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Increased accuracy and signal-to-noise ratio through recent improvements in infra-red video bolometer fabrication and calibration

The infra-red video bolometer (IRVB) is a diagnostic equipped with an infra-red camera that measures the total radiated power in thousands of lines of sight within a large field of view. Recently validated in MAST-U [Fderici et al., Rev. Sci. Instrum. 94, 033502 (2023)], it offers a high spatial resolution map of the radiated power in the divertor region, where large gradients are expected. The IRVB’s sensing element comprises a thin layer of high Z absorbing material, typically platinum, usually coated with carbon to reduce reflections [Peterson et al., Rev. Sci. Instrum. 79, 10E301 (2008)].Here, the possibility of using a relatively inert material such as titanium, is explored that can be produced in layers up to 1 μm compared to 2.5 μm for Pt and then coat it with Pt of the desired thickness (0.3 μm per side here) and carbon. This leads to a higher temperature signal (about 3 times) and better spatial resolution (about 4 times), resulting in higher accuracy in the measured power [Peterson et al., Rev. Sci. Instrum. 79, 10E301 (2008)]. This assembly is also expected to improve foil uniformity, as the Pt layer is obtained via deposition rather than mechanical processes [Mukai et al., Rev. Sci. Instrum. 87, 2014 (2016)].Given its multi-material composition, measuring the thermal properties of the foil assembly is vital. Various methods using a calibrated laser as a heat source have been developed, analyzing the temperature profile shape [Sano et al., Plasma and Fusion Res. 7, 2405039 (2012)] and [Mukai et al., Rev. Sci. Instrum. 89, 10E114 (2018)] or fitting the calculated laser power for different intensities and frequencies [Fderici et al., Rev. Sci. Instrum. 94, 033502 (2023)]. Here, a simpler approach is presented, which relies on analyzing the separate components of the foil heat equation for a single laser exposure in a given area. This can then be iterated over the entire foil to capture local deviations.

Magnetic Fusion Energy

Developing a robust sensor for infrared imaging bolometers

A new type of large area sensor for infrared imaging bolometers has been developed. It replaces the thin and fragile free-standing metal foils, which typically have been used, with a multi-layer coated sapphire (or diamond) substrate. Sapphire is transparent to mid-infrared wavelengths, is robust against transients, and can be thick enough to even be the vacuum window. The primary radiation absorber is still a thin deposited metal layer, but now it is partially insulated from the supporting sapphire substrate by a black (carbon-based) layer, which also acts as a blackbody remitter. Test results indicate 6× more noise equivalent power density (estimated NEPD = 23 W/m 2 at 5 ms camera exposure time, foil temperature decay time 60 ms) for a 2 μm gold-coated sapphire disk compared to estimated NEP = 4 W/m 2 at 1.8 ms exposure time, with foil decay time 420 ms, for a nominal 2.5 μm thick platinum-free-standing foil.

47 OTHER INSTRUMENTATION

Infrared-Bolometer Arrays with Reflective Backshorts

Integrated circuits that incorporate square arrays of superconducting-transition- edge bolometers with optically reflective backshorts are being developed for use in image sensors in the spectral range from far infrared to millimeter wavelengths. To maximize the optical efficiency (and, thus, sensitivity) of such a sensor at a specific wavelength, resonant optical structures are created by placing the backshorts at a quarter wavelength behind the bolometer plane. The bolometer and backshort arrays are fabricated separately, then integrated to form a single unit denoted a backshort-under-grid (BUG) bolometer array. In a subsequent fabrication step, the BUG bolometer array is connected, by use of single-sided indium bump bonding, to a readout device that comprises mostly a superconducting quantum interference device (SQUID) multiplexer circuit. The resulting sensor unit comprising the BUG bolometer array and the readout device is operated at a temperature below 1 K. The concept of increasing optical efficiency by use of backshorts at a quarter wavelength behind the bolometers is not new. Instead, the novelty of the present development lies mainly in several features of the design of the BUG bolometer array and the fabrication sequence used to implement the design. Prior to joining with the backshort array, the bolometer array comprises, more specifically, a square grid of free-standing molybdenum/gold superconducting-transition-edge bolometer elements on a 1.4- m-thick top layer of silicon that is part of a silicon support frame made from a silicon-on-insulator wafer. The backshort array is fabricated separately as a frame structure that includes support beams and contains a correspond - ing grid of optically reflective patches on a single-crystal silicon substrate. The process used to fabricate the bolometer array includes standard patterning and etching steps that result in the formation of deep notches in the silicon support frame. These notches are designed to interlock with the support beams on the backshort-array structure to provide structural support and precise relative positioning. The backshort-array structure is inserted in the silicon support frame behind the bolometer array, and the notches in the frame serve to receive the support beams of the backshort-array structure and thus determine the distance between the backshort and bolometer planes. The depth of the notches and, thus, the distance between the backshort and bolometer planes, can be tailored to a value between 25 to 300 m adjusting only a few process steps. The backshort array is designed so as not to interfere with the placement of indium bumps for subsequent indium bump-bonding to the multiplexing readout circuitry

