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Results for “W-Zr”

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All sourcesNASA NTRSDOE OSTI
NASA NTRS1986

Amosphous diffusion barriers

Amorphous W-Zr and W-N alloys were investigated as diffusion barriers in silicon metallization schemes. Data were presented showing that amorphous W-Zr crystallizes at 900 C, which is 200 C higher than amorphous W-Ni films, and that both films react with metallic overlayers at temperatures far below the crystllization temperature. Also, W-N alloys (crystalline temperature of 600 C) were successfully incorporated as a diffusion barrier in contact structures with both Al and Ag overlayers. The thermal stability of the electrical characteristics of shallow n(+)p junctions significantly improved by incorporating W-N layers in the contact system. One important fact demonstated was the critical influence of the deposition parameters during formation of these carriers.

Kolawa, E.↗
DOE OSTI2020

Materials Data on ZrW2 by Materials Project

ZrW2 is Cubic Laves structured and crystallizes in the cubic Fd-3m space group. The structure is three-dimensional. Zr is bonded in a 12-coordinate geometry to twelve equivalent W atoms. All Zr–W bond lengths are 3.18 Å. W is bonded to six equivalent Zr and six equivalent W atoms to form a mixture of corner, edge, and face-sharing WZr6W6 cuboctahedra. All W–W bond lengths are 2.71 Å.

36 MATERIALS SCIENCE↗
DOE OSTI2020

Materials Data on Zr4W by Materials Project

Zr4W is Iron carbide-like structured and crystallizes in the cubic Fd-3m space group. The structure is zero-dimensional and consists of eight Zr4W clusters. Zr is bonded in a single-bond geometry to one W atom. The Zr–W bond length is 2.52 Å. W is bonded in a tetrahedral geometry to four equivalent Zr atoms.

36 MATERIALS SCIENCE↗
DOE OSTI2020

Materials Data on Zr3W5 by Materials Project

W5Zr3 crystallizes in the tetragonal I4/mcm space group. The structure is three-dimensional. there are two inequivalent Zr sites. In the first Zr site, Zr is bonded in a 4-coordinate geometry to ten W atoms. There are a spread of Zr–W bond distances ranging from 2.69–3.13 Å. In the second Zr site, Zr is bonded in a 10-coordinate geometry to two equivalent Zr and eight equivalent W atoms. Both Zr–Zr bond lengths are 2.66 Å. All Zr–W bond lengths are 3.12 Å. There are two inequivalent W sites. In the first W site, W is bonded in a 6-coordinate geometry to four equivalent Zr and ten W atoms. There are two shorter (2.66 Å) and eight longer (2.97 Å) W–W bond lengths. In the second W site, W is bonded in a 2-coordinate geometry to six Zr and two equivalent W atoms.

36 MATERIALS SCIENCE↗