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Bond Dissociation Energies of the Tungsten Fluorides and Their Singly-Charged Ions: A Density Functional Survey

The dissociation of WF6 and the related singly-charged cations and anions into the lower fluorides and fluorine atoms has been investigated theoretically using density functional theory (B3LYP) and relativistic effective core potentials, with estimates of spin-orbit effects included using a simple model. The inclusion of spin-orbit is essential for a correct description of the thermochemistry. The total atomization energy of the neutral and anionic WF6 is reproduced to within 25 kcal/mol, but comparison of individual bond dissociation energies with available experimental data shows discrepancies of up to 10 kcal/mol. The results are nevertheless useful to help resolve discrepancies in experimental data and provide estimates of missing data.

Dyall, Kenneth G.↗

Plasma spectroscopy of uranium and tungsten, part 1

Results of research on uranium and tungsten spectra are summarized. Measurements of visible line spectra and opacities were carried out on shock tube plasmas which, prior to shock compression, were mixtures of rare gases and UF6 or WF6. Opacities were compared to theoretical predictions. Feasibility of light source methods other than the shock tube was explored for future applications in the spectroscopy of heavy metals and ions.

Wilkerson, T. D.↗

Weldability of three forms of chemically vapor deposited tungsten

Methods were developed for electron-beam welding several forms of chemically vapor-deposited tungsten. Weld ductility was evaluated from the results of ductile-brittle transition-temperature determinations. Welds in tungsten produced from WF6 were considerably more ductile than those associated with WCl6-produced tungsten. The larger grain size of the latter material was largely responsible for this behavior.

Bryant, W. A.↗

Simulation of Gas Mixtures in RF Discharges for Nitride Deposition

Tungsten and titanium nitride films have long been grown by chemical vapor deposition (CVD) methods. However, there has been recent interest in low temperature growth using plasma enhanced CVD. For the present work, we focus on the radio frequency (BE) discharge characteristics of gas mixtures used in nitride deposition (for example, WF6 and ammonia). Because the radial variations for a standard 200 mm, parallel plate reactor are limited to a small zone near the edges of the electrodes, a 1-D (one-dimensional) analysis is considered. This model consists of a self-consistent, 3-D (three-dimensional) moment fluid simulation that solves the continuity, momentum, and energy equations for neutral and charged species. The results in terms of plasma structure, radical concentrations, and local deposition rate will be presented. We will also compare the 1-D results with those obtained from a 2-D hybrid plasma equipment model (HPEM) developed at the University of Illinois.

Hwang, Helen H.↗