Miller, Timothy M.

Improved fabrication techniques for infrared bolometers

Techniques are described for producing improved infrared bolometers from doped germanium. Ion implantation and sputter metalization have been used to make ohmic electrical contacts to Ge:Ga chips. This method results in a high yield of small monolithic bolometers with very little low-frequency noise. When one of these chips is used as the thermometric element of a composite bolometer, it must be bonded to a dielectric substrate. The thermal resistance of the conventional epoxy bond has been measured and found to be undesirably large. A procedure for soldering the chip to a metalized portion of the substrate is described which reduced this resistance. The contribution of the metal film absorber to the heat capacity of a composite bolometer has been measured. The heat capacity of a NiCr absorber at 1.3 K can dominate the bolometer performance. A Bi absorber has significantly lower heat capacity. A low temperature blackbody calibrator has been built to measure the optical responsivity of bolometers. A composite bolometer system with a throughput of approx. 0.1 sr sq cm was constructed using the new techniques. In negligible background it has an optical NEP of 3.6 10((exp -15) W/sq root of Hz at 1.0 K with a time constant of 20 ms. The noise in this bolometer is white above 2.5 Hz and is somewhat below the value predicted by thermodynamic equilibrium theory. It is in agreement with calculations based on a recent nonequilibrium theory.

Lange, A. E.

Integrated Electron-tunneling Refrigerator and TES Bolometer for Millimeter Wave Astronomy

We describe progress in the development of a close-packed array of bolometers intended for use in photometric applications at millimeter wavelengths from ground- based telescopes. Each bolometer in the may uses a proximity-effect Transition Edge Sensor (TES) sensing element and each will have integrated Normal-Insulator-Superconductor (NIS) refrigerators to cool the bolometer below the ambient bath temperature. The NIS refrigerators and acoustic-phonon-mode-isolated bolometers are fabricated on silicon. The radiation-absorbing element is mechanically suspended by four legs, whose dimensions are used to control and optimize the thermal conductance of the bolometer. Using the technology developed at NIST, we fabricate NIS refrigerators at the base of each of the suspension legs. The NIS refrigerators remove hot electrons by quantum-mechanical tunneling and are expected to cool the biased (approx.10 pW) bolometers to <170 mK while the bolometers are inside a pumped 3He-cooled cryostat operating at approx.280 mK. This significantly lower temperature at the bolometer allows the detectors to approach background-limited performance despite the simple cryogenic system.

Silverberg, R. F.

Improved fabrication techniques for infrared bolometers

Ion implantation and sputter metallization are used to produce ohmic electrical contacts to Ge:Ga chips. The method is shown to give a high yield of small monolithic bolometers with very little low-frequency noise. It is noted that when one of the chips is used as the thermometric element of a composite bolometer it must be bonded to a dielectric substrate. The thermal resistance of the conventional epoxy bond is measured and found to be undesirably large. A procedure for soldering the chip to a metallized portion of the substrate in such a way as to reduce this resistance is outlined. An evaluation is made of the contribution of the metal film absorber to the heat capacity of a composite bolometer. It is found that the heat capacity of a NiCr absorber at 1.3 K can dominate the bolometer performance. A Bi absorber possesses significantly lower heat capacity. A low-temperature blackbody calibrator is built to measure the optical responsivity of bolometers. A composite bolometer system with a throughput of approximately 0.1 sr sq cm is constructed using the new techniques. The noise in this bolometer is white above 2.5 Hz and is slightly below the value predicted by thermodynamic equilibrium theory.

