properties from small-scale tensile tests for bulk material performance predictions, it is essential to understand the threshold of specimen size-effect strengthening and the interaction between dislocations and microstructures within miniaturized specimens. This study uses pure tungsten to investigate the size effect in terms of specimen size, grain size, and grain boundary characteristics relative to the yield strength of tungsten at room temperature. We evaluate the transition from miniaturized specimen properties to bulk properties and the deformation behavior through small-scale tensile tests of three specimen sizes (large: 80 × 100 × 233 µm³; medium: 7 × 7 × 18 µm³; and small: 2 × 2 × 5 µm³). The testing results reveal that the small and medium specimens exhibit high yield strength with ductile behavior, while the large specimens exhibit brittle failure, consistent with the room temperature strength of tungsten, indicating bulk behavior. We further explore the specimen size-effect sensitivity to yield stress and the scaling relationship between yield strength and the number of grains involved in the deformation. A power-law relationship with the exponent value of approximately -0.5 was found in the yield strength–grain number scaling, implying the Hall-Petch like behavior. A minimum of 7–17 effective grain boundaries across the tensile gauge dimension is required to accurately measure bulk properties.

36 - MATERIALS SCIENCE↗

DOE OSTI2024

Significance of radiative corrections on measurements of the EMC effect

Deep inelastic scattering (DIS) from nuclear targets probes the parton distribution functions (PDFs) in nuclei. Comparisons of the PDFs from heavy nuclei and the deuteron show deviations that demonstrate a non-trivial nuclear dependence to these distributions, referred to as the EMC effect. A global analysis of the worlds data on the EMC effect reveals tensions between different extractions. Precise measurements at Jefferson Lab, studying the dependence on both the quark momentum fraction, x, and nuclear mass, show systematic discrepancies among experiments, making the extraction of the A dependence of the EMC effect sensitive to the selection of datasets. Further, by comparing various methods and assumptions used to calculate radiative corrections, we have identified differences that, while not large, significantly impact the EMC ratios and show that using a consistent radiative correction procedure resolves this discrepancy, leading to a more coherent global picture, and allowing for a more robust extraction of the EMC effect for infinite nuclear matter.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗

DOE OSTI2025

Efficient use of quantum computers for collider physics

Most observables at particle colliders involve physics at a wide variety of distance scales. Due to asymptotic freedom of the strong interaction, the physics at short distances can be calculated reliably using perturbative techniques, while long distance physics is non-perturbative in nature. Factorization theorems separate the contributions from different scales, allowing to identify the pieces that can be determined perturbatively from those that require non-perturbative information, and if the non-perturbative pieces can be reliably determined, one can use experimental measurements to extract the short distance effects, sensitive to possible new physics. Without the ability to compute the non-perturbative ingredients from first principles one typically identifies observables for which the non-perturbative information is universal in the sense that it can be extracted from some experimental observables and then used to predict other observables. In this paper we argue that the future ability to use quantum computers to calculate non-perturbative matrix elements from first principles will allow to make predictions for observables with non-universal non-perturbative long-distance physics.

Algorithms and Theoretical Developments↗

DOE OSTI2025

Enhancing charge ratio sensitivity to hadronization effects via jet selections on resolved SoftDrop splitting

The study of quantum chromodynamics (QCD) at ultrarelativistic energies can be performed in a controlled environment through lepton-hadron deep inelastic scatterings. In such collisions, the high-energy partonic emissions that follow from the ejected hard partons are accurately described by perturbative QCD. However, the lower energy scales at which quarks and gluons experience color confinement, i.e., hadronization mechanism, fall outside the validity regions for perturbative calculations, requiring phenomenological models tuned to data to describe it. As such, hadronization physics cannot be currently derived from first principles alone. Monte Carlo event generators are useful tools to describe these processes as they simulate both the perturbative and the nonperturbative interactions, with model-dependent energy scales that control parton dynamics. This work employs jets—experimental reconstructions of final-state particles likely to have a common partonic origin—to inspect this transition further. Although originally proposed to circumvent hadronization effects, we show that jets can be utilized as probes of nonperturbative phenomena via their substructure. The charge correlation ratio was recently shown to be sensitive to hadronization effects. Our work further improves this sensitivity to nonperturbative scales by introducing a new selection based on the relative placement of the within the clustering tree, defined as the unclustering that resolves the jet’s leading charged particles. Published by the American Physical Society 2025