Lange, A. E.

Ground Calibrations of the Clouds and the Earth's Radiant Energy System (CERES) Tropical Rainfall Measuring Mission Spacecraft Thermistor Bolometers

The Clouds and the Earth's Radiant Energy System (CERES) spacecraft scanning thermistor bolometers will measure earth-reflected solar and earth-emmitted,longwave radiances, at the top-of-the-atmosphere. The measurements are performed in the broadband shortwave (0.3-5.0 micron) and longwave (5.0 - >100 micron) spectral regions as well as in the 8 -12 micron water vapor window over geographical footprints as small as 10 kilometers at the nadir. The CERES measurements are designed to improve our knowledge of the earth's natural climate processes, in particular those related to clouds, and man's impact upon climate as indicated by atmospheric temperature. November 1997, the first set of CERES bolometers is scheduled for launch on the Tropical Rainfall Measuring Mission (TRMM) Spacecraft. The CERES bolometers were calibrated radiometrically in a vacuum ground facility using absolute reference sources, tied to the International Temperature Scale of 1990. Accurate bolometer calibrations are dependent upon the derivations of the radiances from the spectral properties [reflectance, transmittance, emittance, etc.] of both the sources and bolometers. In this paper, the overall calibration approaches are discussed for the longwave and shortwave calibrations. The spectral responses for the TRMM bolometer units are presented and applied to the bolometer ground calibrations in order to determine pre-launch calibration gains.

Lee, Robert B., III

A Two-Dimensional, Semiconducting Bolometer Array for HAWC

The Stratospheric Observatory For Infrared Astronomy's (SOFIA's) High resolution Airborne Wideband Camera (HAWC) will use an ion-implanted silicon bolometer array developed at NASA s Goddard Space Flight Center (GSFC). The GSFC Pop-Up Detectors (PUDs) use a unique folding technique to enable a 12 x 32 element closepacked array of bolometers with a filling factor greater than 95%. The HAWC detector uses a resistive metal film on silicon to provide frequency independent, approx. 50% absorption over the 40 - 300 micron band. The silicon bolometers are manufactured in 32-element rows within silicon frames using Micro Electro Mechanical Systems (MEMS) silicon etching techniques. The frames are then cut, "folded", and glued onto a metallized, ceramic, thermal bus "bar". Optical alignment using micrometer jigs ensures their uniformity and correct placement. The rows are then stacked side-by-side to create the final 12 x 32 element array. A kinematic Kevlar suspension system isolates the 200 mK bolometer cold stage from the rest of the 4K detector housing. GSFC - developed silicon bridge chips make electrical connection to the bolometers, while maintaining thermal isolation. The Junction Field Effect Transistor (JFET) preamplifiers for all the signal channels operate at 120 K, yet they are electrically connected and located in close proximity to the bolometers. The JFET module design provides sufficient thermal isolation and heat sinking for these, so that their heat is not detected by the bolometers. Preliminary engineering results from the flight detector dark test run are expected to be available in July 2004. This paper describes the array assembly and mechanical and thermal design of the HAWC detector and the JFET module.

Voellmer, George M.

Semiconductor Bolometers Give Background-Limited Performance

Semiconductor bolometers that are capable of detecting electromagnetic radiation over most or all of the infrared spectrum and that give background-limited performance at operating temperatures from 20 to 300 K have been invented. The term background-limited performance as applied to a bolometer, thermopile, or other infrared detector signifies that the ability to detect infrared signals that originate outside the detector is limited primarily by thermal noise attributable to the background radiation generated external to the bolometer. The signal-to-noise ratios and detectivities of the bolometers and thermopiles available prior to this invention have been lower than those needed for background-limited performance by factors of about 100 and 10, respectively. Like other electrically resistive bolometers, a device according to the invention exhibits an increase in electrical resistance when heated by infrared radiation. Depending on whether the device is operated under the customary constant- current or constant-voltage bias, the increase in electrical resistance can be measured in terms of an increase in voltage across the device or a decrease in current through the device, respectively. In the case of a semiconductor bolometer, it is necessary to filter out visible and shorter-wavelength light that could induce photoconductivity and thereby counteract all or part of the desired infrared- induced increase in resistance. The basic semiconductor material of a bolometer according to the invention is preferably silicon doped with one or more of a number of elements, each of which confers a different variable temperature coefficient of resistance. Suitable dopants include In, Ga, S, Se, Te, B, Al, As, P, and Sb. The concentration of dopant preferably lies in the range between 0.1 and 1,000 parts per billion.

Goebel, John

Design and Fabrication of Two-Dimensional Semiconducting Bolometer Arrays for the High Resolution Airborne Wideband Camera (HAWC) and the Submillimeter High Angular Resolution Camera II (SHARC-II)

The High resolution Airborne Wideband Camera (HAWC) and the Submillimeter High Angular Resolution Camera II (SHARC 11) will use almost identical versions of an ion-implanted silicon bolometer array developed at the National Aeronautics and Space Administration's Goddard Space Flight Center (GSFC). The GSFC "Pop-Up" Detectors (PUD's) use a unique folding technique to enable a 12 x 32-element close-packed array of bolometers with a filling factor greater than 95 percent. A kinematic Kevlar(Registered Trademark) suspension system isolates the 200 mK bolometers from the helium bath temperature, and GSFC - developed silicon bridge chips make electrical connection to the bolometers, while maintaining thermal isolation. The JFET preamps operate at 120 K. Providing good thermal heat sinking for these, and keeping their conduction and radiation from reaching the nearby bolometers, is one of the principal design challenges encountered. Another interesting challenge is the preparation of the silicon bolometers. They are manufactured in 32-element, planar rows using Micro Electro Mechanical Systems (MEMS) semiconductor etching techniques, and then cut and folded onto a ceramic bar. Optical alignment using specialized jigs ensures their uniformity and correct placement. The rows are then stacked to create the 12 x 32-element array. Engineering results from the first light run of SHARC II at the CalTech Submillimeter Observatory (CSO) are presented.

Voellmer, George M.

Design and Fabrication of Two-Dimensional Semiconducting Bolometer Arrays for the High Resolution Airborne Wideband Camera (HAWC) and the Submillimeter High Angular Resolution Camera II (SHARC-II)

The High resolution Airborne Wideband Camera (HAWC) and the Submillimeter High Angular Resolution Camera II (SHARC II) will use almost identical versions of an ion-implanted silicon bolometer array developed at the National Aeronautics and Space Administration's Goddard Space Flight Center (GSFC). The GSFC 'Pop-up' Detectors (PUD's) use a unique folding technique to enable a 12 x 32-element close-packed array of bolometers with a filling factor greater than 95 percent. A kinematic Kevlar(trademark) suspension system isolates the 200 mK bolometers from the helium bath temperature, and GSFC - developed silicon bridge chips make electrical connection to the bolometers, while maintaining thermal isolation. The JFET preamps operate at 120 K. Providing good thermal heat sinking for these, and keeping their conduction and radiation from reaching the nearby bolometers, is one of the principal design challenges encountered. Another interesting challenge is the preparation of the silicon bolometers. They are manufactured in 32-element, planar rows using Micro Electro Mechanical Systems (MEMS) semiconductor etching techniques, and then cut and folded onto a ceramic bar. Optical alignment using specialized jigs ensures their uniformity and correct placement. The rows are then stacked to create the 12 x 32-element array. Engineering results from the first light run of SHARC II at the Caltech Submillimeter Observatory (CSO) are presented.

Voellmer, George M.

A progress report on using bolometers cooled by adiabatic demagnetization refrigeration

For sensitive detection of astronomical continuum radiation in the 200 micron to 3 mm wavelength range, bolometers are presently the detectors of choice. In order to approach the limits imposed by photon noise in a cryogenically cooled telescope in space, bolometers must be operated at temperatures near 0.1 K. Researchers report progress in building and using bolometers that operate at these temperatures. The most sensitive bolometer had an estimated noise equivalent power (NEP) of 7 x 10(exp 017) W Hz(exp -1/2). Researchers also briefly discuss the durability of paramagnetic salts used to cool the bolometers.

Lesyna, L.