Apolinário, Liliana (ORCID:0000000335009681)↗

DOE OSTI2025

Visible-light H 2 evolution using dye-sensitized TiO 2 : effects of physicochemical properties of TiO 2 on excited carrier dynamics and activity

Dye-sensitized photocatalysts have emerged as promising materials for solar-driven water splitting due to their ability to utilize visible light, in contrast to conventional wide-band-gap semiconductors. However, the relationship between semiconductor properties and charge carrier dynamics remains insufficiently understood. In this study, we investigated Pt/TiO 2 systems sensitized with a visible-light-absorbing Ru(II) polypyridyl complex (RuP), focusing on how the crystal phase and specific surface area of TiO 2 influence excited carrier dynamics and H 2 evolution activity. To isolate the effects of TiO 2 properties, Pt and RuP loadings were standardized across samples. Emission lifetime analysis showed similarly efficient electron injection from RuP to TiO 2 in all cases, suggesting that injection efficiency does not account for observed differences in activity. Transient absorption measurements revealed that back electron transfer (BET) rates depended strongly on the TiO 2 phase, with anatase and P25 exhibiting slower BET and higher activity for H 2 evolution than rutile. The highest apparent quantum yield for H 2 evolution was 12.0% at 450 nm. Among anatase samples, larger surface areas correlated with higher activity, while smaller-area samples exhibited slower BET rates but still low H 2 evolution activity, implying a role for RuP dye–dye interactions in performance loss. This was further supported by improvements in H 2 evolution activity by lowering RuP loading or adding co-adsorbents. Overall, these results demonstrate that both BET suppression and control over RuP dye aggregation are essential for designing efficient dye-sensitized photocatalytic systems.

Harada, Kakeru [Institute of Science Tokyo (Japan)↗

DOE OSTI2026

Strong Sensitivity of Simulated Biomass Burning Aerosol Transport and Radiative Effects Over the South Atlantic to Carbonaceous Aerosol Aging and Particle Density

Biomass burning aerosol (BBA) impacts climate through aerosol‐cloud‐radiation interactions, but models disagree on the sign and magnitude of BBA radiative effects. We quantify the sensitivity of BBA radiative effects and transport to three BBA‐relevant processes and properties: parameterized oxidative aging of organic aerosol (OA), a combined change to black carbon (BC) density and the method for calculating aerosol refractive index, and reduction in OA density. We evaluate Unified Model simulations against two aircraft campaigns from summer 2017 over the Southeast Atlantic. The model generally performs well, such that discrepancies between the observational data sets may sometimes limit the precision of the evaluation. Our newly developed aging parameterization reproduces observed OA:BC mass ratios well and allows modeled OA:BC to decrease with smoke age, but increases bias in aerosol extinction and changes the BBA radiative effect little (+0.12 W m -2 ). We calculate aerosol refractive index using either a volume‐weighted component average or the Maxwell‐Garnett (MG) mixing assumption, which represents BC as small inclusions in a host material. Compared to MG mixing, the volume‐weighted average refractive index and reduced BC density increase aerosol absorption, substantially increasing the total BBA radiative effect (+2.66 W m -2 ) and amount of BBA transported across the ocean through BC self‐lofting. Reducing OA density to better match literature values changes the total BBA radiative effect by −1.96 W m -2 . Changes to direct radiative effects exceed changes to cloud radiative effects. Our findings emphasize the sensitivity of aerosol radiative effects and transport to these processes and properties, which we suggest could be improved in climate models.