Upcoming planetary missions and the applicability of high temperature superconductor bolometers

Planetary missions to Mars and beyond can last 11 years and longer, making impractical the use of stored cryogens. Passive radiative coolers and single-stage mechanical coolers remain possibilities. CRAF and CASSINI, both using the newly developed Mariner Mark 2 spacecraft, will be the next outer planet missions after Galileo; they are intended to provide information on the origin and evolution of the solar system. CRAF is a cometary rendezvous mission slated for a 1994 launch. CASSINI has been chosen by ESA and will be launched by a Titan 4/Centaur in 1996. It will fly by Jupiter in 2000, inject an ESA-supplied probe into Titan in 2002, and take data in Saturn orbit from 2002 to 2006. NASA/Goddard is currently developing a prototype Fourier transform spectrometer (CIRS) that will be proposed for the CASSINI mission. The baseline infrared detectors for CIRS are HgCdTe to 16 microns and Schwarz-type thermopiles from 16 to 1000 microns. The far infrared focal plane could be switched from thermopiles to high temperature superconductor (HTS) bolometers between now and 1996. An HTS bolometer could be built using the kinetic inductance effect, or the sharp resistance change at the transition. The transition-edge bolometer is more straightforward to implement and initial efforts at NASA/Goddard are directed to that device. A working device was made and tested in early 1989. It also has somewhat elevated noise levels below 100 Hz. Upcoming efforts will center on reducing the time constant of the HTS bolometer by attempting to deposit an HTS film on a diamond substrate, and by thinning SrTiO3 substrates. Attempts will be made to improve the film quality to reduce th 1/f noise level, and to improve the thermal isolation to increase the bolometer sensitivity. An attempt is being made to deposit good-quality HTS films on diamond films using an MOCVD technique.

Brasunas, J.

Upcoming planetary missions and the applicability of high temperature superconductor bolometers

Planetary missions to Mars and beyond can last 11 years and longer, making impractical the use of stored cryogens. Passive radiative coolers and single-stage mechanical coolers remain possibilities. Cassini and Comet Rendezvous/Asteroid Fly-by (CRAF), both using the newly developed Mariner Mark 2 spacecraft, will be the next outer planet missions after Galileo; they are intended to provide information on the origin and evolution of the solar system. CRAF is slated for a 1994 launch. Cassini was chosen by ESA and will be launched by a Titan 4/Centaur in 1996. It will fly by Jupiter in 2000, inject an ESA-supplied probe into Titan in 2002, and take data in Saturn's orbit from 2002 to 2006. NASA/Goddard is currently developing a prototype Fourier transform spectrometer, the Composite Infrared Spectrometer (CIRS), for the Cassini mission. The baseline infrared detectors for CIRS are HgCdTe to 16 microns and Schwarz-type thermopiles from 16 to 1000 microns. The far infrared focal plane could be switched from thermopiles to high temperature superconductor (HTS) bolometers between now and 1996. An HTS bolometer could be built using the kinetic inductance effect, or the sharp resistance change at the transition. The transition-edge bolometer is more straightforward to implement, and initial efforts at NASA/Goddard are directed to that device. A working device was made and tested in early 1989. It also has somewhat elevated noise levels below 100 Hz. Upcoming efforts will center on reducing the time constant of the HTS bolometer by attempting to deposit an HTS film on a diamond substrate, and by thinning SrTiO3 substrates. Attempts will be made to improve the film quality to reduce the 1/4 noise level, and to improve the thermal isolation to increase the bolometer sensitivity. An attempt is being made to deposit good-quality HTS films on diamond films using a metal-organic chemical vapor deposition (MOCVD) technique.

Brasunas, J.

Spectral Characterizations of the Clouds and the Earth's Radiant Energy System (CERES) Thermistor Bolometers using Fourier Transform Spectrometer (FTS) Techniques