Southeast Atlantic↗

DOE OSTI2024

Dependence of tropical cyclone seeds and climate sensitivity on tropical cloud response

Projections of future tropical cyclone frequency are uncertain, ranging from a slight increase to a considerable decrease according to climate models. Estimation of how much the Earth’s surface temperature warms in response to greenhouse gas increase, quantified by effective climate sensitivity, is also uncertain. These two uncertainties have historically been studied independently as they concern different scales: One quantifies the extreme weather and the other the mean climate. Here, we show that these two uncertainties are not independent and are both influenced by the response of tropical clouds to warming. Across climate models, we show an anticorrelation between shortwave cloud radiative feedback and changes in the frequency of seed vortices, a prevalent type of tropical cyclone precursors. We further show an anticorrelation between effective climate sensitivity and tropical cyclone frequency changes, suggesting that global tropical cyclone frequency tends to decrease more substantially in models with larger temperature increase.

Science & Technology - Other Topics↗

DOE OSTI2026

Enhancing X-ray Sensitivity via the Antenna Effect in Quantum Shells with Multiexciton Emission

Quantum shells (QSs) with efficient multiexciton emission can generate multiple excitons per particle under high-energy excitation, thereby improving exciton utilization under intense X-ray exposure and offering strong potential for X-ray-based scintillation applications. However, these QSs are typically composed of low-atomic-number (Z) elements, which substantially limits their X-ray absorption efficiency and leads to poor X-ray sensitivity. Here, we overcome this fundamental limitation by introducing a high-Z antenna-sensitization strategy that couples QSs to heavy-element molecular absorbers, which act as X-ray harvesting centers and funnel energy into the QSs via efficient interfacial transfer. By combining enhanced X-ray absorption with efficient interfacial energy transfer and improved exciton utilization, we achieve more than an order-of-magnitude increase in multiexciton-driven QS radioluminescence (RL) relative to pristine shells. Additionally, a high X-ray imaging resolution of 25.2 lp mm –1 was achieved, exceeding the performance of most previously reported X-ray imaging scintillators. These findings offer a promising design strategy for advancing QS-based materials toward high-performance X-ray imaging applications.

antenna effect↗

DOE OSTI2025

Coupled Climate Simulations With E3SM‐MMF

Simulations of the recent historical period from 1950 to 2014 are conducted with E3SM‐MMF, which uses an embedded 2D cloud resolving model that runs efficiently on GPUs in place of traditional parameterizations for cloud and turbulence. Analysis of the climate and variability reveal several aspects where E3SM‐MMF produces smaller biases compared to E3SMv2, including better agreement with the observed evolution of global mean surface temperature, although the representation of ENSO is too weak and fast. Three idealized abrupt CO 2 experiments were also conducted to assess climate sensitivity and feedbacks. These yield three estimates of effective climate sensitivity (4.38, 5.21, and 6.06 K), with a corresponding spread in the shortwave cloud feedbacks. These estimates are on the higher end of sensitivity estimates from CMIP ensembles, and the spread indicates substantial state‐dependent feedbacks. These results demonstrate how multiscale modeling framework (MMF) models can be used for climate relevant experiments and projections by leveraging modern GPU enabled computational platforms. The unique qualities of E3SM‐MMF shown in previous literature are largely still present, but various instances of reduced biases suggest that MMF models have utility in improving future projections.

E3SM↗

DOE OSTI2025

Streamflow Response to Glacier Mass Loss Varies With Basin Precipitation Across Alaska

Abstract Diminishing glaciers affect streamflow, and given the extent of glaciers in Alaska and adjacent Canada, continued glacier mass loss is likely to have profound effects on ecosystems sensitive to runoff. The effects of glacier mass loss on streamflow are likely to vary across the wide ranges of basin size, glacier cover, and precipitation in this region. In this study, we use U.S. Geological Survey (USGS) streamflow data with satellite‐based glacier volume change estimates to quantify how glacier mass loss subsidized streamflow over the 2000–2019 period for 116 glacierized basins. We examine interannual variability in that subsidy at three USGS‐monitored glaciers to explore the ability of the subsidy to buffer streamflow derived solely from precipitation. We found the relative importance of percent glacier cover on streamflow magnitude increases in drier basins. In the driest basins, glaciers produced 40 times greater percent glacier mass loss subsidies to streamflow for the percent glacier cover compared to the wettest basins. While the subsidy from glacier mass loss buffers interannual variability in streamflow to varying degrees, it can also increase streamflow variability. Smaller amounts of percent glacier cover are needed to produce summer‐melt‐dominated seasonal flow regimes in drier basins than in wetter basins. Decreasing glacier cover will eventually decrease summer streamflow, increasing spring streamflow in drier basins, and attenuating seasonality with increasing spring and autumnal streamflow in wetter basins. Quantifying the downstream effects of continued glacier mass loss without the computational expense of a hydrological model is broadly applicable in this changing climate.

Curran, Janet H. [U.S. Geological Survey Alaska Sc↗

DOE OSTI2026

Measurement of the azimuthal anisotropy of charged particles in sNN=5.36TeV O16+O16 and Ne20+Ne20 collisions with the ATLAS detector

This paper presents the first measurements of the azimuthal anisotropy coefficients , which quantify the -order Fourier modulation of charged-particle azimuthal distributions, for in and collisions recorded with the ATLAS detector at the CERN Large Hadron Collider in 2025. The coefficients are measured as a function of transverse momentum ( ), collision centrality, and event multiplicity. They are extracted using two complementary methods: two-particle correlations with a template-fit subtraction of short-range nonflow contributions, and four-particle subevent cumulants, which intrinsically suppress nonflow effects and provide sensitivity to flow fluctuations. The results show a clear hierarchy and a nonmonotonic dependence on , reaching a maximum around , consistent with trends observed in heavy-ion collisions. Detailed comparisons between the two collision systems reveal an enhanced in central collisions, consistent with theory expectations based on the predicted prolate deformation of neon nuclei, in contrast to the slightly tetrahedral structure predicted for oxygen. The four-particle cumulant results highlight strong event-by-event fluctuations and provide the greatest sensitivity to nuclear shape effects. These measurements can place new constraints on the initial geometry and the hydrodynamic response in light-ion collisions, offering valuable input for models of nuclear structure.

Aad, G↗

DOE OSTI2025

Measurement of the azimuthal anisotropy of charged particles in $\sqrt{s_{\mathrm{NN}}}=5.36$ TeV $^{16}$O$+^{16}$O and $^{20}$Ne$+^{20}$Ne collisions with the ATLAS detector

This paper presents the first measurements of the azimuthal anisotropy coefficients $v_{n}$, which quantify the $n^{\mathrm{th}}$-order Fourier modulation of charged-particle azimuthal distributions, for $n=2$-4 in $\sqrt{s_{\mathrm{NN}}}=5.36$ TeV $\mathrm{^{16}O}+\mathrm{^{16}O}$ and $\mathrm{^{20}Ne}+\mathrm{^{20}Ne}$ collisions recorded with the ATLAS detector at the Large Hadron Collider in 2025. The $v_{n}$ coefficients are measured as a function of transverse momentum ($p_{\mathrm{T}}$), collision centrality, and event multiplicity. They are extracted using two complementary methods: two-particle correlations with a template-fit subtraction of short-range non-flow contributions, and four-particle subevent cumulants, which intrinsically suppress non-flow effects and provide sensitivity to flow fluctuations. The results show a clear hierarchy $v_{2} > v_{3} > v_{4}$ and a non-monotonic dependence on $p_{\mathrm{T}}$, reaching a maximum around 2 GeV, consistent with trends observed in heavy-ion collisions. Detailed comparisons between the two collision systems reveal an enhanced $v_{2}$ in central $\mathrm{^{20}Ne}+\mathrm{^{20}Ne}$ collisions, consistent with theory expectations based on the predicted prolate deformation of neon nuclei, in contrast to the slightly tetrahedral structure predicted for oxygen. The four-particle cumulant results highlight strong event-by-event fluctuations and provide the greatest sensitivity to nuclear shape effects. These measurements can place new constraints on the initial geometry and the hydrodynamic response in light-ion collisions, offering valuable input for models of nuclear structure.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗

DOE OSTI2025

Description of di-hadron saturation signals within a universal nuclear parton distribution function approach