Fourier Transform Spectrometer (FTS) techniques are being used to characterize the relative spectral response, or sensitivity, of scanning thermistor bolometers in the infrared (IR) region (2 - >= 100-micrometers). The bolometers are being used in the Clouds and the Earth's Radiant Energy System (CERES) program. The CERES measurements are designed to provide precise, long term monitoring of the Earth's atmospheric radiation energy budget. The CERES instrument houses three bolometric radiometers, a total wavelength (0.3- >= 150-micrometers) sensor, a shortwave (0.3-5-micrometers) sensor, and an atmospheric window (8-12-micrometers) sensor. Accurate spectral characterization is necessary for determining filtered radiances for longwave radiometric calibrations. The CERES bolometers spectral response's are measured in the TRW FTS Vacuum Chamber Facility (FTS - VCF), which uses a FTS as the source and a cavity pyroelectric trap detector as the reference. The CERES bolometers and the cavity detector are contained in a vacuum chamber, while the FTS source is housed in a GN2 purged chamber. Due to the thermal time constant of the CERES bolometers, the FTS must be operated in a step mode. Data are acquired in 6 IR spectral bands covering the entire longwave IR region. In this paper, the TRW spectral calibration facility design and data measurement techniques are described. Two approaches are presented which convert the total channel FTS data into the final CERES spectral characterizations, producing the same calibration coefficients (within 0.1 percent). The resulting spectral response curves are shown, along with error sources in the two procedures. Finally, the impact of each spectral response curve on CERES data validation will be examined through analysis of filtered radiance values from various typical scene types.

Thornhill, K. Lee

First Astronomical Use Of Multiplexed Transition Edge Bolometers

We present performance results based on the first astronomical use of multiplexed superconducting bolometers. The Fabry-Perot Interferometer Bolometer Research Experiment (FIBRE) is a broadband submillimeter spectrometer that achieved first light in June 2001 at the Caltech Submillimeter Observatory (CSO). FIBRE's detectors are superconducting transition edge sensor (TES) bolometers read out by a SQUID multiplexer. The Fabry-Perot uses a low resolution grating to order sort the incoming light. A linear bolometer array consisting of 16 elements detects this dispersed light, capturing five orders simultaneously from one position on the sky. With tuning of the Fabry-Perot over one free spectral range, a spectrum covering delta-lamda/lamda = 1/7 at a resolution of delta-lamda/lamda = 1/1200 can be acquired. This spectral resolution is sufficient to resolve doppler broadened line emission from external galaxies. FIBRE operates in the 350 micrometer and 450 micrometer bands. These bands cover line emission from the important PDR tracers neutral carbon [CI] and carbon monoxide (CO). We have verified that the multiplexed bolometers are photon noise limited even with the low power present in moderate resolution spectrometry.

Benford, D. J.

Superconducting Bolometer Array Architectures

The next generation of far-infrared and submillimeter instruments require large arrays of detectors containing thousands of elements. These arrays will necessarily be multiplexed, and superconducting bolometer arrays are the most promising present prospect for these detectors. We discuss our current research into superconducting bolometer array technologies, which has recently resulted in the first multiplexed detections of submillimeter light and the first multiplexed astronomical observations. Prototype arrays containing 512 pixels are in production using the Pop-Up Detector (PUD) architecture, which can be extended easily to 1000 pixel arrays. Planar arrays of close-packed bolometers are being developed for the GBT (Green Bank Telescope) and for future space missions. For certain applications, such as a slewed far-infrared sky survey, feedhorncoupling of a large sparsely-filled array of bolometers is desirable, and is being developed using photolithographic feedhorn arrays. Individual detectors have achieved a Noise Equivalent Power (NEP) of -10(exp 17) W/square root of Hz at 300mK, but several orders of magnitude improvement are required and can be reached with existing technology. The testing of such ultralow-background detectors will prove difficult, as this requires optical loading of below IfW. Antenna-coupled bolometer designs have advantages for large format array designs at low powers due to their mode selectivity.

Benford, Dominic

Ultralow-Background Large-Format Bolometer Arrays

In the coming decade, work will commence in earnest on large cryogenic far-infrared telescopes and interferometers. All such observatories - for example, SAFIR, SPIRIT, and SPECS - require large format, two dimensional arrays of close-packed detectors capable of reaching the fundamental limits imposed by the very low photon backgrounds present in deep space. In the near term, bolometer array architectures which permit 1000 pixels - perhaps sufficient for the next generation of space-based instruments - can be arrayed efficiently. Demonstrating the necessary performance, with Noise Equivalent Powers (NEPs) of order 10-20 W/square root of Hz, will be a hurdle in the coming years. Superconducting bolometer arrays are a promising technology for providing both the performance and the array size necessary. We discuss the requirements for future detector arrays in the far-infrared and submillimeter, describe the parameters of superconducting bolometer arrays able to meet these requirements, and detail the present and near future technology of superconducting bolometer arrays. Of particular note is the coming development of large format planar arrays with absorber-coupled and antenna-coupled bolometers.

Benford, Dominic