Di-hadron and di-jet correlation measurements in proton-nucleus (𝑝+𝐴) and electron-nucleus collisions are widely motivated as sensitive probes of novel, nonlinear quantum chromodynamices saturation dynamics in hadrons, which are particularly accessible in the dense nuclear environment at low values of Bjorken-𝑥 (𝑥 A ). Current measurements at the BNL Relativistic Heavy Ion Collider (RHIC) and the CERN Large Hadron Collider (LHC) observe a significant suppression in the per-trigger yield at forward rapidities compared to that in proton-proton collisions, nominally consistent with the “mono-jet” production expected in a saturation scenario. However, the width of the azimuthal correlation remains unmodified, in contradiction to the qualitative expectations from this physics picture. I investigate whether the construction of these observables leaves them sensitive to effects from simple nuclear shadowing as captured by, for example, universal nuclear parton distribution function (nPDF) analyses. I find that modern nPDF sets, informed by recent precision measurements sensitive to the shadowing of low-𝑥 A gluon densities in LHC and other data, can describe all or the majority of the di-hadron/jet suppression effects in 𝑝+𝐴 data at both RHIC and the LHC, while giving a natural explanation for why the azimuthal correlation width is unmodified. Notably, this is achieved via a (𝑥 A ,𝑄 2 )-differential suppression of overall cross sections only, without requiring additional physics dynamics which alter the interevent correlations.

Jets & heavy flavor physics↗

DOE OSTI2025

A Measurement of Atmospheric Circular Polarization with POLARBEAR

At millimeter wavelengths, the atmospheric emission is circularly polarized owing to the Zeeman splitting of molecular oxygen by the Earth's magnetic field. We report a measurement of the signal in the 150 GHz band using 3 yr of observational data with the POLARBEAR project. Nonidealities of a continuously rotating half-wave plate (HWP) partially convert circularly polarized light to linearly polarized light. While POLARBEAR detectors are sensitive to linear polarization, this effect makes them sensitive to circular polarization. Although this was not the intended use, we utilized this conversion to measure circular polarization. We reconstruct the azimuthal gradient of the circular polarization signal and measure its dependency from the scanning direction and the detector bandpass. We compare the signal with a simulation based on atmospheric emission theory, the detector bandpass, and the HWP leakage spectrum model. We find the ratio of the observed azimuthal slope to the simulated slope is 0.92 ± 0.01(stat) ± 0.07(sys). This ratio corresponds to a brightness temperature of 3.8 mK at the effective band center of 121.8 GHz and bandwidth of 3.5 GHz estimated from representative detector bandpass and the spectrum of Zeeman emission. This result validates our understanding of the instrument and reinforces the feasibility of measuring the circular polarization using the imperfection of continuously rotating HWP. Continuously rotating HWP is popular in ongoing and future cosmic microwave background experiments to modulate the polarized signal. This work shows a method for signal extraction and leakage subtraction that can help measure circular polarization in such experiments.

79 ASTRONOMY AND ASTROPHYSICS↗

DOE OSTI2024

The Role of Nonequilibrium Solvent Effects in Enhancing Direct CO 2 Capture at the Air–Aqueous Amino Acid Interface

Direct air capture (DAC) technologies are limited by the poor understanding of the dynamic role of interfaces in modulating the chemisorption of CO 2 from air into solutions. While the reactivity of aqueous amine-based solvents in the bulk environment is strongly inhibited by nonequilibrium solvent effects, promoting DAC at interfaces posits a possibility to reduce the coupling with the solvent and significantly accelerate DAC. Building on an experimentally proven concept to bring an anionic glycine absorbent to the interface through ion-pairing interactions with a positively charged surfactant, we establish the fundamental time scales for key elementary steps involved in DAC with rate theory and enhanced-sampling ab initio molecular dynamics simulations. Here, we elucidate the mechanism by which water influences the free energy barriers and dynamical crossing-recrossing of those barriers, affecting the reaction rates. We find that water reorganizes to partially dehydrate [-NH 2 ], facilitating S N 2-based CO 2 conversion to a zwitterion, which then releases a proton via overhydration of [-NH 2 ]. The low-density interfacial water favors dehydration over overhydration, leading to a comparatively higher barrier (slower kinetics) for proton release. The barrier-recrossing events neutralize this effect, letting both steps occur at the same time scale (sub-microseconds) and making the overall DAC process faster at the interface than in the bulk water. Such an understanding of environment-sensitive solvent effects on the reaction kinetics will help design tailored interfaces for enhanced CO 2 capture kinetics via control of solvation and ion paring.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

DOE OSTI2025

Near-IR Luminescence Tuning in a Series of Chalcogenophene Carboxylate-Decorated Neodymium Dimers

Here, the solvothermal synthesis of a series of Nd dimers decorated with various chalcogenophene carboxylates and 2,2':6',2"-terpyridine of the general formula, [Nd 2 (µ-XC 5 H 3 O 2 ) 2 (XC 5 H 3 O 2 ) 4 (N 3 C 15 H 11 ) 2 (H 2 O) 2 ] where X = O, S, Se, and Te, is reported. The solid-state structures were characterized using single-crystal X-ray diffraction (scXRD) and all the complexes are isomorphous, despite substitution of the heterocyclic chalcogen; phase purity was confirmed via powder X-ray diffraction (pXRD). Vibrational spectroscopy was collected and correlations between chalcogen identity and the binding strength of the carboxylate groups of the chalcogenophene ligands with each metal center were shown to be independent of chalcogen identity. All four complexes displayed Nd(III)-based near-IR luminescence and exhibited ligand-sensitized emission. Varying the chalcogenophene chromophore enabled tuning of the sensitizing triplet state energy level, as evidenced by an 8-fold increase in the sensitization of the TeCA-decorated dimer relative to the other chalcogenophene congeners. This behavior was rationalized by comparing the Nd(III) acceptor and ligand donor states across the series. The donor triplet state of each ligand was estimated via low-temperature (77 K) phosphorescence measurements from 1:1 mixtures with Gd(III); these were found to be 24,631 cm –1 for furan-2-carboxylic acid (FCA), 23,764 cm –1 for thiophene-2-carboxylic acid (TCA), 22,548 cm –1 for selenophene-2-carboxylic acid (SeCA), and 21,186 cm –1 for tellurophene-2-carboxylic acid (TeCA). The greater sensitization efficiency of TeCA is the result of well-matched ligand donor and metal acceptor levels and thus suppression of nonradiative back-energy transfer. More broadly, triplet energy level information for these ligands serves as a guide for future application to other target metals based on the electronic properties necessary to effect efficient sensitization.

Coordination Chemistry↗

DOE OSTI2026

Recent efforts of vapour-phase strategies for EUV resist toward high- and hyper-NA extreme ultraviolet lithography

Extreme ultraviolet lithography (EUVL, λ = 13.5 nm) is critical for sub-1 nm technology nodes but remains constrained by inherent trade-offs among resolution, line-edge roughness (LER), and sensitivity. Stochastic effects originating from photon shot noise, low-energy secondary electron blur, and the random distribution of resist components further limit its advancement toward high numerical-aperture (NA, NA = 0.55) and hyper-NA (NA ≥0.75) EUVL. While the optimization of spin-on chemically amplified resists (CARs) continues, metal-oxide resists (MORs) have emerged as strong candidates for next-generation EUVL by incorporating metals with high EUV absorption coefficients, which enhances both resist sensitivity and etch resistance during pattern transfer. Besides spin-coating, recent advances in vapour-phase techniques, such as vapour-phase infiltration (VPI), chemical vapour deposition (CVD), and molecular atomic layer deposition (MALD), offer promising pathways to achieve new resist platforms, such as dry resists, that satisfy the stringent thickness and uniformity requirements of next-generation EUVL. These methods enable the direct incorporation of metal species into existing resist matrices or the formation of hybrid inorganic–organic resist platforms, thereby improving film uniformity, etch durability, and pattern fidelity while mitigating stochastic defects. This review highlights the latest advancements in vapour-phase-synthesized EUV resists, emphasizing material design, lithographic performance, and the underlying exposure mechanisms. Although still emerging, vapour-phase strategies are paving the way for an all-dry integration framework that could improve EUV patterning workflows and meet the demands of future technology nodes.

36 MATERIALS SCIENCE↗